Method and apparatus for identifying root cause of defect using composite defect map
First Claim
1. A method of determining defective equipment, the method comprising:
- generating a sample defect map which shows defect distribution in cells of a defective sample;
generating equipment defect maps of a plurality of pieces of equipment through which products of the defective sample passed;
calculating map similarities between the sample defect map and the equipment defect maps; and
determining one or more defective pieces of equipment of the plurality of pieces of equipment, which are the cause of the defective sample, based on the map similarities,wherein the defective sample comprises the products, each of the products being divided into a plurality of cells, and one of the equipment defect maps for one of the plurality of pieces of equipment, shows a defect distribution in cells of the products that passed through the one of the plurality of pieces of equipment,wherein the calculating of the map similarity for each piece of equipment whose equipment defect map has been generated comprises;
calculating cell similarity of each cell position of each product, for each piece of equipment that each product passed through, and whose equipment defect map has been generated; and
calculating map similarity for each piece of equipment whose equipment defect map has been generated,wherein the cell similarity of a specific cell position is a ratio of the number of defective cells in the specific cell position of the equipment defect map to the number of defective cells in the specific cell position of the sample defect map, and the map similarity is the average of cell similarity values of at least some of the cell positions.
1 Assignment
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Accused Products
Abstract
Provided are a method and apparatus for automatically determining defective equipment by using a sample defect map showing defect distribution in each cell of a defective sample and production history information of each product, wherein the defective sample is a set of products, each being divided into a plurality of cells. According to this invention, the method of determining defective equipment is provided. The method comprises, generating a sample defect map which shows defect distribution in each cell of a defective sample, generating an equipment defect map for at least one of pieces of equipment through which each product of the defective sample passed, calculating, for each piece of equipment whose equipment defect map has been generated, map similarity between the sample defect map and the equipment defect map, and determining one or more defective pieces of equipment, which are the cause of the defective sample, based on the map similarity for each piece of equipment whose equipment defect map has been generated, wherein the defective sample is a set of products, each being divided into a plurality of cells, and the equipment defect map for a specific piece of equipment shows defect distribution in each cell of products that passed through the specific piece of equipment among the products of the defective sample.
7 Citations
12 Claims
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1. A method of determining defective equipment, the method comprising:
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generating a sample defect map which shows defect distribution in cells of a defective sample; generating equipment defect maps of a plurality of pieces of equipment through which products of the defective sample passed; calculating map similarities between the sample defect map and the equipment defect maps; and determining one or more defective pieces of equipment of the plurality of pieces of equipment, which are the cause of the defective sample, based on the map similarities, wherein the defective sample comprises the products, each of the products being divided into a plurality of cells, and one of the equipment defect maps for one of the plurality of pieces of equipment, shows a defect distribution in cells of the products that passed through the one of the plurality of pieces of equipment, wherein the calculating of the map similarity for each piece of equipment whose equipment defect map has been generated comprises; calculating cell similarity of each cell position of each product, for each piece of equipment that each product passed through, and whose equipment defect map has been generated; and calculating map similarity for each piece of equipment whose equipment defect map has been generated, wherein the cell similarity of a specific cell position is a ratio of the number of defective cells in the specific cell position of the equipment defect map to the number of defective cells in the specific cell position of the sample defect map, and the map similarity is the average of cell similarity values of at least some of the cell positions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A non-transitory machine readable storage medium on which a computer program is recorded, the computer program performing:
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a process of generating a sample defect map which shows defect distribution in cells of a defective sample; a process of generating equipment defect maps of a plurality of pieces of equipment through which the products of the defective sample passed; a process of calculating map similarities between the sample defect map and the equipment defect maps; and a process of determining one or more defective pieces of equipment of the plurality of pieces of equipment, which are the cause of the defective sample, based on the map similarities, wherein the defective sample comprises the products, each of the products being divided into a plurality of cells, and one of the equipment defect maps for one of the plurality of pieces of equipment, shows a defect distribution in cells of the products that passed through the one of the plurality of pieces of equipment, wherein the process of calculating of the map similarity for each piece of equipment whose equipment defect map has been generated comprises; a process of calculating cell similarity of each cell position of each product, for each piece of equipment that each product passed through, and whose equipment defect map has been generated; and a process of calculating map similarity for each piece of equipment whose equipment defect map has been generated, wherein the cell similarity of a specific cell position is a ratio of the number of defective cells in the specific cell position of the equipment defect map to the number of defective cells in the specific cell position of the sample defect map, and the map similarity is the average of cell similarity values of at least some of the cell positions.
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11. An apparatus for determining defective equipment, the apparatus comprising:
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a sample defect map generator which is configured to generate a sample defect map which shows defect distribution in cells of a defective sample; an equipment defect map generator which is configured to generate equipment defect maps of a plurality of pieces of equipment through which the products of the defective sample passed; and a determiner which is configured to calculate map similarities between the sample defect map and the equipment defect maps and determining one or more defective pieces of equipment of the plurality of pieces of equipment, which are the cause of the defective sample, based on the map similarities, wherein the defective sample comprises the products, each of the products being divided into a plurality of cells, and one of the equipment defect maps for one of the plurality of pieces of equipment, shows a defect distribution in cells of the products that passed through the one of the plurality of pieces of equipment, wherein the determination unit calculating cell similarity of each cell position of each product, for each piece of equipment that each product passed through, and whose equipment defect map has been generated; and calculating map similarity for each piece of equipment whose equipment defect map has been generated, wherein the cell similarity of a specific cell position is a ratio of the number of defective cells in the specific cell position of the equipment defect map to the number of defective cells in the specific cell position of the sample defect map, and the map similarity is the average of cell similarity values of at least some of the cell positions. - View Dependent Claims (12)
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Specification