Extension-mode angular velocity sensor
First Claim
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1. An angular rate sensor, comprising:
- at least three masses disposed substantially in a plane parallel to a base, wherein the at least three masses have a center of mass;
at least one actuator that drives the at least three masses in an extension mode, wherein, in the extension mode, the at least three masses move in the plane simultaneously away from the center of mass or simultaneously towards the center of mass;
a first transducer that senses a first Coriolis force resulting from a first rotation of the angular rate sensor about a first input axis in the plane; and
a second transducer that senses a second Coriolis force resulting from a second rotation of the angular rate sensor about a second input axis in the plane, wherein the second input axis is not parallel to the first input axis.
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Abstract
An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.
270 Citations
21 Claims
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1. An angular rate sensor, comprising:
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at least three masses disposed substantially in a plane parallel to a base, wherein the at least three masses have a center of mass; at least one actuator that drives the at least three masses in an extension mode, wherein, in the extension mode, the at least three masses move in the plane simultaneously away from the center of mass or simultaneously towards the center of mass; a first transducer that senses a first Coriolis force resulting from a first rotation of the angular rate sensor about a first input axis in the plane; and a second transducer that senses a second Coriolis force resulting from a second rotation of the angular rate sensor about a second input axis in the plane, wherein the second input axis is not parallel to the first input axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method, comprising:
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disposing at least three masses substantially in a plane parallel to a base of an angular rate sensor, wherein the at least three masses have a center of mass; driving the at least three masses in an extension mode via at least one actuator; in the extension mode, in response to the driving, moving the at least three masses in the plane simultaneously away from the center of mass or simultaneously towards the center of mass; sensing a first Coriolis force resulting from a first rotation of the angular rate sensor about a first input axis in the plane; and sensing a second Coriolis force resulting from a second rotation of the angular rate sensor about a second input axis in the plane, wherein the second input axis is not parallel to the first input axis. - View Dependent Claims (18, 19, 20)
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21. A system that senses angular velocity, comprising:
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at least three masses disposed substantially in a plane parallel to a base, wherein the at least three masses have a center of mass; at least one actuator that drives the at least three masses in an extension mode, wherein, in the extension mode, the at least three masses move in the plane substantially simultaneously away from the center of mass or substantially simultaneously towards the center of mass; a first transducer that senses a first inertial force resulting from a first rotation of the system about a first input axis in the plane; and a second transducer that senses a second inertial force resulting from a second rotation of the system about a second input axis in the plane, wherein the second input axis is not parallel to the first input axis.
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Specification