In-plane overtravel stops for MEMS microphone

• US 9,681,243 B2
• Filed: 06/17/2015
• Issued: 06/13/2017
• Est. Priority Date: 06/17/2015
• Status: Active Grant

• Current Assignee: Akustica Incorporated, Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Guo, Zhijun, Doller, Andrew J.
• Primary Examiner(s): TRAN, QUOC DUC
• Application Number:
  US14/742,308
• Publication Number:
  US 20160373874A1
• Time in Patent Office: 727 Days
• Field of Search: None
• CPC Class Codes: B81B 2201/0257 Microphones or microspeakers
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: H04R 19/005 using semiconductor materials
• CPC Class Codes: H04R 19/04 Microphones H04R19/01 takes precedence
• CPC Class Codes: H04R 2231/003 Manufacturing aspects of the outer suspension of loudspeaker or microphone diaphragms or of their connecting aspects to said diaphragms
• CPC Class Codes: H04R 31/00 Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor manufacture of microstructural arrangements of deformable or non-deformable structures in general B81C1/00182
• CPC Class Codes: H04R 31/003 for diaphragms or their outer suspension
• CPC Class Codes: H04R 7/20 Securing diaphragm or cone resiliently to support by flexible material, springs, cords, or strands
• CPC Class Codes: H04R 7/26 Damping by means acting directly on free portion of diaphragm or cone air damping H04R1/28

Abstract

A MEMS microphone including a plurality of overtravel stops (OTS) connected to a perimeter of a membrane of the MEMS microphone. The OTS are released from a backplate layer during manufacturing and are configured to contact the backplate to restrict movement of the OTS and thus restrict movement of the membrane of the MEMS microphone. Embodiments of the invention provide, in particular, an overtravel stop that limits movement of the membrane in a radial direction.

Claims

1. A microelectricalmechanical (MEMS) microphone comprising:

a first layer including

a membrane, and

a spring having

a first end coupled to the membrane, and

a second end coupled to a support; and

a second layer including

a backplate connected to the support, and

an overtravel stop released from the backplate such that the overtravel stop is physically separated from the backplate by a gap in a radial direction, the overtravel stop being configured to restrict a range of movement of the membrane in multiple directions by contacting the backplate, the overtravel stop having

a first end orientated proximal to the membrane, and

a second end orientated distal to the membrane and flaring outward to restrict movement of the membrane in the radial direction.

2. The MEMS microphone of claim 1, wherein the second end is shaped such that a flared portion of the second end is configured to restrict movement of the membrane in an inward radial direction by contacting the backplate.

3. The MEMS microphone of claim 1, wherein the second end has an arch-shaped stop on each side of the second end, the arch-shaped stop being perpendicular to a radial direction of the membrane.

4. The MEMS microphone of claim 3, wherein the arch-shaped stop contacts the backplate when the membrane has reached a maximum deflection.

5. The MEMS microphone of claim 1, wherein the first end is connected to the membrane.

6. The MEMS microphone of claim 1, wherein the overtravel stop is located along a perimeter of the membrane.

7. The MEMS microphone of claim 1, further comprising a plurality of overtravel stops located along a perimeter of the membrane.

8. The MEMS microphone of claim 1, wherein the membrane is connected via the spring to an oxide anchor and the oxide anchor is connected to the backplate.

9. A method of limiting movement of a membrane, the method comprising:

forming the membrane and a spring;

coupling an end of the spring to a support;

coupling the support to a backplate;

releasing an overtravel stop structure from the backplate such that overtravel stop structure is physically separated from the backplate by a gap in a radial direction; and

coupling the overtravel stop structure to the membrane, the overtravel stop structure configured to restrict movement of the membrane in multiple directions by contacting the backplate, the overtravel stop having a first end oriented proximal to the membrane and a second end oriented distal to the membrane and flaring outward to restrict movement of the membrane in the radial direction.

10. The method of claim 9, further comprising processing a first layer, the processing including forming a plurality of slits in the membrane to form the spring from the membrane.

11. The method of claim 10, further comprising processing a second layer, the processing including forming an overtravel stop by cutting through a backplate layer to isolate a portion of the backplate layer that is the overtravel stop.

12. A MEMS device, the MEMS device comprising:

a movable structure;

a plurality of springs, each of the plurality of springs having a first end coupled to the movable structure and each of the plurality of springs having a second end connected to a support; and

a first layer including

a rigid structure connected to the support, and

an overtravel stop released from the rigid structure such that the overtravel stop is physically separated from the rigid structure by a gap in a radial direction, the overtravel stop coupled to the movable structure, the overtravel stop having

a first end oriented proximal to the movable structure, and

a second end oriented distal to the movable structure and flaring outward to stop movement of the movable structure by contacting the rigid structure after the movable structure has moved a predetermined distance in the radial direction.