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Acceleration sensor structure and use thereof

  • US 9,651,574 B2
  • Filed: 10/22/2015
  • Issued: 05/16/2017
  • Est. Priority Date: 01/12/2012
  • Status: Active Grant
First Claim
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1. A sensor structure matrix, comprising four sensor cells with a planar structure, whereineach sensor cell includes capacitive detection combs and a frame that extends around the detection combs in a common plane, moving electrodes of the detection combs being coupled to move with the frame;

  • said sensor cells are arranged into the common plane to detect acceleration components in the common plane,a pair of sensor cells is arranged for detection in a first in-plane direction;

    another pair of sensor cells is arranged for detection in a second in-plane direction, wherein the second in-plane direction is perpendicular to the first direction; and

    the pairs of sensor cells are positioned to provide compensating symmetry in the common plane of the sensor structure matrix.

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