Functional device, method of manufacturing the functional device, physical quantity sensor, and electronic apparatus

• US 9,678,100 B2
• Filed: 06/16/2015
• Issued: 06/13/2017
• Est. Priority Date: 11/04/2010
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Kawano, Shuichi, Takagi, Shigekazu, Yamazaki, Seiji, Yoda, Mitsuhiro
• Primary Examiner(s): Kwok, Helen
• Application Number:
  US14/740,911
• Publication Number:
  US 20150276791A1
• Time in Patent Office: 728 Days
• Field of Search: 7351432, 7351436, 7351438, 7350412, 7350414, 7350404
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: G01P 3/44 for measuring angular speed G01P3/56 takes precedence
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

A functional device according to an embodiment of the invention includes: an insulating substrate; a movable section; movable electrode fingers provided in the movable section; and fixed electrode fingers provided on the insulating substrate and arranged to be opposed to the movable electrode fingers. The fixed electrode fingers include: first fixed electrode fingers arranged on one side of the movable electrode fingers; and second fixed electrode fingers arranged on the other side of the movable electrode fingers. The first fixed electrode fingers and the second fixed electrode fingers are arranged to be spaced apart from each other.

Claims

1. A functional device comprising:

an insulating substrate that has a first recess and a peripheral ledge surrounding the first recess;

a second recess that is provided in a top surface of the peripheral ledge;

a fixed electrode that is provided on the insulating substrate; and

an electrode line that is provided in the second recess, the electrode line being electrically connected to the fixed electrode, wherein

when a thickness of the electrode line is t and a depth of the second recess is d, the following relation is satisfied;

d>

t,

the fixed electrode is connected to the electrode line via a conductive protrusion, and

a sum of the thickness of the electrode line and a height of the conductive protrusion is equal to the depth of the second recess.

2. The functional device according to claim 1, further comprising:

a movable electrode that is provided opposite to the fixed electrode, wherein

the fixed electrode is configured with a first fixed electrode and a second fixed electrode, the first fixed electrode is provided at one side of the movable electrode, and the second fixed electrode is provided at the other side of the movable electrode,

the first and second fixed electrodes are spaced apart from each another, and

the electrode line includes at least one of a first electrode line electrically connected to the first fixed electrode and a second electrode line electrically connected to the second fixed electrode.

3. The functional device according to claim 2, wherein:

the insulating substrate has a fixed section, and

the movable electrode is connected to the fixed section via a connecting section.

4. The functional device according to claim 1, wherein

the electrode line includes a portion where an insulating film is provided.

5. The functional device according to claim 1, wherein

a conductor section piercing through the fixed electrode in a thickness direction of the fixed electrode is provided, and

the conductor section is connected to the electrode line.

6. The functional device according to claim 1, wherein

the electrode line is formed of a light-transmissive electrode material.

7. The functional device according to claim 1, wherein

the insulating substrate is formed of a material containing an alkali metal ion,

the fixed electrode is formed of a semiconductor;

and

the fixed electrode is bonded to the insulating substrate by an anode bonding method.

8. The functional device according to claim 1, wherein

the fixed electrode is formed of a single member.

9. The functional device according to claim 1, wherein

the fixed electrode has a plurality of fixed electrodes, and

the plurality of fixed electrodes are integrally provided.

10. A functional device comprising:

an insulating substrate that has a first recess and a peripheral ledge surrounding the first recess;

an insulating layer that is provided on the insulating substrate;

a fixed electrode that is provided on the insulating substrate;

a second recess that is provided in a top surface of the insulating substrate and the insulating layer; and

an electrode line that is provided in the second recess, the electrode line being electrically connected to the fixed electrode, wherein

when a thickness of the electrode line is t and a depth of the second recess is d, the following relation is satisfied;

d>

t,

the fixed electrode is connected to the electrode line via a conductive protrusion, and

a sum of the thickness of the electrode line and a height of the conductive protrusion is equal to the depth of the second recess.

11. The functional device according to claim 10, further comprising:

a movable electrode that is provided opposite to the fixed electrode, wherein

the fixed electrode is configured with a first fixed electrode and a second fixed electrode, the first fixed electrode is provided at one side of the movable electrode, and the second fixed electrode is provided at the other side of the movable electrode,

the first and second fixed electrodes are spaced apart from each another, and

the electrode line includes at least one of a first electrode line electrically connected to the first fixed electrode and a second electrode line electrically connected to the second fixed electrode.

12. The functional device according to claim 11, wherein

the insulating substrate has a fixed section, and

the movable electrode is connected to the fixed section via a connecting section.

13. The functional device according to claim 10, wherein

the electrode line includes a portion where an insulating film is provided.

14. The functional device according to claim 10, wherein

the insulating substrate is formed of a material containing an alkali metal ion,

the fixed electrode is formed of a semiconductor;

and

the fixed electrode is bonded to the insulating substrate by an anode bonding method.

17. A physical quantity sensor comprising the functional device according to claim 10.

18. An electronic apparatus comprising the functional device according to claim 10.

15. A method of manufacturing a functional device comprising:

forming a first recess in a first substrate so that a peripheral ledge of the first substrate surrounds the first recess;

forming a second recess in a top surface of the peripheral ledge of the first substrate;

forming an electrode line in the second recess;

forming a conductive protrusion on the electrode line in the second recess;

placing a second substrate on the top surface of the peripheral ledge in which the second recess is provided of the first substrate; and

etching the second substrate to thereby form a fixed electrode on the first substrate, wherein

when a thickness of the electrode line is t and a depth of the second recess is d, the following relation is satisfied;

d>

t,

the fixed electrode is connected to the electrode line via the conductive protrusion, and

a sum of the thickness of the electrode line and a height of the conductive protrusion is equal to the depth of the second recess.

16. A method of manufacturing a functional device comprising:

forming a first recess in a first substrate so that a peripheral ledge of the first substrate surrounds the first recess;

forming an insulating layer on a top surface of the peripheral ledge of the first substrate;

forming a second recess in the top surface of the peripheral ledge of the first substrate and the insulating layer;

forming an electrode line in the second recess;

forming a conductive protrusion on the electrode line in the second recess;

placing a second substrate on the top surface of the peripheral ledge in which the second recess is provided of the first substrate; and

etching the second substrate to thereby form a fixed electrode on the first substrate, wherein

when a thickness of the electrode line is t and a depth of the second recess is d, the following relations are satisfied;

d>

t,

the fixed electrode is connected to the electrode line via the conductive protrusion, and

a sum of the thickness of the electrode line and a height of the conductive protrusion is equal to the depth of the second recess.