MEMS device with common mode rejection structure
First Claim
1. A microelectromechanical systems (MEMS) device comprising:
- a planar substrate;
a drive assembly anchored to said planar substrate, said drive assembly including a first drive mass and a second drive mass; and
a stiff beam interconnecting said first drive mass with said second drive mass, a lengthwise dimension of said stiff beam being oriented perpendicular to a drive direction of said first and second drive masses, said drive direction being substantially parallel to said planar substrate, wherein said stiff beam pivots about an axis that is substantially perpendicular to said planar substrate in response to drive motion of said first and second drive masses in said drive direction.
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Accused Products
Abstract
A MEMS device includes a drive spring system coupling a pair of drive masses and a sense spring system coupling a pair of sense masses. The drive spring system includes a constrained stiff beam and flexures interconnecting the pair of drive masses. In response to drive movement of the drive masses the flexures enable pivotal movement of the constrained stiff beam about its center hinge point to enable anti-phase drive motion of the drive masses and to suppress in-phase motion of the drive masses. The sense spring system includes diagonally oriented stiff beams and a spring system that enable anti-phase sense motion of the sense masses while suppressing in-phase motion of the sense masses. Coupling masses interposed between the drive and sense masses decouple the drive motion of the drive masses from the sense motion of the sense masses.
25 Citations
20 Claims
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1. A microelectromechanical systems (MEMS) device comprising:
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a planar substrate; a drive assembly anchored to said planar substrate, said drive assembly including a first drive mass and a second drive mass; and a stiff beam interconnecting said first drive mass with said second drive mass, a lengthwise dimension of said stiff beam being oriented perpendicular to a drive direction of said first and second drive masses, said drive direction being substantially parallel to said planar substrate, wherein said stiff beam pivots about an axis that is substantially perpendicular to said planar substrate in response to drive motion of said first and second drive masses in said drive direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A microelectromechanical systems (MEMS) device comprising:
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a planar substrate; a drive assembly anchored to said planar substrate, said drive assembly including a first drive mass and a second drive mass; a stiff beam interconnecting said first drive mass with said second drive mass, a lengthwise dimension of said stiff beam being oriented perpendicular to a drive direction of said first and second drive masses, said drive direction being substantially parallel to said planar substrate, wherein a central region of said stiff beam is elastically coupled to said planar substrate via at least one anchor element and at least one flexure interconnected between said central region of said stiff beam and said at least one anchor element, said at least one flexure being oriented transverse to said stiff beam, and said stiff beam pivots about an axis that is substantially perpendicular to said planar substrate in response to drive motion of said first and second drive masses in said drive direction; a first sense mass; a second sense mass; a first elastic arrangement flexibly coupling said first sense mass with said first drive mass of said drive assembly; and a second elastic arrangement flexibly coupling said second sense mass with said second drive mass of said drive assembly, wherein said first and second sense masses are configured for movement in a sense direction that is substantially parallel to said planar substrate and substantially perpendicular to said drive direction in response to an angular stimulus about said axis that is substantially perpendicular to said planar substrate. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A microelectromechanical systems (MEMS) device comprising:
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a planar substrate; a drive assembly anchored to said planar substrate, said drive assembly including a first drive mass and a second drive mass; a stiff beam having a lengthwise dimension oriented perpendicular to a drive direction of said first and second drive masses, said drive direction being substantially parallel to said planar substrate, a first elastic element coupled between a first end of said stiff beam and said first drive mass; and a second elastic element coupled between a second end of said stiff beam and said second drive mass, said first and second elastic elements being oriented transverse to said stiff beam, wherein a central region of said stiff beam is elastically coupled to said planar substrate via at least one anchor element and at least one flexure interconnected between said central region of said stiff beam and said at least one anchor element, said at least one flexure being oriented transverse to said stiff beam, and said stiff beam pivots about an axis that is substantially perpendicular to said planar substrate in response to drive motion of said first and second drive masses in said drive direction. - View Dependent Claims (19, 20)
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Specification