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Reducing hysteresis effects in accelerometer

  • US 9,658,244 B2
  • Filed: 07/08/2014
  • Issued: 05/23/2017
  • Est. Priority Date: 07/08/2014
  • Status: Active Grant
First Claim
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1. A device comprising:

  • a proof mass;

    a support structure surrounding the proof mass, defining a plane, and configured to support the proof mass;

    a flexure connecting the proof mass to the support structure, wherein the flexure allows the proof mass to move about the plane defined by the support structure;

    at least four raised pads arranged on a common surface of the support structure, wherein at least one raised pad is positioned between the flexure and an exterior of the support structure, and wherein the at least one raised pad is configured to be isolatable; and

    two pad flexures connected to the common surface of the support structure and the at least one raised pad, wherein the two pad flexures are configured to be removable,wherein the device is comprised of a monolithic material.

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