Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
First Claim
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1. A MEMS device comprising:
- a substrate;
first elastic elements; and
a movable mass system including;
a suspended mass elastically coupled to the substrate by the first elastic elements, the suspended mass extending in a first plane and being subject to disturbance forces along a vibration direction that is perpendicular to the first plane; and
a dynamic absorber comprising a damping mass elastically coupled to the suspended mass and configured to resonate at its natural oscillation frequency, wherein the dynamic absorber is configured to absorb movements that would have been exhibited by the suspended mass due to the disturbance forces.
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Abstract
MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.
27 Citations
19 Claims
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1. A MEMS device comprising:
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a substrate; first elastic elements; and a movable mass system including; a suspended mass elastically coupled to the substrate by the first elastic elements, the suspended mass extending in a first plane and being subject to disturbance forces along a vibration direction that is perpendicular to the first plane; and a dynamic absorber comprising a damping mass elastically coupled to the suspended mass and configured to resonate at its natural oscillation frequency, wherein the dynamic absorber is configured to absorb movements that would have been exhibited by the suspended mass due to the disturbance forces. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An electronic device comprising:
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a controller; an input/output device coupled to the controller; and a MEMS device coupled to the controller, the MEMS device including; a substrate; first and second elastic elements; and a movable mass system including; a suspended mass elastically coupled to the substrate by the first elastic elements, the suspended mass extending in a first plane and being subject to disturbance forces along a vibration direction that is perpendicular to the first plane; and a damping mass elastically coupled to the suspended mass by the second elastic elements, the damping mass being configured to resonate at its natural frequency, wherein the damping mass is configured to absorb at least some disturbance forces that would have otherwise acted on the suspended mass. - View Dependent Claims (14, 15, 16, 17)
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18. An electronic device comprising:
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a controller; an input/output device coupled to the controller; and a MEMS device coupled to the controller, the MEMS device including; a substrate; first and second elastic elements; and a movable mass system including; a suspended mass elastically coupled to the substrate by the first elastic elements and subject to disturbance forces along a vibration direction; and a dynamic absorber comprising a plurality of damping masses elastically coupled to the suspended mass and configured to reduce movements of the suspended mass due to the disturbance forces, wherein; the suspended mass comprises first and second pairs of sensing masses arranged symmetrically about first and second driving axes, respectively; the first and second driving axes are perpendicular to each other, the sensing masses of the first pair being symmetric with respect to the second driving axis and being actuated parallel to the first driving axis, the sensing masses of the second pair being symmetric with respect to the first driving axis and being actuated parallel to the second driving axis; and each of the first and second pairs of sensing masses surround and are elastically coupled to a respective one of the plurality of damping masses. - View Dependent Claims (19)
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Specification