Reducing hysteresis effects in accelerometer
First Claim
1. A device comprising:
- a proof mass;
a support structure surrounding the proof mass, defining a plane, and configured to support the proof mass;
a flexure connecting the proof mass to the support structure, wherein the flexure allows the proof mass to move about the plane defined by the support structure;
at least four raised pads arranged on a common surface of the support structure, wherein at least one raised pad is positioned between the flexure and an exterior of the support structure, and wherein the at least one raised pad is configured to be isolatable; and
two pad flexures connected to the common surface of the support structure and the at least one raised pad, wherein the two pad flexures are configured to be removable,wherein the device is comprised of a monolithic material.
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Accused Products
Abstract
Techniques of manufacturing an accelerometer as disclosed herein include positioning an accelerometer between a first stator and a second stator, and the accelerometer comprises a plurality of features. In some examples, the plurality of features include a proof mass, a support structure defining a plane and configured to support the proof mass, a flexure configured to flexibly connect the proof mass to the support structure, and a plurality of raised pads, the plurality comprising at least one raised pad positioned between the flexure and an exterior of the support structure, wherein the at least one raised pad is configured to be isolatable. Techniques of manufacturing the accelerometer as disclosed herein further include compressing the first stator and the second stator onto the accelerometer, attaching a bellyband to the first stator and the second stator, and isolating the at least one raised pad.
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Citations
9 Claims
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1. A device comprising:
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a proof mass; a support structure surrounding the proof mass, defining a plane, and configured to support the proof mass; a flexure connecting the proof mass to the support structure, wherein the flexure allows the proof mass to move about the plane defined by the support structure; at least four raised pads arranged on a common surface of the support structure, wherein at least one raised pad is positioned between the flexure and an exterior of the support structure, and wherein the at least one raised pad is configured to be isolatable; and two pad flexures connected to the common surface of the support structure and the at least one raised pad, wherein the two pad flexures are configured to be removable, wherein the device is comprised of a monolithic material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A device comprising:
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a proof mass; a support structure surrounding the proof mass, defining a plane, and configured to support the proof mass; a flexure connecting the proof mass to the support structure, wherein the flexure allows the proof mass to move about the plane defined by the support structure; and a plurality of raised pads arranged on a common surface of the support structure, wherein at least one raised pad of the plurality of raised pads is configured to be isolatable; and two pad flexures connected to the common surface of the support structure and the at least one raised pad, wherein the two pad flexures are configured to be removable, wherein the device is comprised of a monolithic material.
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Specification