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Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties

  • US 9,671,429 B2
  • Filed: 09/04/2013
  • Issued: 06/06/2017
  • Est. Priority Date: 05/07/2003
  • Status: Active Grant
First Claim
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1. A multi-layer millimeter scale or micro-scale structure, comprising:

  • a) a first planarized layer comprising at least one core material and at least one shell material, whereby the at least one shell material completely surrounds the sides of the at least one core material and the bottom of the at least one core material, and wherein the first planarized layer has first lateral extents; and

    b) at least one intermediate planarized layer comprising at least one core material and at least one shell material, whereby the at least one shell material completely surrounds the sides of the at least one core material and joins the shell material of the first planarized layer or a lower intermediate layer, and wherein the at least one intermediate planarized layer has lateral extents that are different from the first lateral extents such that the at least one intermediate planarized layer may be distinguished from the first planarized layer;

    c) a second planarized layer comprising a capping material located directly on a adjacent intermediate layer such that the second planarized layer provides for the bounding of the core material on the adjacent intermediate layer from above, and wherein the second planarized layer has second lateral extents different from the lateral extents of the at least one intermediate planarized layer such that the second planarized layer can be distinguished from the at least one intermediate planarized layer,wherein the shell material and the capping material fully encapsulate the core material, andwherein a thickness of each layer of the multi-layer structure is in the range of 1 to 50 microns.

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