System for discharging an area that is scanned by an electron beam
First Claim
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1. A system for imaging an object, the system comprising:
- electron optics configured to scan a first area of the object with at least one electron beam;
wherein the electron optics comprise a first electrode;
a metal mirror coupled to the first electrode; and
light optics configured to illuminate at least the metal mirror with a beam of light, the metal mirror arranged to direct the beam of light towards the object, thereby causing an emission of electrons between the first electrode and the object.
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Abstract
A method and a system for imaging an object, the system may include electron optics that may be configured to scan a first area of the object with at least one electron beam; wherein the electron optics may include a first electrode; and light optics that may be configured to illuminate at least one target of (a) the first electrode and (b) the object, thereby causing an emission of electrons between the first electrode and the object.
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Citations
20 Claims
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1. A system for imaging an object, the system comprising:
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electron optics configured to scan a first area of the object with at least one electron beam;
wherein the electron optics comprise a first electrode;a metal mirror coupled to the first electrode; and light optics configured to illuminate at least the metal mirror with a beam of light, the metal mirror arranged to direct the beam of light towards the object, thereby causing an emission of electrons between the first electrode and the object. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A system for imaging an object, the system comprising:
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electron optics configured to scan a first area of the object with at least one electron beam;
wherein the electron optics comprise a first electrode;a metal mirror electrically coupled to the first electrode; and light optics configured to illuminate the metal mirror with a beam of light, the metal mirror arranged to direct the beam of light towards the object, thereby causing the metal mirror to emit electrons towards the object when the object is more positive than the first electrode. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A system for imaging an object, the system comprising:
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electron optics configured to scan a first area of the object with at least one electron beam;
wherein the electron optics comprise a first electrode;a metal mirror coupled to the first electrode; and light optics configured to illuminate the first electrode and the object at the same time using the metal mirror, thereby causing (i) an emission of electrons from the first electrode towards the object when the object is more positive than the first electrode; and
(ii) an emission of electrons from the object towards the first electrode when the object is more negative than the first electrode. - View Dependent Claims (19, 20)
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Specification