Extension-mode angular velocity sensor

• US 9,683,844 B2
• Filed: 04/28/2015
• Issued: 06/20/2017
• Est. Priority Date: 09/11/2009
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: Seeger, Joseph, Borovic, Bruno
• Primary Examiner(s): Patel, Harshad R
• Assistant Examiner(s): Shah, Samir M
• Application Number:
  US14/698,451
• Publication Number:
  US 20150226558A1
• Time in Patent Office: 784 Days
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01C 19/574 the devices having two sensing masses in anti-phase motion

Abstract

An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.

Claims

1. An angular rate sensor, comprising:

at least three masses disposed substantially in a plane parallel to a base, wherein the at least three masses have a center of mass;

at least one actuator that drives the at least three masses in an extension mode, wherein, in the extension mode, the at least three masses move in the plane simultaneously away from the center of mass or simultaneously towards the center of mass;

a first transducer that senses a first Coriolis force resulting from a first rotation of the angular rate sensor about a first input axis in the plane; and

a second transducer that senses a second Coriolis force resulting from a second rotation of the angular rate sensor about a second input axis in the plane, wherein the second input axis is not parallel to the first input axis.

2. The angular rate sensor of claim 1, further comprising:

an X-axis capacitive sensor comprising a first electrode formed on the base and a portion of at least one mass of the at least three masses; and

a Y-axis capacitive sensor comprising a second electrode formed on the base and another portion of at least another mass of the at least three masses, wherein the X-axis capacitive sensor and the Y-axis capacitive sensor are respectively configured to facilitate sensing an angular velocity of the angular rate sensor about the first input axis and the second input axis, respectively, of three different input axes of the angular rate sensor.

3. The angular rate sensor of claim 2, further comprising:

a first Z-axis capacitive sensor coupled to a first mass of the at least three masses; and

a second Z-axis capacitive sensor coupled to a second mass of the at least three masses and configured to move independently of the first mass and the first Z-axis capacitive sensor, wherein the X-axis capacitive sensor, the Y-axis capacitive sensor, the first Z-axis capacitive sensor, and the second Z-axis capacitive sensor are configured to sense the angular velocity of the angular rate sensor about the three different input axes of the angular rate sensor.

4. The angular rate sensor of claim 3, wherein the first Z-axis capacitive sensor is situated in a same plane as the first mass and a set of z-electrodes of the first Z-axis capacitive sensor are situated perpendicular to a rectilinear side of the first mass.

5. The angular rate sensor of claim 3, wherein the second Z-axis capacitive sensor is situated in a same plane as the second mass and a set of z-electrodes of the second Z-axis capacitive sensor are situated perpendicular to a rectilinear side of the second mass.

6. The angular rate sensor of claim 3, further comprising:

a first set of z-electrodes of the first Z-axis capacitive sensor and a second set of z-electrodes of the second Z-axis capacitive sensor, wherein the first set of z-electrodes and the second set of z-electrodes extend substantially parallel in relation to each other.

7. The angular rate sensor of claim 3, further comprising:

a first set of z-electrodes of the first Z-axis capacitive sensor and a second set of z-electrodes of the second Z-axis capacitive sensor, wherein the first set of z-electrodes and the second set of z-electrodes extend substantially parallel to a single axis.

8. The angular rate sensor of claim 7, wherein the single axis lies in the plane and is offset by approximately 45 degrees from a direction of movement of one of the at least three masses in the extension mode.

9. The angular rate sensor of claim 3, wherein the center of mass is associated with a center of gravity point of the at least three masses, and wherein the first Z-axis capacitive sensor and the second Z-axis capacitive sensor do not surround the center of gravity point of the at least three masses.

10. The angular rate sensor of claim 1, further comprising:

at least three linkages that couple the at least three masses, wherein a mass of the at least three masses is flexibly coupled to two other masses of the at least three masses via two of the at least three linkages.

11. The angular rate sensor of claim 10, wherein the center of mass is associated with a center of gravity point of the at least three masses, and wherein the at least three linkages are configured to pull the at least three masses towards the center of gravity point of the at least three masses at substantially a same time.

12. The angular rate sensor of claim 1, wherein the at least three masses comprise a first mass and a second mass, and wherein the first mass and the second mass are on opposite sides of a center of gravity point associated with the first mass and the second mass.

13. The angular rate sensor of claim 1, wherein the at least three masses comprise a first mass, a second mass and a third mass, and wherein each of the first mass, the second mass and the third mass has at least one side of a rectilinear shape.

14. The angular rate sensor of claim 1, further comprising:

a central frame coupled to the at least three masses and flexibly coupled to the base.

15. The angular rate sensor of claim 1, wherein the at least one actuator comprises an electrostatic actuator that comprises an electrode on an actuator mass and another electrode fixed to the base, wherein the actuator mass is suspended to the base via an anchoring flexure.

16. The angular rate sensor of claim 1, further comprising a coupling flexure coupling one of the planar masses to an actuator mass, wherein the coupling flexure is substantially rigid to translation in the extension mode.

17. A method, comprising:

disposing at least three masses substantially in a plane parallel to a base of an angular rate sensor, wherein the at least three masses have a center of mass;

driving the at least three masses in an extension mode via at least one actuator;

in the extension mode, in response to the driving, moving the at least three masses in the plane simultaneously away from the center of mass or simultaneously towards the center of mass;

sensing a first Coriolis force resulting from a first rotation of the angular rate sensor about a first input axis in the plane; and

sensing a second Coriolis force resulting from a second rotation of the angular rate sensor about a second input axis in the plane, wherein the second input axis is not parallel to the first input axis.

18. The method of claim 17, further comprising:

attaching a first Z-axis capacitive sensor to a first mass of the at least three masses;

attaching a second Z-axis capacitive sensor to a second mass of the at least three masses, wherein the second Z-axis capacitive sensor is capable of moving independently of the first mass and the first Z-axis capacitive sensor;

forming an X-axis capacitive sensor, comprising a first electrode, on the base and a portion of at least one mass of the at least three masses; and

forming a Y-axis capacitive sensor, comprising a second electrode, on the base and another portion of at least another mass of the at least three masses, wherein the X-axis capacitive sensor, the Y-axis capacitive sensor, the first Z-axis capacitive sensor and the second Z-axis capacitive sensor are capable of sensing an angular velocity of the angular rate sensor about three different input axes of the angular rate sensor.

19. The method of claim 17, wherein the at least three masses comprise a first mass, a second mass and a third mass, and wherein the method further comprises:

flexibly coupling the first mass to the second mass and the third mass.

20. The method of claim 17, wherein the center of mass is associated with a center of gravity point of the at least three masses, and wherein the method further comprises:

moving the at least three masses towards the center of gravity point of the at least three masses at substantially a same time.

21. A system that senses angular velocity, comprising:

at least three masses disposed substantially in a plane parallel to a base, wherein the at least three masses have a center of mass;

at least one actuator that drives the at least three masses in an extension mode, wherein, in the extension mode, the at least three masses move in the plane substantially simultaneously away from the center of mass or substantially simultaneously towards the center of mass;

a first transducer that senses a first inertial force resulting from a first rotation of the system about a first input axis in the plane; and

a second transducer that senses a second inertial force resulting from a second rotation of the system about a second input axis in the plane, wherein the second input axis is not parallel to the first input axis.