Energy beam size verification
First Claim
1. A computer-implemented method for automatically verifying a size of at least one energy beam spot, said method comprising the steps of:
- (a) generating a first energy beam spot from a first energy beam source, the first energy beam spot having a predetermined size and power at a first position on a work piece, wherein said first position is detected by at least one of an IR-camera, a CCD-camera, a digital camera, a CMOS camera, or a NIR-camera,(b) varying, via at least one control unit containing a processor, at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until a maximum intensity of the first energy beam spot is detected,(c) comparing, via said at least one control unit, at least one setting of said focus lens and/or astigmatism lens associated with said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens associated with said predetermined size and power of the first energy beam spot, the stored settings being stored within a memory,(d) repeating, via said at least one control unit, steps a-c for different predetermined beam powers, and(e) repeating, via said at least one control unit, steps a-d for different positions on said work piece, and verifying said first energy beam spot size by verifying that each of said focus lens and/or astigmatism lens settings associated with the detected maximum intensity deviate less than a predetermined value from the corresponding stored settings of said focus lens and/or astigmatism lens.
3 Assignments
0 Petitions
Accused Products
Abstract
A method for verifying a size of an energy beam spot, said method comprising the steps of providing a first beam spot having a predetermined size and power at a first position on a work piece, varying a focus and/or astigmatism lens setting for said first beam spot until max intensity for the beam spot is detected, comparing the detected settings of said focus lens and/or astigmatism lens for said maximum intensity of the beam spot with stored settings of said focus lens and/or astigmatism lens for the beam spot with said predetermined size and power, repeating step a-c for different predetermined beam powers, repeating step a-d for different positions on said work piece, wherein said beam spot size is verified if each detected settings of said focus lens and/or astigmatism lens are deviating less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.
-
Citations
14 Claims
-
1. A computer-implemented method for automatically verifying a size of at least one energy beam spot, said method comprising the steps of:
-
(a) generating a first energy beam spot from a first energy beam source, the first energy beam spot having a predetermined size and power at a first position on a work piece, wherein said first position is detected by at least one of an IR-camera, a CCD-camera, a digital camera, a CMOS camera, or a NIR-camera, (b) varying, via at least one control unit containing a processor, at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until a maximum intensity of the first energy beam spot is detected, (c) comparing, via said at least one control unit, at least one setting of said focus lens and/or astigmatism lens associated with said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens associated with said predetermined size and power of the first energy beam spot, the stored settings being stored within a memory, (d) repeating, via said at least one control unit, steps a-c for different predetermined beam powers, and (e) repeating, via said at least one control unit, steps a-d for different positions on said work piece, and verifying said first energy beam spot size by verifying that each of said focus lens and/or astigmatism lens settings associated with the detected maximum intensity deviate less than a predetermined value from the corresponding stored settings of said focus lens and/or astigmatism lens. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
-
Specification