Microfabrication methods for the optimal patterning of substrates

• US 9,677,194 B2
• Filed: 12/06/2012
• Issued: 06/13/2017
• Est. Priority Date: 06/18/2007
• Status: Active Grant

• Current Assignee: Illumina Incorporated
• Original Assignee: Illumina Incorporated
• Inventors: Heiner, David L., Zhao, Chanfeng, Barker, David L., Lebl, Michal
• Primary Examiner(s): Priest, Aaron
• Application Number:
  US13/707,337
• Publication Number:
  US 20130096034A1
• Time in Patent Office: 1,650 Days
• Field of Search: None
• CPC Class Codes: B01J 19/0046 Sequential or parallel reactions, e.g. for the synthesis of polypeptides or polynucleotides; Apparatus and devices for combinatorial chemistry or for making molecular arrays synthesis methods per se C40B50/00
• CPC Class Codes: B01J 2219/00317 Microwell devices, i.e. having large numbers of wells
• CPC Class Codes: B01J 2219/00497 Features relating to the solid phase supports
• CPC Class Codes: B01J 2219/00585 Parallel processes
• CPC Class Codes: B01J 2219/00596 Solid-phase processes
• CPC Class Codes: B01J 2219/00605 the compounds being directly bound or immobilised to solid supports
• CPC Class Codes: B01J 2219/00648 by the use of solid beads
• CPC Class Codes: B01J 2219/00659 Two-dimensional arrays
• CPC Class Codes: B01J 2219/00677 Ex-situ synthesis followed by deposition on the substrate
• CPC Class Codes: B01J 2219/00722 Nucleotides
• CPC Class Codes: B01J 2219/00725 Peptides
• CPC Class Codes: C40B 40/06 Libraries containing nucleotides or polynucleotides, or derivatives thereof
• CPC Class Codes: C40B 50/06 Biochemical methods, e.g. using enzymes or whole viable microorganisms
• CPC Class Codes: C40B 50/14 Solid phase synthesis, i.e. wherein one or more library building blocks are bound to a solid support during library creation; Particular methods of cleavage from the solid support

Abstract

A method of fabricating a microarray including the steps of: (a) contacting a substrate having wells with a reagent reactive with said substrate to produce a surface modification within said wells and a surface modification surrounding said wells; (b) polishing said substrate to produce a polished surface modification surrounding said wells, wherein said surface modification surrounding said wells is removed and said surface modification within said wells is retained, and (c) depositing a biopolymer onto said substrate, wherein different affinities of said surface modification within said wells and said polished surface facilitate localization of said biopolymer within said wells.

Claims

1. A method of fabricating a microarray, comprising:

(a) functionalizing a substrate having wells to introduce chemical modifications within said wells and surrounding said wells, the functionalizing involving;

reacting a reagent, selected from the group consisting of trichloro alkyl silane and trichlorosilane, with said substrate to create a modified substrate surface; and

attaching primer nucleic acids to the modified substrate surface, wherein the primer nucleic acids are complementary to a target nucleic acid;

wherein the chemical modifications include the modified substrate surface and the primer nucleic acids attached thereto;

(b) polishing, using mechanical treatment, said substrate to produce a polished surface surrounding said wells, whereby said chemical modifications surrounding said wells are removed and said chemical modifications within said wells are retained; and

(c) depositing said target nucleic acid onto said substrate, wherein higher affinity of said chemical modifications within said wells, compared to said polished surface, to said target nucleic acid facilitates localization of said target nucleic acid within said wells, wherein said affinity comprises complementarity of said primer nucleic acids to said target nucleic acid.

2. The method of claim 1, wherein said substrate comprises silicon, and wherein prior to the functionalizing, the method further comprises converting at least a portion of the silicon to silicon dioxide.

3. The method of claim 1, wherein said target nucleic acids comprise genomic DNA fragments.

4. The method of claim 1, wherein said depositing comprises deposition of a single target nucleic acid molecule within each of said wells.

5. The method of claim 4, further comprising amplifying the single nucleic acid molecule within each of said wells.

6. The method of claim 1, wherein said target nucleic acid comprises a plurality of target nucleic acids including target sequences that are different from each other and common priming region sequences, and wherein said depositing comprises hybridizing said common priming region sequences of said plurality of target nucleic acids to said primer nucleic acids that are attached to said modified substrate surface within said wells.

7. The method of claim 5, wherein said amplifying comprises bridge amplification.

8. The method of claim 1, wherein said substrate comprises at least 500,000 of said wells within 1.28 cm².

9. The method of claim 1, wherein said mechanical treatment comprises contacting an abrasive surface with said substrate.

10. The method of claim 1, wherein said mechanical treatment comprises contacting a slurry or suspended aggregate with said substrate.

11. The method of claim 1, wherein said wells have a depth between 0.1 μ

m and 10 μ

m.

12. The method of claim 1, wherein said wells have a diameter between 0.1 μ

m and 10 μ

m.

13. The method of claim 1, wherein said polished surface surrounding said wells is hydrophobic.

14. The method of claim 2 wherein the polished surface surrounding said wells comprises the silicon.

15. A method of fabricating a microarray, comprising:

(a) treating a substrate having wells to form a modified substrate surface within said wells and surrounding said wells, the treating involving reacting a reagent, selected from the group consisting of trichloro alkyl silane and trichlorosilane, with said substrate;

(b) polishing, using mechanical treatment, said substrate to produce a polished surface surrounding said wells, whereby said modified substrate surface surrounding said wells is removed and said modified substrate surface within said well is retained;

(c) attaching primer nucleic acids to said modified substrate surface within said wells, wherein the primer nucleic acids are complementary to a target nucleic acid; and

(d) depositing said target nucleic acid onto said substrate, wherein an affinity of said primer nucleic acids within said wells to said target nucleic acid is higher than an affinity of said polished surface to said target nucleic acid, and wherein the higher affinity facilitates localization of said target nucleic acid within said wells.