Yaw-rate sensor
First Claim
1. A yaw-rate sensor comprising:
- a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures having Coriolis elements that are directly connected to a shared spring element;
means for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate;
means for detecting deflections of the Coriolis elements caused by a Coriolis force;
wherein;
the Coriolis elements include;
a first Coriolis element for detecting a yaw rate about a first axis; and
a second Coriolis element for detecting a yaw rate about a second axis;
the second axis is not oriented parallel to the first axis;
each of the Coriolis elements is connected via additional spring elements to a drive frame of a respective one of the substructures.
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Abstract
A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
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Citations
14 Claims
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1. A yaw-rate sensor comprising:
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a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures having Coriolis elements that are directly connected to a shared spring element; means for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate; means for detecting deflections of the Coriolis elements caused by a Coriolis force; wherein; the Coriolis elements include; a first Coriolis element for detecting a yaw rate about a first axis; and a second Coriolis element for detecting a yaw rate about a second axis; the second axis is not oriented parallel to the first axis; each of the Coriolis elements is connected via additional spring elements to a drive frame of a respective one of the substructures. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification