Device for propagating light and method for fabricating a device

• US 9,678,273 B2
• Filed: 06/01/2015
• Issued: 06/13/2017
• Est. Priority Date: 06/01/2015
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Kiewra, Edward W., Hofrichter, Jens, La Porta, Antonio, Jubin, Daniel S.
• Primary Examiner(s): Lepisto, Ryan
• Assistant Examiner(s): ANDERSON, GUY G
• Application Number:
  US14/727,128
• Publication Number:
  US 20160349452A1
• Time in Patent Office: 743 Days
• Field of Search: 385 14- 15, 385 31, 385 39, 385 42- 43, 385 49- 50, 385129-132
• CPC Class Codes: G02B 2006/12061 Silicon
• CPC Class Codes: G02B 2006/12069 Organic material
• CPC Class Codes: G02B 2006/12085 Integrated
• CPC Class Codes: G02B 6/122 Basic optical elements, e.g. light-guiding paths
• CPC Class Codes: G02B 6/1228 Tapered waveguides, e.g. integrated spot-size transformers for coupling with fibres G02B6/305
• CPC Class Codes: G02B 6/24 Coupling light guides

Abstract

A device for propagating light is described, comprising: a substrate having a semiconductor material, an insulating layer, wherein the insulating layer is arranged on the substrate, a recess reaching through the insulating layer and into the substrate, wherein the recess is at least partially filled with a filler material, and a waveguide arranged in or on the filler material.

Claims

1. A device for propagating light, comprising:

a substrate having a semiconductor material;

an insulating layer, wherein the insulating layer is arranged on the substrate;

a recess formed to penetrate both of a portion of the insulating layer and a portion of the substrate, wherein the recess is at least partially filled with a filler material; and

a waveguide arranged on the filler material,

wherein a bottom surface of the waveguide is coplanar with a top surface of the insulating layer,

wherein the recess has a recess bottom, and a distance between the waveguide and the recess bottom is larger than a thickness of the insulating layer.

3. The device of claim 1, wherein the filler material has a lower index of refraction than the substrate.

4. The device of claim 1, wherein the insulating layer is a buried oxide layer.

5. The device of claim 1, wherein the recess has a tapered form in the substrate in a direction from the waveguide towards the substrate.

6. The device of claim 1, wherein a further waveguide is arranged below or above the waveguide for an adiabatic coupling of light between the two waveguides.

7. The device of claim 6, wherein the waveguide extends in a longitudinal direction and the waveguide or the further waveguide is tapered in the longitudinal direction.

8. The device of claim 1, wherein the insulating layer comprises front-end electronic components.

9. The device of claim 1, further comprising a passivation layer on top of the insulating layer.

10. The device of claim 9, further comprising back-end electronic components above the passivation layer.

11. The device of claim 10, wherein the back-end electronic components comprise a first interlayer dielectric (ILD1).

12. The device of claim 1, wherein the filler material and the insulating layer comprise the same material, particularly silicon dioxide, and the substrate comprises silicon.

13. The device of claim 1, wherein the waveguide comprises silicon, polysilicon or a polymer.

2. A device for propagating light, comprising:

a substrate having a semiconductor material;

an insulating layer, wherein the insulating layer is arranged on the substrate;

a recess formed to penetrate both of a portion of the insulating layer and a portion of the substrate, wherein the recess is at least partially filled with a filler material; and

a waveguide arranged on the filler material,

wherein a bottom surface of the waveguide is coplanar with a top surface of the insulating layer,

wherein the recess is formed such that a distance between the waveguide and an interface between the semiconductor material and the filler material is larger than a radius of a light mode of the waveguide.