Electron excited X-ray fluorescence device
First Claim
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1. An electron excitation x-ray fluorescence (EXRF) device, comprising:
- a chamber maintainable at a desired fluid pressure;
a vacuum pump coupled to the chamber, whereby the vacuum pump may at least partially evacuate the chamber;
a membrane of a dielectric material within the chamber;
a gapped rotor drivable to provide time varying contact with areas of a first surface of the membrane;
a sample holder including a sample holding area for holding samples within the chamber during operation; and
a sealable port in the chamber to provide access to the sample holding area.
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Abstract
A device for providing for electron excited x-ray fluorescence may include means for driving two contacting surfaces against each other in a low fluid pressure environment, such that high energy electrons strike a sample under test and provide for x-ray fluorescence of the sample. The sample under test may be in or on a sample holder, whose position with respect to the contacting surfaces is adjustable. For example, the sample holder may be positionable to be a different distances from the contacting surfaces.
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Citations
10 Claims
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1. An electron excitation x-ray fluorescence (EXRF) device, comprising:
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a chamber maintainable at a desired fluid pressure; a vacuum pump coupled to the chamber, whereby the vacuum pump may at least partially evacuate the chamber; a membrane of a dielectric material within the chamber; a gapped rotor drivable to provide time varying contact with areas of a first surface of the membrane; a sample holder including a sample holding area for holding samples within the chamber during operation; and a sealable port in the chamber to provide access to the sample holding area. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification