Symmetric multi-port inductor for differential multi-band RF circuits

• US 9,653,204 B2
• Filed: 01/22/2015
• Issued: 05/16/2017
• Est. Priority Date: 01/22/2015
• Status: Active Grant

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.)
• Original Assignee: GlobalFoundries, Inc.
• Inventors: Vanukuru, Venkata N. R.
• Primary Examiner(s): Lian, Mangtin
• Application Number:
  US14/602,567
• Publication Number:
  US 20160217904A1
• Time in Patent Office: 845 Days
• Field of Search: 336200, 336223, 336192, 336147, 336146
• CPC Class Codes: H01F 17/0006 Printed inductances printed coils for dynamo-electric machines H02K3/26; printed circuits H05K
• CPC Class Codes: H01F 2017/0046 with a conductive path having a bridge
• CPC Class Codes: H01F 2017/0073 with a special conductive pattern, e.g. flat spiral
• CPC Class Codes: H01F 27/29 Terminals; Tapping arrangements for signal inductances

Abstract

Structures and methods for implementing high performance symmetric multi-port inductors are provided. The multiport inductor structure includes a plurality of conductors which are structured and arranged in turns to obtain symmetry between a plurality of selected input terminals connecting to respective ones of the plurality of conductors.

Claims

1. A multiport inductor structure comprising a plurality of stacked and non-stacked conductors which are structured and arranged in turns to obtain symmetry between a plurality of selected input terminals connecting to respective ones of the plurality of conductor, wherein the stacked and non-stacked conductors are symmetrical between pairs of terminals, with an outer segment being in series, a middle segment being in parallel and an inner segment being single-layered.

2. The multiport inductor structure of claim 1, wherein the plurality of conductors comprises:

a first section of serially stacked turns of metal wiring segments;

a second section of parallel stacked turns of metal wiring segments; and

a third section of non-stacked metal wiring segments.

3. The multiport inductor structure of claim 2, wherein the first section of the serially stacked turns, the second section of the parallel stacked turns and the third section of the non-stacked metal wiring segments are provided in a spiral configuration.

4. The multiport inductor structure of claim 2, wherein;

each of the first section, the second section and the third section include metal wiring segments have varying width and spacing therebetween; and

a width of each metal wiring segment of the first section, the second section and the third section reduces as each metal wiring segment of the first section, the second section and the third section goes toward a center and spacing between adjacent metal wiring segments increases as each metal wiring segment of the first section, the second section and the third section goes toward the center.

5. The multiport inductor structure of claim 1, wherein a width or the diameter of each of the plurality of conductors is reduced at a constant rate or monotonic rate at is turns towards a center.

6. The multiport inductor structure of claim 1, wherein a spacing between each consecutive turn of the plurality of conductors increases at a constant rate or monotonic rate.

7. The multiport inductor structure of claim 6, wherein the spacing between each consecutive turn increases periodically.

8. The multiport inductor structure of claim 4, wherein at least one of the width and spacing of an upper turn is different from a lower turn for the metal wiring segments of the first section and the second section.

9. The multiport inductor structure of claim 4, wherein top metal wiring structures of the first section are offset vertically from bottom metal wiring structures of the first section.

10. The multiport inductor structure of claim 2, wherein the second section includes top wiring structures and bottom wiring structures of the plurality of conductors connected in parallel through a plurality of via interconnects along their length.

11. The multiport inductor structure of claim 2, wherein the first section provides a low frequency band, the second section provides an intermediate frequency band and the third section provides a high frequency band.

12. The multiport inductor structure of claim 1, wherein the symmetric inductor structure is a 3-dimensional structure.

13. The multiport inductor structure of claim 1, wherein a patterned ground shield is provided under spiral turns that correspond to lower frequencies.

14. The multiport inductor structure of claim 1, wherein:

terminals taken between outermost pair of the plurality of conductors comprise an inductor to be used at lowest frequency band;

terminals taken between intermediate pair of the plurality of conductors comprise an inductor to be used at intermediate frequency band; and

terminals taken between an innermost pair of the plurality of conductors comprise an inductor to be used at highest frequency band.

15. The multiport inductor structure of claim 1, wherein the outer segment, the middle segment and the inner segment are in a spiral arrangement.

16. The multiport inductor structure of claim 1, wherein:

an upper layer of metal wiring structures are upper conductors including includes a plurality of upper metal wiring segments;

a first group of the plurality of upper metal wiring segments is a single stacked wiring structure;

a second group of the plurality of upper metal wiring segments are multiple stacked wiring segments, corresponding to a lower conductor which includes lower wiring segments serially connected to plural of the second group of the plurality of upper metal wiring segments by via interconnects forming an inductive wiring structure; and

a first group of lower metal wiring segments are connected in parallel to respective upper wiring segments of the second group by a plurality of via interconnects along their lengths.

17. The multiport inductor structure of claim 1, wherein spacings between adjacent metal wiring segments of the stacked and non-stacked conductors increase between adjacent metal wiring segments as winding toward a center and widths of the metal wiring segments decrease as winding toward the center.