Resonant sensor and an associated sensing method

• US 9,689,852 B2
• Filed: 06/07/2016
• Issued: 06/27/2017
• Est. Priority Date: 06/29/2012
• Status: Active Grant

• Current Assignee: GE Infrastructure Technology, LLC (General Electric Company)
• Original Assignee: General Electric Company
• Inventors: Lee, Yongjae, Potyrailo, Radislav Alexandrovich
• Primary Examiner(s): Nguyen, Hoai-An D
• Assistant Examiner(s): NASIR, TAQI R
• Application Number:
  US15/175,127
• Publication Number:
  US 20160290944A1
• Time in Patent Office: 385 Days
• Field of Search: 324655, 324309, 324315, 324316, 324633, 324652, 324668, 324675, 324682, 324708, 324 7651, 324696, 324 65, 324 4, 324658, 324661, 324663, 324519, 324548, 324662, 324669, 324671, 324684, 324 7679, 324 7681, 324 12, 324 3 R, 324123 C, 32475017
• CPC Class Codes: G01N 27/026 Dielectric impedance spectroscopy electrochemical impedance spectroscopy for measuring corrosion G01N17/02
• CPC Class Codes: G01N 33/0031 comprising two or more sensors, e.g. a sensor array electrochemical electrode arrays G01N27/27
• CPC Class Codes: H05K 1/16 incorporating printed electric components, e.g. printed resistor, capacitor, inductor
• CPC Class Codes: H05K 2201/0338 Layered conductor, e.g. layered metal substrate, layered finish layer, layered thin film adhesion layer etched tri-metal structure H05K2201/0361
• CPC Class Codes: H05K 2201/09263 Meander
• CPC Class Codes: H05K 2201/10151 Sensor
• CPC Class Codes: Y10T 29/4913 Assembling to base an electrical component, e.g., capacitor, etc.

Abstract

A sensing system for selective analyte detection in presence of interferences is presented. The sensing system includes an inductor-capacitor-resistor (LCR) resonant sensor includes a substrate, a plurality of first sensing elements mutually spaced apart and disposed on the substrate, a plurality of second sensing elements, each second sensing element disposed overlapping a corresponding first sensing element of the plurality of second sensing elements, and a protecting film applied onto the plurality of first sensing elements and the plurality of second sensing elements, wherein the protecting film is disposed to be in a physical contact with the analyte and is configured to enable an operational contact of the plurality of first sensing elements and the plurality of second sensing elements with the analyte.

Claims

1. A sensing system for selective analyte detection in presence of interferences, comprising:

an inductor-capacitor-resistor (LCR) resonant sensor comprising;

a substrate;

a plurality of first sensing elements mutually spaced apart and disposed on the substrate;

a plurality of second sensing elements, each second sensing element disposed overlapping a corresponding first sensing element of the plurality of second sensing elements; and

a protecting film applied onto the plurality of first sensing elements and the plurality of second sensing elements, wherein the protecting film is disposed to be in a physical contact with the analyte and is configured to enable an operational contact of the plurality of first sensing elements and the plurality of second sensing elements with the analyte.

2. The sensing system of claim 1, wherein the protecting film is conformally applied to the plurality of first sensing elements and the plurality of second sensing elements.

3. The sensing system of claim 1, wherein the protecting film is configured to be inert to the analyte.

4. The sensing system of claim 1, wherein the protecting film is configured to allow penetration and transmission of an electromagnetic field generated between the plurality of first sensing elements and the plurality of second sensing elements into the analyte.

5. The sensing system of claim 1, wherein the (LCR) resonant sensor further comprises a plurality of dielectric isolators, each dielectric isolator being disposed between the corresponding first and second sensing elements.

6. The sensing system of claim 5, wherein the protecting film is non-conformally applied onto the plurality of first sensing elements, the plurality of second sensing elements, and the plurality of dielectric isolators such that the protecting film forms a uniform thickness on the substrate.

7. The sensing system of claim 6, wherein the protecting film has a height which is greater than a sum of a height of a corresponding first sensing element of the plurality of first sensing elements, a height of a corresponding second sensing element of the plurality of second sensing elements, overlapping the corresponding first sensing element, and a height of a corresponding dielectric isolator of the plurality of dielectric isolators, being disposed between the corresponding first sensing element and the corresponding second sensing element.

8. The sensing system of claim 5, wherein at least one of the substrate and the plurality of dielectric isolators have a dimensional property which is configured to change when the LCR resonant sensor interacts with the analyte.

9. The sensing system of claim 8, wherein the change in the dimensional property comprise at least one of swelling, shrinking, and bending.

10. The sensing system of claim 6, wherein at least one of the substrate and the plurality of dielectric isolators have a dielectric property which is configured to change when the LCR resonant sensor interacts with the analyte.

11. The sensing system of claim 5, wherein the protecting film is configured to prevent a direct physical contact of the plurality of first sensing elements, the plurality of second sensing elements and the plurality of dielectric isolators with the analyte.

12. The sensing system of claim 1, wherein the protecting film has a thickness which is smaller than a dielectric gap of a sensing coil structure formed using the plurality of first sensing elements and the plurality of second sensing elements.

13. The sensing system of claim 1, wherein the protecting film comprises at least one of a dielectric material, silicon dioxide, silicon nitride, silicon carbide, parylene, silicone, fluorinated polymers, ceramics, or a combination thereof.

14. The sensing system of claim 1, wherein each first sensing element has a first end coupled to one end of the corresponding second sensing element and a second end coupled to another end of the corresponding second sensing element.

15. The sensing system of claim 1, wherein the LCR resonant sensor further comprises a plurality of holes formed in the substrate, for enabling flow of the analyte through the holes, wherein the plurality of holes are disposed between the plurality of first sensing elements.

16. The sensing system of claim 15, wherein the LCR resonant sensor is a multivariable LCR resonant sensor;

wherein an electric field distribution between the plurality of first sensing elements is substantially uniform along a plane of the plurality of first sensing elements and the plurality of holes.

17. A method for fabrication of an inductor-capacitor-resistor (LCR) resonant sensor, comprising:

applying a plurality of first sensing elements on a substrate;

applying at least one dielectric layer on the plurality of first sensing elements,

applying a plurality of second sensing elements on the at least one dielectric layer, each second sensing element being disposed corresponding to position of each first sensing element such that the at least one dielectric layer is disposed between the plurality of first and second sensing elements; and

applying a protecting film onto the plurality of first sensing elements and the plurality of second sensing elements, wherein the protecting film is disposed to be in a physical contact with an analyte and is configured to enable an operational contact of the plurality of first sensing elements and the plurality of second sensing elements with the analyte.

18. The method of claim 17, further comprising conformally applying the protecting film onto the plurality of first sensing elements and the plurality of second sensing elements.

19. The method of claim 17, further comprising non-conformally applying the protecting film onto the plurality of first sensing elements, the plurality of second sensing elements, and the at least one dielectric layer.