Workpiece holder and method using same for detecting lateral displacement of workpiece

• US 9,689,656 B2
• Filed: 10/01/2013
• Issued: 06/27/2017
• Est. Priority Date: 10/11/2012
• Status: Active Grant

• Current Assignee: Creative Technology Ltd.
• Original Assignee: Creative Technology Ltd.
• Inventors: Tatsumi, Yoshiaki, Sugawara, Toshifumi, Kim, Eunsun
• Primary Examiner(s): GUADALUPE, YARITZA
• Application Number:
  US14/434,805
• Publication Number:
  US 20150268026A1
• Time in Patent Office: 1,365 Days
• Field of Search: 33568
• CPC Class Codes: G01B 7/002 Constructional details of contacts for gauges actuating one or more contacts G01B7/016 takes precedence
• CPC Class Codes: G01B 7/003 for measuring position, not involving coordinate determination coordinate measuring G01B7/004
• CPC Class Codes: G01B 7/02 for measuring length, width or thickness G01B7/004, G01B7/12 take precedence
• CPC Class Codes: G01D 5/24 by varying capacitance
• CPC Class Codes: H01L 21/67259 Position monitoring, e.g. misposition detection or presence detection
• CPC Class Codes: H01L 21/673 using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders holders for supporting a complete device in operation H01L23/32

Abstract

Provided are a workpiece holding apparatus capable of detecting lateral displacement of a workpiece (w) in a planar direction, and a method of detecting lateral displacement of a workpiece (w) with use of the workpiece holding apparatus. The workpiece holding apparatus, which is configured to hold the workpiece (w), with an adhesive pad (2) mounted on a support plate, includes: a capacitance measuring device (5) including an electrode pair formed of first and second electrodes (3a, 3b) and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece (w), the capacitance measuring device (5) being configured to measure capacitance of the electrode pair; and a comparator circuit (6) configured to compare the measured capacitance with a predetermined reference value, to thereby detect lateral displacement of the workpiece (w) in a planar direction of the support plate (1). Further, the method of detecting lateral displacement of a workpiece (w) includes comparing the capacitance input to the comparator circuit (6) with a predetermined reference value, to thereby detect the lateral displacement of the workpiece (w).

Claims

1. A workpiece holding apparatus, which is configured to hold a workpiece with an adhesive pad mounted on a support plate, the workpiece holding apparatus comprising:

a capacitance measuring device comprising an electrode pair formed of first and second electrodes and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece, the capacitance measuring device being configured to measure capacitance of the electrode pair; and

a comparator circuit configured to compare the measured capacitance with a predetermined reference value, to thereby detect lateral displacement of the workpiece in a planar direction of the support plate.

2. A workpiece holding apparatus according to claim 1, wherein at least one of the first and second electrodes is arranged at the position corresponding to the peripheral edge portion of the workpiece through intermediation of the adhesive pad.

3. A workpiece holding apparatus according to claim 1 or 2, wherein the electrode pair formed of the first and second electrodes is arranged continuous along the peripheral edge portion of the workpiece.

4. A workpiece holding apparatus according to claim 1 or 2,

wherein the first and second electrodes each comprise a band-like electrode,

wherein the first and second electrodes are arranged parallel to each other in a direction from a center of the workpiece toward the peripheral edge portion, to thereby form the electrode pair, and

wherein the electrode pair is mounted so that a part thereof is protruded outward from the peripheral edge portion of the workpiece.

5. A workpiece holding apparatus according to claim 1 or 2, wherein the electrode pair formed of the first and second electrodes is arranged at each of positions corresponding to four corners of a rectangular workpiece.

6. A workpiece holding apparatus according to claim 1 or 2, wherein the electrode pair formed of the first and second electrodes is arranged at each of positions that equally divide a circumference of a circular workpiece into at least two parts.

7. A workpiece holding apparatus according to claim 5, wherein the comparator circuit is individually mounted for each electrode pair.

8. A method of detecting lateral displacement of a workpiece in a planar direction of a support plate in a workpiece holding apparatus configured to hold the workpiece with an adhesive pad mounted on the support plate,

the workpiece holding apparatus comprising:

a capacitance measuring device comprising an electrode pair formed of first and second electrodes and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece, the capacitance measuring device being configured to measure capacitance of the electrode pair; and

a comparator circuit configured to input the measured capacitance,

the method comprising comparing the capacitance input to the comparator circuit with a predetermined reference value, to thereby detect the lateral displacement of the workpiece.

9. A method of detecting lateral displacement of a workpiece according to claim 8,

wherein a plurality of the electrode pairs each formed of the first and second electrodes are arranged at positions corresponding to the peripheral edge portion of the workpiece, and

wherein the method further comprises inputting the capacitance between the first and second electrodes in each of the plurality of the electrode pairs to the individual comparator circuit, to thereby specify a lateral displacement position of the workpiece.