Electron excited X-ray fluorescence device

• US 9,671,355 B2
• Filed: 01/21/2016
• Issued: 06/06/2017
• Est. Priority Date: 11/07/2012
• Status: Active Grant

• Current Assignee: Tribo Labs
• Original Assignee: Tribogenics, Inc.
• Inventors: Camara, Carlos
• Primary Examiner(s): NGUYEN, KIET TUAN
• Application Number:
  US15/003,571
• Publication Number:
  US 20160341679A1
• Time in Patent Office: 502 Days
• Field of Search: 250310, 250306, 378 44, 378 45, 378125, 378121, 378119
• CPC Class Codes: G01N 2223/076 X-ray fluorescence
• CPC Class Codes: G01N 2223/079 incident electron beam and measuring excited X-rays
• CPC Class Codes: G01N 2223/309 support of sample holder
• CPC Class Codes: G01N 23/2252 Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]

Abstract

A device for providing for electron excited x-ray fluorescence may include means for driving two contacting surfaces against each other in a low fluid pressure environment, such that high energy electrons strike a sample under test and provide for x-ray fluorescence of the sample. The sample under test may be in or on a sample holder, whose position with respect to the contacting surfaces is adjustable. For example, the sample holder may be positionable to be a different distances from the contacting surfaces.

Claims

1. An electron excitation x-ray fluorescence (EXRF) device, comprising:

a chamber maintainable at a desired fluid pressure;

a vacuum pump coupled to the chamber, whereby the vacuum pump may at least partially evacuate the chamber;

a membrane of a dielectric material within the chamber;

a gapped rotor drivable to provide time varying contact with areas of a first surface of the membrane;

a sample holder including a sample holding area for holding samples within the chamber during operation; and

a sealable port in the chamber to provide access to the sample holding area.

2. The device of claim 1, wherein the sealable port comprises a door in a wall of the chamber.

3. The device of claim 1, wherein the sealable port is a slot in a wall of the chamber.

4. The device of claim 3, wherein position of the sample holder is adjustable with respect to position of the membrane.

5. The device of claim 3, further comprising means for adjusting position of the sample holding area with respect to the membrane.

6. The device of claim 1, wherein a distance between the membrane and the sample holding area is adjustable.

7. The device of claim 1, wherein the sample holder is substantially opaque to x-rays.

8. The device of claim 1, wherein the sample holder is substantially transparent to x-rays.

9. The device of claim 1, further comprising a mesh over a sample tray.

10. The device of claim 9, wherein the mesh is maintained at a predefined electrical potential.