Infrared radiation detectors using carbon nanotubes-silicon vanadium oxide and or amorphous silicon nanoparticles-CNT nanocomposites and methods of constructing the same

• US 9,677,946 B1
• Filed: 12/22/2015
• Issued: 06/13/2017
• Est. Priority Date: 12/22/2014
• Status: Active Grant

• Current Assignee: Magnolia Optical Technologies, Inc.
• Original Assignee: Magnolia Optical Technologies, Inc.
• Inventors: Sood, Ashok K., Egerton, Elwood J.
• Primary Examiner(s): Taningco, Marcus
• Application Number:
  US14/757,711
• Time in Patent Office: 539 Days
• CPC Class Codes: G01J 5/0853 having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid
• CPC Class Codes: G01J 5/24 Use of specially adapted circuits, e.g. bridge circuits
• CPC Class Codes: H01L 31/028 including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table

Abstract

The present disclosure relates to microbolometer structures having top layers of amorphous silicon or vanadium oxide. In some examples, combinations of carbon nanotubes, nanoparticles, and/or thin films can be deposited atop the existing top layer of amorphous silicon or top layer of vanadium oxide of a microbolometer structure. Such configurations can increase the sensitivity of the microbolometers to less than 4 mK, less than 2 mK, and in some examples less than 1 mK.

Claims

1. An Infrared (IR) detector comprising:

a substrate;

a film of vanadium oxide or amorphous silicon suspended over the substrate and between electrical contacts;

a film of silicon CNT nanocomposite on top of the thin film of vanadium oxide or amorphous silicon, the thin film of CNT nanocomposite comprising nanoparticles dispersed within aligned carbon nanotubes at approximately 0.05% to 10% by volume;

first and second conductive contacts in electrical communication with the thin film of vanadium oxide or amorphous silicon of Silicon-CNT or Si-CNT nanocomposites;

a non-continuous film disposed on top of the substrate comprising at least one of silicon nitride or amorphous silicon.

2. The IR detector of claim 1 wherein the a film of silicon CNT nanocomposite is composed of single wall or multi-wall carbon nanotubes having diameters corresponding to a tuned IR response wavelength.

3. The IR detector of claim 1 wherein the film of silicon CNT nanocomposite is composed of multi wall carbon nanotubes having diameters corresponding to a tuned IR response wavelength.

4. The IR detector of claim 1 wherein the a film of silicon CNT nanocomposite is composed of single wall carbon nanotubes and multi wall carbon nanotubes having diameters corresponding to a tuned IR responsive wavelength.

5. The IR detector of claim 1 wherein the detector exhibits an NEDT of <

1 mk and a noise floor of 0.05 mV RMS.