Photonic integration platform
First Claim
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1. A silicon-on-insulator (SOI) optical device comprising:
- a semiconductor substrate;
an insulation layer disposed above the substrate, wherein a waveguide is embedded in the insulation layer, and wherein the embedded waveguide comprises a waveguide adapter comprising multiple prongs exposed at an external coupling surface of the optical device, the external coupling surface being configured to couple to an external light source; and
a crystalline silicon layer above the insulation layer, the silicon layer comprising a silicon waveguide that overlaps the embedded waveguide such that an optical signal transmitted in the embedded waveguide is transferred to the silicon waveguide.
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Abstract
A SOI device may include a waveguide adapter that couples light between an external light source—e.g., a fiber optic cable or laser—and a silicon waveguide on the silicon surface layer of the SOI device. In one embodiment, the waveguide adapter is embedded into the insulator layer. Doing so may enable the waveguide adapter to be formed before the surface layer components are added onto the SOI device. Accordingly, fabrication techniques that use high-temperatures may be used without harming other components in the SOI device—e.g., the waveguide adapter is formed before heat-sensitive components are added to the silicon surface layer.
24 Citations
12 Claims
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1. A silicon-on-insulator (SOI) optical device comprising:
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a semiconductor substrate; an insulation layer disposed above the substrate, wherein a waveguide is embedded in the insulation layer, and wherein the embedded waveguide comprises a waveguide adapter comprising multiple prongs exposed at an external coupling surface of the optical device, the external coupling surface being configured to couple to an external light source; and a crystalline silicon layer above the insulation layer, the silicon layer comprising a silicon waveguide that overlaps the embedded waveguide such that an optical signal transmitted in the embedded waveguide is transferred to the silicon waveguide. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A silicon-on-insulator (SOI) optical device comprising:
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a semiconductor substrate; an insulation layer disposed above the substrate, wherein a waveguide is embedded in the insulation layer, wherein the insulation layer completely surrounds the embedded waveguide, and wherein the embedded waveguide comprises a waveguide adapter comprising multiple prongs exposed at an external coupling surface of the optical device, the external coupling surface being configured to couple to an external light source; and a crystalline silicon layer above the insulation layer, the silicon layer comprising a silicon waveguide that overlaps the embedded waveguide such that an optical signal transmitted in the embedded waveguide is transferred to the silicon waveguide. - View Dependent Claims (8, 9, 10, 11, 12)
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Specification