Semiconductor device and method for manufacturing the same

• US 9,666,689 B2
• Filed: 04/27/2015
• Issued: 05/30/2017
• Est. Priority Date: 01/21/2011
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Kuwabara, Hideaki
• Primary Examiner(s): Vu, Phu
• Application Number:
  US14/696,681
• Publication Number:
  US 20150236129A1
• Time in Patent Office: 764 Days
• CPC Class Codes: G02F 1/134381 Hybrid switching mode, i.e. for applying an electric field with components parallel and orthogonal to the substrates
• CPC Class Codes: G02F 1/136231 for reducing the number of lithographic steps
• CPC Class Codes: G02F 1/136236 using a grey or half tone lithographic process
• CPC Class Codes: G02F 1/136286 Wiring, e.g. gate line, drain line
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask
• CPC Class Codes: H01L 29/66742 Thin film unipolar transistors
• CPC Class Codes: H10K 59/1213 the pixel elements being TFTs

Abstract

An object is to reduce the number of photomasks used for manufacturing a transistor and manufacturing a display device to less than the conventional one. The display device is manufactured through, in total, three photolithography steps including one photolithography step which serves as both a step of forming a gate electrode and a step of forming an island-like semiconductor layer, one photolithography step of forming a contact hole after a planarization insulating layer is formed, and one photolithography step which serves as both a step of forming a source electrode and a drain electrode and a step of forming a pixel electrode.

Claims

1. A display device comprising:

a substrate;

a first conductive film over the substrate;

a first insulating film over the first conductive film;

an oxide semiconductor film over the first insulating film;

a second insulating film over the oxide semiconductor film;

a source wiring on and in contact with the second insulating film and electrically connected to the oxide semiconductor film through a first contact hole in the second insulating film;

a common electrode over the second insulating film;

a pixel electrode on and in contact with the second insulating film and electrically connected to the oxide semiconductor film through a second contact hole in the second insulating film;

wherein the pixel electrode and the common electrode are formed over the same layer, wherein the pixel electrode has comb-shaped portions, wherein the first conductive film overlaps the first contact hole, wherein the first conductive film overlaps the second contact hole, and wherein the pixel electrode has a stacked-layer structure;

a counter electrode over the pixel electrode.

2. The display device according to claim 1, wherein the common electrode has a light-transmitting property.

3. The display device according to claim 1, wherein the common electrode has a stacked-layer structure.

4. The display device according to claim 1, wherein the oxide semiconductor film contains indium, gallium, and zinc.

9. The display device according to claim 1, wherein the first insulating film is on and in contact with the first conductive film.

10. The display device according to claim 1, further comprising a third insulating film,

wherein the third insulating film is on and in contact with a side surface of the first conductive film.

11. The display device according to claim 1, further comprising a third insulating film,

wherein the third insulating film is on and in contact with a top surface of the first conductive film.

12. The display device according to claim 1, further comprising a third insulating film,

wherein the third insulating film is on and in contact with a side surface of the oxide semiconductor film.

5. A display device comprising:

a substrate;

a first conductive film over the substrate;

a first insulating film over the first conductive film;

an oxide semiconductor film over the first insulating film;

a second insulating film over the oxide semiconductor film;

a source wiring on and in contact with the second insulating film and electrically connected to the oxide semiconductor film through a first contact hole in the second insulating film;

a common electrode over the second insulating film;

a pixel electrode on and in contact with the second insulating film and electrically connected to the oxide semiconductor film through a second contact hole in the second insulating film;

a capacitor electrically connected to the pixel electrode;

wherein the pixel electrode and the common electrode are formed over the same layer,

wherein the first conductive film overlaps the first contact hole,

wherein the first conductive film overlaps the second contact hole, and

wherein the pixel electrode has comb-shaped portions.

6. The display device according to claim 5, wherein the common electrode has a light-transmitting property.

7. The display device according to claim 5, wherein the common electrode and has the pixel electrode have a same stacked-layer structure.

8. The display device according to claim 5, wherein the oxide semiconductor film contains indium, gallium, and zinc.

13. The display device according to claim 5, wherein the first insulating film is on and in contact with the first conductive film.

14. The display device according to claim 5, further comprising a third insulating film,

wherein the third insulating film is on and in contact with a side surface of the first conductive film.

15. The display device according to claim 5, further comprising a third insulating film,

wherein the third insulating film is on and in contact with a top surface of the first conductive film.

16. The display device according to claim 5, further comprising a third insulating film,

wherein the third insulating film is on and in contact with a side surface of the oxide semiconductor film.