MEMS device with common mode rejection structure

• US 9,689,677 B2
• Filed: 06/19/2015
• Issued: 06/27/2017
• Est. Priority Date: 06/19/2015
• Status: Active Grant

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Inventors: Shao, Peng, McNeil, Andrew C.
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US14/744,693
• Publication Number:
  US 20160370182A1
• Time in Patent Office: 739 Days
• Field of Search: 7350412, 7350414, 7350404
• CPC Class Codes: G01C 19/574 the devices having two sensing masses in anti-phase motion
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01C 19/5769 Manufacturing; Mounting; Housings

Abstract

A MEMS device includes a drive spring system coupling a pair of drive masses and a sense spring system coupling a pair of sense masses. The drive spring system includes a constrained stiff beam and flexures interconnecting the pair of drive masses. In response to drive movement of the drive masses the flexures enable pivotal movement of the constrained stiff beam about its center hinge point to enable anti-phase drive motion of the drive masses and to suppress in-phase motion of the drive masses. The sense spring system includes diagonally oriented stiff beams and a spring system that enable anti-phase sense motion of the sense masses while suppressing in-phase motion of the sense masses. Coupling masses interposed between the drive and sense masses decouple the drive motion of the drive masses from the sense motion of the sense masses.

Claims

1. A microelectromechanical systems (MEMS) device comprising:

a planar substrate;

a drive assembly anchored to said planar substrate, said drive assembly including a first drive mass and a second drive mass; and

a stiff beam interconnecting said first drive mass with said second drive mass, a lengthwise dimension of said stiff beam being oriented perpendicular to a drive direction of said first and second drive masses, said drive direction being substantially parallel to said planar substrate, wherein said stiff beam pivots about an axis that is substantially perpendicular to said planar substrate in response to drive motion of said first and second drive masses in said drive direction.

2. The MEMS device of claim 1 further comprising:

a first elastic element coupled between a first end of said stiff beam and said first drive mass; and

a second elastic element coupled between a second end of said stiff beam and said second drive mass, said first and second elastic elements being oriented transverse to said stiff beam.

3. The MEMS device of claim 2 wherein said stiff beam and said first and second elastic elements are configured to enable said first and second drive masses to move in phase opposition with one another.

4. The MEMS device of claim 1 wherein a central region of said stiff beam is elastically coupled to said planar substrate via at least one anchor element and at least one flexure interconnected between said central region of said stiff beam and said at least one anchor element, said at least one flexure being oriented transverse to said stiff beam.

5. The MEMS device of claim 1 further comprising:

a first sense mass;

a second sense mass;

a first elastic component flexibly coupling said first sense mass with said first drive mass of said drive assembly; and

a second elastic component flexibly coupling said second sense mass with said second drive mass of said drive assembly, wherein said first and second sense masses are configured for movement in a sense direction that is substantially parallel to said planar substrate and substantially perpendicular to said drive direction in response to an angular stimulus about said axis that is substantially perpendicular to said planar substrate.

6. The MEMS device of claim 1 further comprising:

a first sense mass flexibly coupled with said drive assembly;

a second sense mass flexibly coupled with said drive assembly, said first and second sense masses being constrained to move in a sense direction that is substantially parallel to said planar substrate and substantially perpendicular to said drive direction; and

a spring system configured to reduce in-phase motion of said first and second sense masses, said spring system including;

a first spring arrangement coupled to each of said first and second sense masses at a first location laterally displaced away from a centerline of said MEMS device, said centerline being oriented substantially parallel to said sense direction; and

a second spring arrangement coupled to each of said first and second sense masses at a second location laterally displaced away from said centerline, wherein said first and second spring arrangements are oriented in mirror symmetry relative to said centerline.

7. The MEMS device of claim 6 wherein each of said first and second spring arrangements comprises:

a first stiff beam;

a second stiff beam, wherein said first and second stiff beams are oriented diagonal to said sense direction;

a first side spring flexibly interconnected between said first stiff beam and said first sense mass; and

a second side spring flexibly interconnected between said second stiff beam and said second sense mass.

8. The MEMS device of claim 7 wherein said each of said first and second spring arrangements further comprises:

a mass component suspended above said planar substrate;

a third side spring flexibly interconnected between said first stiff beam and said mass component; and

a fourth side spring flexibly interconnected between said second stiff beam and said mass component, wherein each of said first, second, third, and fourth side springs is rotationally compliant about said axis that is substantially perpendicular to said planar substrate.

9. The MEMS device of claim 8 wherein said first, second, third, and fourth side springs are configured to function cooperatively to enable pivotal movement of said first and second stiff beams in response to anti-phase sense motion of said first and second sense masses.

10. The MEMS device of claim 1 further comprising:

a first sense mass and a second sense mass flexibly coupled with said drive assembly, said first and second sense masses being constrained to move in a sense direction that is substantially parallel to said planar substrate and substantially perpendicular to said drive direction; and

said drive assembly further comprises;

a first coupling mass interposed between said first drive mass and said first sense mass and a first elastic component interconnected between said first sense mass and said first coupling mass to couple said first sense mass with said first drive mass, wherein said first coupling mass is configured to move in-phase with said first drive mass in said drive direction; and

a second coupling mass interposed between said second drive mass and said second sense mass and a second elastic component interconnected between said second sense mass and said second coupling mass to couple said second sense mass with said second drive mass, wherein said second coupling mass is configured to move in-phase with said second drive mass in said drive direction.

11. The MEMS device of claim 10 wherein:

said first coupling mass is further configured to move in-phase with said first sense mass; and

said second coupling mass is further configured to move in-phase with said second sense mass.

12. A microelectromechanical systems (MEMS) device comprising:

a planar substrate;

a drive assembly anchored to said planar substrate, said drive assembly including a first drive mass and a second drive mass;

a stiff beam interconnecting said first drive mass with said second drive mass, a lengthwise dimension of said stiff beam being oriented perpendicular to a drive direction of said first and second drive masses, said drive direction being substantially parallel to said planar substrate, wherein a central region of said stiff beam is elastically coupled to said planar substrate via at least one anchor element and at least one flexure interconnected between said central region of said stiff beam and said at least one anchor element, said at least one flexure being oriented transverse to said stiff beam, and said stiff beam pivots about an axis that is substantially perpendicular to said planar substrate in response to drive motion of said first and second drive masses in said drive direction;

a first sense mass;

a second sense mass;

a first elastic arrangement flexibly coupling said first sense mass with said first drive mass of said drive assembly; and

a second elastic arrangement flexibly coupling said second sense mass with said second drive mass of said drive assembly, wherein said first and second sense masses are configured for movement in a sense direction that is substantially parallel to said planar substrate and substantially perpendicular to said drive direction in response to an angular stimulus about said axis that is substantially perpendicular to said planar substrate.

13. The MEMS device of claim 12 further comprising a spring system configured to reduce in-phase motion of said first and second sense masses, said spring system including:

a first spring arrangement coupled to each of said first and second sense masses at a first location laterally displaced away from a centerline of said MEMS device, said centerline being oriented substantially parallel to said sense direction; and

a second spring arrangement coupled to each of said first and second sense masses at a second location laterally displaced away from said centerline, wherein said first and second spring arrangements are oriented in mirror symmetry relative to said centerline.

14. The MEMS device of claim 13 wherein each of said first and second spring arrangements comprises:

a first stiff beam;

a second stiff beam, said first and second stiff beams being oriented diagonal to said sense direction;

a first side spring flexibly interconnected between said first stiff beam and said first sense mass; and

a second side spring flexibly interconnected between said second stiff beam and said second sense mass.

15. The MEMS device of claim 14 wherein said each of said first and second spring arrangements further comprises:

a mass component suspended above said planar substrate;

a third side spring flexibly interconnected between said first stiff beam and said mass component; and

a fourth side spring flexibly interconnected between said second stiff beam and said mass component, wherein each of said first, second, third, and fourth side springs is rotationally compliant about said axis that is substantially perpendicular to said planar substrate.

16. The MEMS device of claim 12 wherein said drive assembly further comprises:

a first coupling mass interposed between said first drive mass and said first sense mass, said first coupling mass being configured to move in-phase with said first drive mass in said drive direction, wherein said first elastic arrangement is interconnected between said first sense mass and said first coupling mass to couple said first sense mass with said first drive mass; and

a second coupling mass interposed between said second drive mass and said second sense mass, said second coupling mass being configured to move in-phase with said second drive mass in said drive direction, wherein said second elastic arrangement is interconnected between said second sense mass and said second coupling mass to couple said second sense mass with said second drive mass.

17. The MEMS device of claim 16 wherein:

said first coupling mass is further configured to move in-phase with said first sense mass; and

said second coupling mass is further configured to move in-phase with said second sense mass.

18. A microelectromechanical systems (MEMS) device comprising:

a planar substrate;

a drive assembly anchored to said planar substrate, said drive assembly including a first drive mass and a second drive mass;

a stiff beam having a lengthwise dimension oriented perpendicular to a drive direction of said first and second drive masses, said drive direction being substantially parallel to said planar substrate,

a first elastic element coupled between a first end of said stiff beam and said first drive mass; and

a second elastic element coupled between a second end of said stiff beam and said second drive mass, said first and second elastic elements being oriented transverse to said stiff beam, wherein a central region of said stiff beam is elastically coupled to said planar substrate via at least one anchor element and at least one flexure interconnected between said central region of said stiff beam and said at least one anchor element, said at least one flexure being oriented transverse to said stiff beam, and said stiff beam pivots about an axis that is substantially perpendicular to said planar substrate in response to drive motion of said first and second drive masses in said drive direction.

19. The MEMS device of claim 18 further comprising:

a first sense mass;

a second sense mass;

a first elastic arrangement coupling said first sense mass with said first drive mass of said drive assembly; and

a second elastic arrangement coupling said second sense mass with said second drive mass of said drive assembly, wherein said first and second sense masses are configured for movement in a sense direction that is substantially parallel to said planar substrate and substantially perpendicular to said drive direction in response to an angular stimulus about said axis that is substantially perpendicular to said planar substrate.

20. The MEMS device of claim 19 wherein said drive assembly further comprises:

a first coupling mass interposed between said first drive mass and said first sense mass, said first elastic arrangement being interconnected between said first sense mass and said first coupling mass to couple said first sense mass with said first drive mass, wherein said first coupling mass is configured to move in-phase with said first drive mass in said drive direction, and said first coupling mass is further configured to move in-phase with said first sense mass in response to said angular stimulus about said axis that is substantially perpendicular to said planar substrate; and

a second coupling mass interposed between said second drive mass and said second sense mass, said second elastic arrangement being interconnected between said second sense mass and said second coupling mass to couple said second sense mass with said second drive mass, wherein said second coupling mass is configured to move in-phase with said second drive mass in said drive direction, and said second coupling mass is further configured to move in-phase with said second sense mass in response to said angular stimulus.