Tensile dielectric films using UV curing

• US 9,659,769 B1
• Filed: 10/22/2004
• Issued: 05/23/2017
• Est. Priority Date: 10/22/2004
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (LAM Research Corporation)
• Original Assignee: Novellus Systems Incorporated (LAM Research Corporation)
• Inventors: Chang, Sean, Lu, Guangquan, Ilcisin, Kevin, Pandit, Mandar, Carris, Michael, Varadarajan, Bhadri, Sims, James S., Mordo, David
• Primary Examiner(s): Davis, Daborah Chacko
• Application Number:
  US10/972,084
• Time in Patent Office: 4,596 Days
• Field of Search: 430328
• CPC Class Codes: H01L 21/0217 the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz H01L21/02126 and H01L21/0214 take precedence
• CPC Class Codes: H01L 21/02211 the compound being a silane, e.g. disilane, methylsilane or chlorosilane
• CPC Class Codes: H01L 21/02274 in the presence of a plasma [PECVD]
• CPC Class Codes: H01L 21/02348 treatment by exposure to UV light
• CPC Class Codes: H01L 21/26 Bombardment with radiation H01L21/3105 takes precedence
• CPC Class Codes: H01L 21/3105 After-treatment
• CPC Class Codes: H01L 21/477 Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering H01L21/38 - H01L21/449 and H01L21/461 - H01L21/475 take precedence
• CPC Class Codes: H01L 29/665 using self aligned silicidation, i.e. salicide formation of conductive layers comprising silicides H01L21/28518
• CPC Class Codes: H01L 29/66568 Lateral single gate silicon transistors
• CPC Class Codes: H01L 29/7843 the means being an applied insulating layer

Abstract

A highly tensile dielectric layer is generated on a heat sensitive substrate while not exceeding thermal budget constraints. Ultraviolet (UV) irradiation is used to produce highly tensile films to be used, for example, in strained NMOS transistor architectures. UV curing of as-deposited PECVD silicon nitride films, for example, has been shown to produce films with stresses of at least 1.65 E10 dynes/cm². Other dielectric capping layer film materials show similar results. In transistor implementations, the stress from a source/drain region capping layer composed of such a film is uniaxially transferred to the NMOS channel through the source-drain regions to create tensile strain in the NMOS channel.

Claims

1. A method, comprising:

providing a substrate including a layer of a silicide;

depositing a dielectric layer directly on the layer of silicide, wherein the dielectric layer is selected from the group consisting of a silicon nitride, a silicon carbide, oxygen-doped silicon carbide, nitrogen-doped silicon carbide, silicon boron nitride, silicon boron carbide, and silicon oxide; and

exposing the dielectric layer to ultraviolet radiation at a temperature of no more than 450°

C.,

whereby stress is induced in the dielectric layer.

2. The method of claim 1, wherein the dielectric layer is silicon nitride.

3. The method of claim 2, wherein the tensile stress changes in excess of 7E9 dynes/cm² in less than 10 minutes.

4. The method of claim 3, wherein the tensile stress changes in excess of 8E9 dynes/cm².

5. The method of claim 2, wherein the UV treatment is conducted at between about 250 and 450°

C.

6. The method of claim 5, wherein the UV treatment is conducted at about 400°

C.

7. The method of claim 6, wherein the UV treatment is conducted with an intensity of between about 1 μ

W/cm² and 10 W/cm² in the wavelength range of 200 to 400 nanometers.

8. The method of claim 2, wherein the deposition is conducted at between about 250 and 450°

C.

9. The method of claim 8, where the deposition is conducted at about 350°

C.

10. The method of claim 2, wherein the deposition is conducted by PECVD with parameters as follows:

11. The method of claim 1, wherein the dielectric layer is deposited as a single layer in a single step.

12. The method of claim 1, wherein the dielectric layer is deposited and cured in multiple repeating steps to form a laminate dielectric.

13. The method of claim 1, wherein the dielectric layer has a thickness of about 50 to 30,000 Å

.

14. The method of claim 13, wherein the dielectric layer has a thickness of about 200-1500 Å

.

15. The method of claim 14, wherein the dielectric layer has a thickness of about 700 Å

.

16. The method of claim 1, wherein a portion of the substrate is exposed to the UV treatment such that the tensile stress of dielectric regions on the substrate is not uniform.

17. The method of claim 16, wherein a portion of the substrate is not exposed to the UV treatment.

18. The method of claim 17, wherein the UV treatment exposure of the portion is prevented by masking.

19. The method of claim 18, wherein the masking is provided in a photolithographic operation.

20. The method of claim 16, wherein portions of the substrate are exposed to varying levels of UV treatment ranging from full to none.

21. The method of claim 1, wherein the UV exposure is conducted with a UV source selected from the group consisting of a Hg lamp, a Xe lamp, a deuterium lamp, an excimer lamp, an excimer laser, and a plasma source with the desired UV radiation characteristics.

22. The method of claim 21, wherein the UV treatment is conducted with a Hg lamp as the UV source.

23. The method of claim 1, wherein the UV exposure is continuous.

24. The method of claim 1, wherein the UV exposure is pulsed.

25. The method of claim 1, wherein the UV exposure is conducted with a purging gas.

26. The method of claim 25, wherein the purging gas is selected from the group consisting of He, Ar, N₂, H₂, CO, CO₂, O₂, N₂O, H₂O vapor, vapors of alcohol, and combinations thereof.

27. The method of claim 25, wherein the purging gas is He.

28. The method of claim 1, wherein the UV exposure is conducted under a pressure in the range of about 10⁻

3-1000 Torr.

29. The method of claim 28, wherein the UV exposure is conducted under a pressure in the range of about 1-760 Torr.

30. The method of claim 1, wherein the silicide is a salicide.

31. A method, comprising:

providing a substrate comprising a silicide;

depositing a dielectric layer on the substrate, wherein the dielectric layer is selected from the group consisting of a silicon nitride, a silicon carbide, oxygen-doped silicon carbide, nitrogen-doped silicon carbide, silicon boron nitride, silicon boron carbide, silicon oxide, and combinations thereof; and

exposing the dielectric layer to ultraviolet radiation at a temperature of no more than 450°

C.,

whereby tensile stress in excess of 1E10 dynes/cm² is induced in the dielectric layer.

32. The method of claim 31, wherein the tensile stress is in excess of 1.5E10 dynes/cm².

33. The method of claim 31, wherein the tensile stress is in excess of 1.65E10 dynes/cm².

34. A method, comprising:

providing a substrate comprising a silicide;

depositing a dielectric layer on the substrate, wherein the dielectric layer is selected from the group consisting of silicon nitride, silicon carbide, oxygen-doped silicon carbide, nitrogen-doped silicon carbide, silicon boron nitride, silicon boron carbide, silicon oxide, and combinations thereof; and

exposing the dielectric layer to ultraviolet radiation at a temperature of no more than 450°

C.,

whereby the tensile stress in the dielectric layer changes in excess of 5E9 dynes/cm².

35. The method of claim 34, wherein the tensile stress change occurs in less than 5 minutes.