MEMS sensors and methods for detecting rotation rates
First Claim
1. A micro-electro-mechanical-system (MEMS) sensor for detecting rotational movements about at least one of three mutually perpendicular spatial axes, x, y, and z, the MEMS sensor comprising:
- a substrate;
at least one anchor secured to the substrate;
at least one driving mass linearly driven to oscillate along the x axis;
at least one sensing mass coupled to the least one driving mass via connecting springs that enable the at least one sensing mass and the at least one driving mass to move relative to each other in the x direction and couple the at least one sensing mass and the at least one driving mass for movement together for rotation about at least one of the y and z axes;
at least one anchor spring coupling the at least one anchor to the at least one driving mass or the at least one sensing mass;
sensing elements for sensing rotation of the MEMS sensor by sensing relative movement between the substrate and the at least one sensing mass; and
at least one drive element for linearly driving the at least one driving mass to oscillate relative to the at least one sensing mass and along the x-axis at a driving frequency,wherein during oscillation along the x-axis the at least one driving mass generates an imbalance of the at least one driving mass with respect to the at least one anchor and Coriolis forces occur because of the imbalance that cause the at least one sensing mass and the at least one driving mass to rotate together about the y or z axis when the MEMS sensor is rotated about the y or z axis.
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Abstract
Micro-electro-mechanical-systems (MEMS) sensors and methods for detecting rates of rotation thereof. The MEMS sensor has at least one driving mass that oscillates along the x-axis, and at least one sensing mass coupled to the driving mass so that the sensing and driving masses move relative to each other in the x direction and are coupled for rotation together about the y and/or z axes. At least one anchor spring couples the driving or sensing mass to an anchor secured to a substrate. Rotation of the MEMS sensor is sensed by sensing relative movement between the substrate and sensing mass. During its oscillation, the driving mass generates an imbalance of the driving and sensing masses with respect to the anchor, and Coriolis forces cause the sensing and driving masses to rotate together about the y or z axis when the MEMS sensor rotates about the y or z axis.
31 Citations
19 Claims
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1. A micro-electro-mechanical-system (MEMS) sensor for detecting rotational movements about at least one of three mutually perpendicular spatial axes, x, y, and z, the MEMS sensor comprising:
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a substrate; at least one anchor secured to the substrate; at least one driving mass linearly driven to oscillate along the x axis; at least one sensing mass coupled to the least one driving mass via connecting springs that enable the at least one sensing mass and the at least one driving mass to move relative to each other in the x direction and couple the at least one sensing mass and the at least one driving mass for movement together for rotation about at least one of the y and z axes; at least one anchor spring coupling the at least one anchor to the at least one driving mass or the at least one sensing mass; sensing elements for sensing rotation of the MEMS sensor by sensing relative movement between the substrate and the at least one sensing mass; and at least one drive element for linearly driving the at least one driving mass to oscillate relative to the at least one sensing mass and along the x-axis at a driving frequency, wherein during oscillation along the x-axis the at least one driving mass generates an imbalance of the at least one driving mass with respect to the at least one anchor and Coriolis forces occur because of the imbalance that cause the at least one sensing mass and the at least one driving mass to rotate together about the y or z axis when the MEMS sensor is rotated about the y or z axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification