Waveguide mode expander having an amorphous-silicon shoulder
First Claim
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1. A waveguide mode expander comprising:
- a substrate;
a waveguide disposed on the substrate, wherein the waveguide comprises crystalline silicon;
a shoulder optically coupled with the waveguide, wherein;
the shoulder is disposed on the substrate; and
the shoulder comprises non-crystalline silicon; and
a ridge, wherein;
the ridge comprises non-crystalline silicon;
the ridge is disposed on the substrate, such that the shoulder is between the ridge and the substrate;
the ridge has a narrower width than the shoulder, wherein the ridge and the shoulder are configured to guide and expand an optical beam propagating from the waveguide and through the shoulder and the ridge.
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Abstract
A waveguide mode expander couples a smaller optical mode in a semiconductor waveguide to a larger optical mode in an optical fiber. The waveguide mode expander comprises a shoulder and a ridge. In some embodiments, the ridge of the waveguide mode expander has a plurality of stages, the plurality of stages having different widths at a given cross section.
43 Citations
11 Claims
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1. A waveguide mode expander comprising:
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a substrate; a waveguide disposed on the substrate, wherein the waveguide comprises crystalline silicon; a shoulder optically coupled with the waveguide, wherein; the shoulder is disposed on the substrate; and the shoulder comprises non-crystalline silicon; and a ridge, wherein; the ridge comprises non-crystalline silicon; the ridge is disposed on the substrate, such that the shoulder is between the ridge and the substrate; the ridge has a narrower width than the shoulder, wherein the ridge and the shoulder are configured to guide and expand an optical beam propagating from the waveguide and through the shoulder and the ridge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification