Method and apparatus for use in digitally tuning a capacitor in an integrated circuit device

• US 9,667,227 B2
• Filed: 03/04/2015
• Issued: 05/30/2017
• Est. Priority Date: 02/28/2008
• Status: Active Grant

• Current Assignee: pSemi Corporation (Murata Manufacturing Co Limited)
• Original Assignee: Peregrine Semiconductor Corporation (Murata Manufacturing Co Limited)
• Inventors: Ranta, Tero Tapio
• Primary Examiner(s): Hoffberg, Robert J
• Assistant Examiner(s): DANG, HUNG Q
• Application Number:
  US14/638,917
• Publication Number:
  US 20150310995A1
• Time in Patent Office: 818 Days
• CPC Class Codes: H01F 21/12 discontinuously variable, e.g. tapped
• CPC Class Codes: H01G 4/002 Details
• CPC Class Codes: H01G 7/00 Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
• CPC Class Codes: H01L 23/5223 Capacitor integral with wiring layers
• CPC Class Codes: H01L 27/0629 in combination with diodes, or resistors, or capacitors
• CPC Class Codes: H01L 27/1203 the substrate comprising an insulating body on a semiconductor body, e.g. SOI three-dimensional layout H01L27/0688
• CPC Class Codes: H01L 28/60 Electrodes
• CPC Class Codes: H03H 11/28 Impedance matching networks
• CPC Class Codes: H03H 7/0153 Electrical filters; Controlling thereof
• CPC Class Codes: H03H 7/38 Impedance-matching networks
• CPC Class Codes: H03J 2200/10 Tuning of a resonator by means of digitally controlled capacitor bank
• CPC Class Codes: H03J 3/20 of single resonant circuit by varying inductance only or capacitance only
• CPC Class Codes: H03K 17/102 in field-effect transistor switches
• CPC Class Codes: H03K 17/162 without feedback from the output circuit to the control circuit
• CPC Class Codes: H03K 17/687 the devices being field-effect transistors
• CPC Class Codes: H03M 1/1061 using digitally programmable trimming circuits
• CPC Class Codes: H03M 1/804 with charge redistribution

Abstract

A method and apparatus for use in a digitally tuning a capacitor in an integrated circuit device is described. A Digitally Tuned Capacitor DTC is described which facilitates digitally controlling capacitance applied between a first and second terminal. In some embodiments, the first terminal comprises an RF+ terminal and the second terminal comprises an RF− terminal. In accordance with some embodiments, the DTCs comprise a plurality of sub-circuits ordered in significance from least significant bit (LSB) to most significant bit (MSB) sub-circuits, wherein the plurality of significant bit sub-circuits are coupled together in parallel, and wherein each sub-circuit has a first node coupled to the first RF terminal, and a second node coupled to the second RF terminal. The DTCs further include an input means for receiving a digital control word, wherein the digital control word comprises bits that are similarly ordered in significance from an LSB to an MSB.

Claims

1. A digitally tuned capacitor, DTC, for use in an integrated circuit device, comprising:

(a) a first RF terminal;

(b) a second RF terminal;

(c) an input terminal; and

(d) one unit cell and replicated unit cells, wherein the replicated unit cells are implemented by instantiating the one unit cell one or more times and by coupling the instantiations in parallel;

wherein the input terminal is configured to receive a digital control word having a selected plurality of b digital control word bits;

wherein the one unit cell and replicated unit cells are coupled in parallel having a first node coupled to the first RF terminal and a second node coupled to the second RF terminal;

wherein the one unit cell and each of the replicated unit cells are coupled via a corresponding network of resistors to an associated and corresponding digital control word bit, in a one-to-one relationship, each corresponding network of resistors for the one unit cell or the replicated unit cells comprising a number of resistors of a same resistance value, said number being the same for each cell, said resistance value for each replicated unit cell being a function of the number of times the one unit cell has been instantiated in parallel in said each replicated unit cell;

wherein each one of the one unit cell and of the replicated unit cells forms, together with the corresponding network of resistors, a sub-circuit;

wherein each unit cell comprises a plurality of stacked switches coupled in series with one or more capacitors; and

wherein a switching operation of the stacked switches is selectively controlled by an associated and corresponding digital control word bit of the digital control word, thereby selectively controlling a capacitance between the first RF terminal and the second RF terminal.

2. The DTC of claim 1, wherein the capacitance applied between the first and second RF terminals by one of the one unit cell or the replicated unit cells is controlled by selectively turning ON stacked switches of the selected one unit cell or replicated unit cells.

3. The DTC of claim 1, wherein the sub-circuit comprising the one unit cell forms the least significant bit, LSB, sub-circuit of the DTC.

4. The DTC of claim 3, wherein the replicated unit cells form next significant bit sub-circuits of the DTC, each next significant bit sub-circuit comprising x instantiations of the number of unit cells used to implement its associated and corresponding previous significant bit sub-circuit, wherein x is dependent upon a weighting coding used to weight the significant bit sub-circuits of the DTC.

5. The DTC of claim 4, wherein the DTC is implemented in accordance with a binary weighting coding scheme, wherein x=2, and the LSB comprises the one unit cell, each next significant bit sub-circuit comprises two times the number of instantiations of unit cells used in implementing its associated and corresponding previous less significant bit sub-circuit, and wherein the most significant bit, MSB, sub-circuit comprises 2^b−

1 instantiations of unit cells coupled together in parallel between the first and second RF terminals.

6. The DTC of claim 4, wherein the DTC is implemented in accordance with a thermometer weighting coding scheme, and wherein the DTC comprises 2^b−

1 instantiations of unit cells coupled together in parallel between the first and second RF terminals.

7. The DTC of claim 1, wherein the one unit cell comprises a stack of n FETs coupled together in series, and wherein the FET stack is further coupled in series to the one or more capacitors, and wherein each of the one or more capacitors is a MIM capacitor.

8. The DTC of claim 7, wherein the FET stack includes at least a bottom FET and a top FET, wherein the bottom FET has a first terminal coupled to the second RF terminal and a second terminal coupled to a next successive FET of the FET stack, and wherein the top FET is coupled to a first terminal of the MIM capacitor, and wherein a second terminal of the MIM capacitor is coupled to the first RF terminal.

9. The DTC of claim 8, wherein voltage division occurs between the MIM capacitor and the FET stack when the FET stack is turned OFF, wherein the FET stack has an actual height of n and an effective stack height of n_eff, and wherein the effective stack height exceeds the actual stack height due to the voltage division occurring between the MIM capacitor and the FET stack when the FET stack is turned OFF, and wherein the capacitance of the MIM capacitor can be selectively optimized to meet a desired power handling requirement.

10. The DTC of claim 9, wherein the effective stack height n_eff is determined in accordance with the following mathematical expression:

11. The DTC of claim 7, wherein the resistors having the same resistance value for the one unit cell are a plurality of gate resistors having the same resistance value R_G, having first terminals coupled to gates of associated and corresponding FETs of the FET stack and second terminals coupled to the associated and corresponding control work bit, and wherein the one unit cell further comprises a plurality of drain-to-source resistors R_DS coupled across the drain and sources of each FET of the FET stack.

12. The DTC of claim 7, wherein the resistors having the same resistance value for the sub-circuits are a plurality of gate resistors having the same resistance value R_G/x, where x is the number of times the one unit cell has been instantiated in parallel in a sub-circuit, the gate resistors having first terminals coupled to gates of associated and corresponding FETs of the FET stack and second terminals coupled to the associated and corresponding digital control work bit, and wherein the sub-circuits further comprise a plurality of drain-to-source resistors having a same resistance value R_DS/x, the drain-to-source resistors being coupled across the drain and source of each FET of the FET stack.

13. The DTC of claim 6, wherein the thermometer weighting coding scheme results in the DTC having 2^b possible capacitance tuning states using 2^b−

1 identical unit cells, and wherein a capacitance differential between two adjacent capacitive tuning states are identical.

14. The DTC of claim 7, wherein a switching time of the FET stack is equal to R_G*C_GATE, wherein R_G comprises a gate resistance of the FET stack and C_GATE comprises a gate capacitance of the FET stack, wherein the switching time is constant across all FETs of the DTC and wherein a resistance value of the resistors having the same resistance value is chosen such that a switching time of each DTC sub-circuit is equal to the switching time of the FET.

15. The DTC of claim 7, wherein the one unit cell has a quality factor (Q), and wherein the Q-factor of the one unit cell is dominated by a relationship between an ON resistance RON of the FET stack when the FET stack is turned ON and capacitance of the MIM capacitor (C_MIM), and wherein constant Q-factors are maintained across of all of the DTC sub-circuits because the relationship between R_ON and C_MIM remains constant across the entire DTC.

16. The DTC of claim 5, wherein the DTC is implemented in accordance with a combination of binary weighting and thermometer weighting codes.

17. The DTC of claim 7, wherein the unit cell FET stack has a width and is sized in accordance with a number y of fingers of the FET stack and wherein the width and number y of fingers are adjusted to provide a selected desirable size of the DTC.

18. The DTC of claim 7, wherein the one or more stacked capacitors are selected to optimize the power handling capability of the DTC.

19. The DTC of claim 7, wherein the FETs comprise Accumulated Charge Control, ACC, SOI MOSFETs.

20. The DTC of claim 7, wherein the one or more capacitors are integrated on an integrated circuit die wherein the DTC is implemented.

21. The DTC of claim 7, wherein the FET stack is turned ON by a selected positive voltage applied to the gates of the FETs in the FET stack by the digital control word and wherein the FET stack is turned OFF by a selected negative voltage applied to the gates of the FETs in the FET stack by the digital control word.

22. The DTC of claim 7, wherein the FET stack is turned ON by a selected positive voltage applied to the gates of the FETs in the FET stack by the digital control word and wherein the FET stack is turned OFF by a voltage of 0 volts applied to the gates of the FETs in the FET stack by the digital control word.

23. The DTC of claim 7, further including one or more capacitors coupled in parallel between the first and second RF terminals.

24. The DTC of claim 23, wherein the included one or more capacitors are optimized to reduce an amount of integrated circuit die space required to implement the DTC.

25. The DTC of claim 23, wherein the included one or more capacitors are optimized to set a tuning ratio of the DTC.

26. An integrated circuit device comprising the DTC of claim 1, and one or more additional DTCs.

27. The integrated circuit device of claim 26, wherein the DTC is coupled with the one or more of the additional DTCs in a series or parallel configuration.

28. The integrated circuit device of claim 26, wherein the DTC is uncoupled and thereby isolated from the one or more additional DTCs in the integrated circuit device.

29. A method of digitally tuning a capacitor in an integrated circuit device, comprising:

(a) establishing electrical communication with a first RF terminal;

(b) establishing electrical communication with a second RF terminal;

(c) receiving a digital control word having a selected plurality of b digital control bits; and

(d) selectively controlling a capacitance applied between the first and second RF terminals;

wherein the integrated circuit device further comprises one unit cell and replicated unit cells, wherein the replicated unit cells are implemented by instantiating the one unit cell one or more times and by coupling the instantiations in parallel;

wherein the one unit cell and replicated unit cells are coupled in parallel having a first node coupled to the first RF terminal and a second node coupled to the second RF terminal;

wherein the one unit cell and each of the replicated unit cells are coupled, via a corresponding network of resistors, to an associated and corresponding digital control word bit, in a one-to-one relationship, each corresponding network of resistors for the one unit cell or the replicated unit cells comprising a number of resistors of a same resistance value, said number being the same for each cell, said resistance value for each replicated unit cell being a function of the number of times the one unit cell has been instantiated in parallel in said each replicated unit cell;

wherein each unit cell comprises a plurality of stacked switches coupled in series with one or more capacitors; and

wherein the digital control word selectively controls the capacitance by selectively controlling switching operation of the stacked switches by the associated and corresponding digital control word bit.

30. The method of claim 29, wherein the capacitance applied between the first and second RF terminals by one of the one unit cell or the replicated unit cells is controlled by selectively turning ON stacked switches of the selected one unit cell or replicated unit cells.

31. The method of claim 30, wherein a switching time associated to a change in capacitance applied between the first and the second terminals is constant and dependent on a same switching time associated to the one unit cell and the replicated unit cells.