Three-axis accelerometer
First Claim
1. A three-axis micro accelerometer, comprising a substrate, a suspending mass block suspended in the substrate, a group of Y direction displacement detection electrodes, a group of Z direction displacement detection electrodes and a group of X direction displacement detection electrodes;
- the Y, Z and X direction displacement detection electrodes being arranged on the substrate adjacent to the mass block;
the Y and X directions being perpendicular in a plane of the mass block and the Z direction being perpendicular to the plane;
wherein;
the mass block and the Y, Z and X direction displacement detection electrodes respectively comprise a plurality of metal layers and a dielectric layer between two metal layers;
in the mass block, portions corresponding to the Y, Z and X direction displacement detection electrodes respectively comprise at least two metal layers connected by a via;
each of the Y, Z and X direction displacement detection electrodes comprises two sub-groups of electrodes, each comprising at least two metal layers connected by a via; and
the Y direction displacement detection electrodes and the Z direction displacement detection electrodes are provided in a first portion of a structure formed by the mass block and the detection electrodes and the X direction displacement detection electrodes is provided in a second portion of the structure other than the first portion.
1 Assignment
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Accused Products
Abstract
A three-axis accelerometer to provide measurement of acceleration in three axes, comprising a substrate, a suspending mass block suspended in the substrate, a group of Y direction displacement sensors, a group of Z direction displacement sensors and a group of X direction displacement sensors; wherein the Y direction displacement sensors, the Z direction displacement sensors and the X direction displacement sensors are respectively arranged adjacent to the mass block; the mass block and the displacement sensors respectively comprise a plurality of metal layers and a dielectric layer between two metal layers. In the mass block, regions corresponding to the Y, Z and X direction displacement sensors respectively comprise at least two metal layers connected by a via. The Y, Z and X groups displacement sensors respectively comprise at least two metal layers connected by a via.
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Citations
22 Claims
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1. A three-axis micro accelerometer, comprising a substrate, a suspending mass block suspended in the substrate, a group of Y direction displacement detection electrodes, a group of Z direction displacement detection electrodes and a group of X direction displacement detection electrodes;
- the Y, Z and X direction displacement detection electrodes being arranged on the substrate adjacent to the mass block;
the Y and X directions being perpendicular in a plane of the mass block and the Z direction being perpendicular to the plane;wherein; the mass block and the Y, Z and X direction displacement detection electrodes respectively comprise a plurality of metal layers and a dielectric layer between two metal layers; in the mass block, portions corresponding to the Y, Z and X direction displacement detection electrodes respectively comprise at least two metal layers connected by a via; each of the Y, Z and X direction displacement detection electrodes comprises two sub-groups of electrodes, each comprising at least two metal layers connected by a via; and the Y direction displacement detection electrodes and the Z direction displacement detection electrodes are provided in a first portion of a structure formed by the mass block and the detection electrodes and the X direction displacement detection electrodes is provided in a second portion of the structure other than the first portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
- the Y, Z and X direction displacement detection electrodes being arranged on the substrate adjacent to the mass block;
Specification