MEMS devices with membrane having venting flaps hingedly attached to one another

• US 9,695,038 B2
• Filed: 12/16/2015
• Issued: 07/04/2017
• Est. Priority Date: 12/19/2014
• Status: Active Grant

• Current Assignee: Cirrus Logic Incorporated
• Original Assignee: Cirrus Logic International Semiconductor Ltd. (Cirrus Logic Incorporated)
• Inventors: Cargill, Scott Lyall, Piechocinski, Marek Sebastian
• Primary Examiner(s): Ingham, John C
• Assistant Examiner(s): MUSE, ISMAIL A
• Application Number:
  US14/971,226
• Publication Number:
  US 20160176704A1
• Time in Patent Office: 566 Days
• CPC Class Codes: B81B 2201/0257 Microphones or microspeakers
• CPC Class Codes: B81B 2201/0264 Pressure sensors
• CPC Class Codes: B81B 2203/0127 Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
• CPC Class Codes: B81B 7/0061 suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound
• CPC Class Codes: H04R 19/005 using semiconductor materials
• CPC Class Codes: H04R 19/04 Microphones H04R19/01 takes precedence

Abstract

This application relates to MEMS transducer having a membrane layer (101) and at least one variable vent structure (301). The variable vent structure has a vent hole for venting fluid so as to reduce a pressure differential across the membrane layer and a moveable vent cover (302a, 302b) which, at an equilibrium position, at least partly blocks the vent hole. The vent cover is moveable from its equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole. In various embodiments the vent cover comprises at least a first flap section (302a) and a second flap section (302b), the first flap section being hingedly coupled to the side of the vent hole and the second flap section being hingedly coupled to the first flap section so as to be moveable with respect to the first flap section. In some embodiments the second flap section (302b) may be configured so that it deflects away from the first section (302a) more readily than the first section deflects away from its equilibrium position.

Claims

1. A MEMS transducer comprising:

a membrane layer; and

at least one variable vent structure comprising;

a vent hole for venting fluid so as to reduce a pressure differential across the membrane layer; and

a moveable vent cover which, at an equilibrium position, at least partly blocks said vent hole;

wherein the vent cover is moveable from said equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole; and

wherein the vent cover comprises at least a first flap section and a second flap section, the first flap section being hingedly coupled to the side of the vent hole and the second flap section being hingedly coupled to the first flap section so as to be moveable with respect to the first flap section.

2. A MEMS transducer as claimed in claim 1 wherein the second flap section is coupled to the side of the vent hole only via the first flap section.

3. A MEMS transducer as claimed in claim 1 wherein the second flap section is articulated to the first flap section.

4. A MEMS transducer as claimed in claim 1 wherein the vent cover is configured such that the extent to which the first flap section deflects away from equilibrium position for a given pressure differential is different to the extent to which the second flap section deflects away from the first flap section for the same pressure differential.

5. A MEMS transducer as claimed in claim 4 wherein the vent cover is configured such that the second flap section deflects away from the first flap section more readily than the first flap section deflects away from equilibrium position.

6. A MEMS transducer as claimed in claim 4 wherein the vent cover is configured such that, in use, for at least one pressure differential the amount of deflection of the second flap section with respect to the first flap section will be greater than the amount of deflection of the first flap section from equilibrium.

7. A MEMS transducer as claimed in claim 1 wherein the first flap section is coupled to the side of the vent hole via a first connection and the second flap section is coupled to the first flap section by a second connection.

8. A MEMS transducer as claimed in claim 7 wherein the dimensions and/or geometry of the first connection and second connection are different from one another.

9. A MEMS transducer as claimed in claim 7 wherein at least one of the first and second connections comprises a beam structure.

10. A MEMS transducer as claimed in claim 7 wherein at least one of the first and second connections comprises a plurality of connecting regions spaced apart along a hinging axis.

11. A MEMS transducer as claimed in claim 1 wherein the first flap section is coupled to the side of the vent hole for movement substantially about a first hinging axis and the second flap section is coupled to the first flap section for movement with respect to the first flap section substantially about a second hinging axis, wherein the first and second hinging axes are parallel to one another.

12. A MEMS transducer as claimed in claim 11 wherein the first flap section is coupled for movement about the first hinging axis in a rotational direction and the second flap section is coupled for movement about the second hinging axis in the same rotational direction.

13. A MEMS transducer as claimed in claim 11 wherein the first flap section is coupled for movement about the first hinging axis in a rotational direction and the second flap section is coupled for movement about the second hinging axis in the opposite rotational direction.

14. A MEMS transducer as claimed in claim 1 wherein the second flap section is within the perimeter of the first flap section.

15. A MEMS transducer as claimed in claim 1 wherein the vent cover is configured such that, in use, at least the first flap section is not substantially deflected from equilibrium position at pressure differentials below a first pressure threshold and is substantially deflected from equilibrium position at pressure differentials above a second pressure threshold for the first flap section.

16. A MEMS transducer as claimed in claim 15 wherein the vent cover is configured such that, in use, the second flap section is substantially deflected from equilibrium position at pressure differentials above a second pressure threshold for the second flap section.

17. A MEMS transducer as claimed in claim 1 wherein the vent cover comprises at least one additional flap section, wherein each additional flap section is hingedly coupled to one of the first flap section or the second flap section or an intermediate additional flap section.

18. A MEMS transducer as claimed in claim 1 wherein the vent cover is configured to provide a flow path size that varies, in use, with pressure within the normal expected operating range of the MEMS transducer so as to provide a variable sensitivity.

19. A MEMS transducer as claimed claim 1 wherein the vent hole is formed in a first layer of material and the vent cover is formed from the same material as said first layer wherein the vent cover is configured such that, at equilibrium position said first flap section and said second flap section lie substantially with the plane of the first layer.

20. A MEMS transducer as claimed in claim 19 wherein the first layer is the membrane layer.

21. An electronic device comprising a MEMS transducer as claimed in claim 1 wherein said device is at least one of:

a portable device;

a battery powered device;

an audio device;

a computing device;

a communications device;

a personal media player;

a mobile telephone;

a games device;

a wearable device; and

a voice controlled device.

22. A MEMS transducer comprising:

a flexible membrane; and

at least one variable vent structure wherein said variable vent structure provides a flow path having a size that varies with pressure differential across the membrane;

wherein said variable vent structure comprises at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure; and

wherein said moveable portion comprises;

a first flap section;

a first hinge connection coupling the first flap section to a side of the variable vent structure such that the first flap section may be deflected away from an equilibrium position;

a second flap section; and

a second hinge connection coupling the second flap section to the first flap section such that the second flap section may be deflected away from the first flap section.

23. A MEMS transducer comprising:

a flexible membrane; and

at least one variable vent structure comprising a vent hole for venting fluid so as to reduce a pressure differential across the flexible membrane and a moveable vent cover which, at an equilibrium position, at least partly blocks said vent hole;

wherein the vent cover is moveable from said equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole;

wherein the vent cover comprises a first flap section coupled to a side of the vent hole and at least one second flap section coupled to the first flap portion,

the vent cover being configured such that the first flap section it is moveable from the equilibrium position and the second flap section is moveable with respect to the first flap section such that, for at least a first range of pressure differentials across the vent cover, the second flap section is deflected from its equilibrium position by a greater angle than the first flap section.

24. A MEMS transducer comprising:

a flexible membrane; and

at least one variable vent structure comprising a vent hole for venting fluid so as to reduce a pressure differential across the flexible membrane and a moveable vent cover which, at an equilibrium position, at least partly blocks said vent hole;

wherein the vent cover is moveable from said equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole;

wherein the vent cover comprises a first flap section coupled to a side of the vent hole so as to be moveable from the equilibrium position and at least one second flap section coupled to the first flap section so as to be moveable with respect to the first flap section,

wherein the resistance to movement of the second flap portion with respect to the first flap section is lower than the resistance to movement of the first flap section from equilibrium position.