In-plane vibrating beam accelerometer
First Claim
1. A device comprising:
- a pendulous proof mass;
a support base defining a plane and configured to support the pendulous proof mass;
a flexure configured to flexibly connect the pendulous proof mass to the support base, wherein the flexure suspends the pendulous proof mass within the support base, and wherein the pendulous proof mass rotates about the flexure in the plane defined by the support base in response to an acceleration of the device in the plane of the support base; and
at least two resonators configured to flexibly connect the pendulous proof mass to the support base and to flex based on the rotation of the pendulous proof mass about the flexure, wherein each of the at least two resonators resonate at a respective resonant frequency,wherein the pendulous proof mass, the support base, the flexure, and the at least two resonators are comprised of a monolithic material, andwherein the pendulous proof mass, the flexure, and the at least two resonators are planar.
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Accused Products
Abstract
A device is described that includes a pendulous proof mass, a support base, a flexure, and at least two resonators. The support base defines a plane and supports the pendulous proof mass. The flexure flexibly connects the pendulous proof mass to the support base, suspends the pendulous proof mass within the support base, and in response to an acceleration of the device, the pendulous proof mass rotates about the flexure in the plane defined by the support base. The at least two resonators flexibly connect the pendulous proof mass to the support base and flex based on the rotation of the pendulous proof mass about the flexure, wherein each of the at least two resonators resonate at a respective resonant frequency.
40 Citations
20 Claims
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1. A device comprising:
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a pendulous proof mass; a support base defining a plane and configured to support the pendulous proof mass; a flexure configured to flexibly connect the pendulous proof mass to the support base, wherein the flexure suspends the pendulous proof mass within the support base, and wherein the pendulous proof mass rotates about the flexure in the plane defined by the support base in response to an acceleration of the device in the plane of the support base; and at least two resonators configured to flexibly connect the pendulous proof mass to the support base and to flex based on the rotation of the pendulous proof mass about the flexure, wherein each of the at least two resonators resonate at a respective resonant frequency, wherein the pendulous proof mass, the support base, the flexure, and the at least two resonators are comprised of a monolithic material, and wherein the pendulous proof mass, the flexure, and the at least two resonators are planar. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 20)
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12. A method comprising:
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maintaining, by a plurality of electrodes, resonance of at least two resonators of an accelerometer; receiving, by a first resonator of the at least two resonators, in response to an acceleration of the accelerometer in a plane defined by a support base of the accelerometer and upon rotation of a pendulous proof mass about a flexure in the plane defined by the support base, a first force; receiving, by a second resonator of the at least two resonators, in response to the acceleration of the accelerometer in the plane defined by the support base of the accelerometer and upon rotation of the pendulous proof mass about the flexure in the plane defined by the support base, a second force; detecting, by the plurality of electrodes, respective signals that are indicative of a respective change in the resonant frequency of each of the first and second resonators caused by the first force and the second force; and outputting, by the accelerometer, the respective signals, wherein the pendulous proof mass, the support base, the flexure, and the at least two resonators are comprised of a monolithic material, and wherein the pendulous proof mass, the flexure, and the at least two resonators are planar. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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Specification