Method for fabricating transfer printing substrate using concave-convex structure, transfer printing substrate fabricated thereby and application thereof

• US 9,656,502 B2
• Filed: 03/10/2015
• Issued: 05/23/2017
• Est. Priority Date: 12/19/2011
• Status: Active Grant

• Current Assignee: Gwangju Institute of Science and Technology
• Original Assignee: Gwangju Institute of Science and Technology
• Inventors: Kim, Seok Ho, Yoon, Jongwon, Hwang, Young Kyu, Yun, Su Ok, Jang, Hun Soo, Cho, Hyun-A, Noh, Byeong-Il, Chun, Jaeyi, Ko, Heung Cho, Park, Seong-Ju
• Primary Examiner(s): Jiang, Lisha
• Application Number:
  US14/643,146
• Publication Number:
  US 20150174940A1
• Time in Patent Office: 805 Days
• Field of Search: None
• CPC Class Codes: B32B 3/30 characterised by a layer formed with recesses or projections, e.g. hollows, grooves, protuberances, ribs apertured layer B32B3/266; layer with cavities or internal voids B32B3/26
• CPC Class Codes: B32B 38/10 Removing layers, or parts of layers, mechanically or chemically
• CPC Class Codes: B41C 1/00 Forme preparation
• CPC Class Codes: B41N 1/12 non-metallic other than stone , e.g. printing plates or foils comprising inorganic materials in an organic matrix B41N1/003, B41N1/006 take precedence
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: Y10T 428/24521 with component conforming to contour of nonplanar surface
• CPC Class Codes: Y10T 428/24529 and conforming component on an opposite nonplanar surface

Abstract

The present disclosure provides a method for fabricating a substrate for transfer printing using a concave-convex structure and a substrate for transfer printing fabricated thereby. The method includes preparing a handling substrate having a concave-convex structure formed thereon; forming a sacrificial layer along the concave-convex structure on the handling substrate; coating a polymer on the handling substrate having the sacrificial layer formed thereon to form a polymer substrate having bumps filling a concave portion of the concave-convex structure; and removing the sacrificial layer from the handling substrate. The substrate for transfer printing includes a handling substrate having a concave-convex structure formed thereon; and a polymer substrate placed on the concave-convex structure and having bumps filling a concave portion of the concave-convex structure of the handling substrate. The present invention allows a process of manufacturing a device to be stably performed on an ultrathin substrate and may secure high degree of alignment and high transfer yield in a transfer printing process.

Claims

1. A layered substrate structure for transfer printing, comprising:

a handling substrate having a plurality of concave-convex structures formed thereon, the concave-convex structures each comprising a pot-shaped longitudinal cross-section comprised of an inlet and a belly and wherein the inlet is smaller than the belly; and

a polymer substrate, which is placed on the concave-convex structures of the handling substrate, comprising a plurality of bumps

the bumps each being inserted into a corresponding concave portion of the concave-convex structures and the shape of each of the bumps conforming to the shape of the corresponding concave-portion.

2. The layered substrate structure for transfer printing according to claim 1, further comprising a separation space, wherein the separation space is defined at least in some region between the handling substrate and the polymer substrate.

3. The layered substrate structure for transfer printing according to claim 2, wherein the separation space is defined at least in some region between an upper surface of a concave portion of the concave-convex structure and a lower surface of the polymer substrate.

4. The layered substrate structure for transfer printing according to claim 1, wherein the polymer substrate is divided into a plurality of substrate portions according to a predetermined pattern, the substrate portions being bound to corresponding concave portions of the concave-convex structures by the bumps to maintain arrangement of the substrate portions.

5. The layered substrate structure for transfer printing according to claim 1, further comprising a water soluble polymer layer, wherein the water soluble polymer layer is interposed, at least within a concave portion of the concave-convex structures, between the handling substrate and the polymer substrate and acts as an interfacial adhesive material between the handling substrate and the polymer substrate.