Cu ball
First Claim
Patent Images
1. A Cu ball characterized in that the Cu ball contains a Pb content of 1 ppm or more, and has a sphericity of 0.95 or more, a purity from 99.9% or more to 99.995% or less, an α
- dose of 0.0200 cph/cm2 or less, a U content of 5 ppb or less, a Th content of 5 ppb or less, and a diameter in the range of 1 μ
m through 1000 μ
m.
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Abstract
A Cu ball that has low α dose and high sphericity even when containing at least a certain amount of impurity elements other than Cu. Even when the purity thereof is 99.995% or less and U and Th contents are 5 ppb or less in order to suppress any software errors and decrease connection failure, α dose is 0.0200 cph/cm2 or less. Further, the sphericity of the Cu ball is unexpectedly improved by making the purity not more than 99.995%.
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Citations
13 Claims
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1. A Cu ball characterized in that the Cu ball contains a Pb content of 1 ppm or more, and has a sphericity of 0.95 or more, a purity from 99.9% or more to 99.995% or less, an α
- dose of 0.0200 cph/cm2 or less, a U content of 5 ppb or less, a Th content of 5 ppb or less, and a diameter in the range of 1 μ
m through 1000 μ
m. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
- dose of 0.0200 cph/cm2 or less, a U content of 5 ppb or less, a Th content of 5 ppb or less, and a diameter in the range of 1 μ
Specification