Fluid-based light guiding structure and fabrication thereof

• US 9,696,484 B2
• Filed: 09/14/2015
• Issued: 07/04/2017
• Est. Priority Date: 09/13/2014
• Status: Active Grant

• Current Assignee: Sensor Electronic Technology Incorporated (Seoul Semiconductor Co., Ltd.)
• Original Assignee: Sensor Electronic Technology Incorporated (Seoul Semiconductor Co., Ltd.)
• Inventors: Dobrinsky, Alexander, Shur, Michael, Gaska, Remigijus
• Primary Examiner(s): Deo, Duy
• Application Number:
  US14/853,057
• Publication Number:
  US 20160077278A1
• Time in Patent Office: 659 Days
• CPC Class Codes: G02B 6/10 of the optical waveguide type G02B6/02, G02B6/24 take precedence; devices or arrangements for the control of light by electric, magnetic, electro-magnetic or acoustic means G02F1/00; transferring the modulation of modulated light G02F2/00; optical logic elements G02F3/00; optical analogue/digital converters G02F7/00
• CPC Class Codes: G02B 6/1221 made from organic materials

Abstract

A solution for fabricating a structure including a light guiding structure is provided. The light guiding structure can be formed of a fluoropolymer-based material and include one or more regions, each of which is filled with a fluid transparent to radiation having a target wavelength, such as ultraviolet radiation. The region(s) can be created using a filler material, which is at least substantially enclosed by the fluoropolymer-based material and subsequently removed from each region. The structure can further include at least one optical element integrated into the light guiding structure.

Claims

1. A method of fabricating a light guiding structure, the method comprising:

forming an intermediate structure including a first filler material at least substantially enclosed by a fluoropolymer-based material;

removing the first filler material from the intermediate structure to create a first region;

filling the first region with a first fluid transparent to radiation having a target wavelength; and

sealing the first region from ambient after the filling.

2. The method of claim 1, wherein the forming the intermediate structure includes:

enclosing the first filler material with a film of the fluoropolymer-based material;

heating the film after the enclosing; and

creating an opening in the film to expose a portion of a surface of the first filler material to the ambient.

3. The method of claim 2, wherein the removing includes etching the first filler material using a chemical that dissolves the first filler material.

4. The method of claim 3, wherein the first filler material comprises silicon dioxide, the chemical comprises hydrofluoric acid, and the first fluid comprises purified water.

5. The method of claim 2, wherein the filling includes submerging the opening in the first fluid after the removing, and wherein the sealing includes applying a sealing material to the opening while the opening is submerged in the first fluid.

6. The method of claim 1, wherein the intermediate structure further includes a second filler material at least substantially enclosed by the fluoropolymer-based material, wherein the second filler material is separated from the first material by the fluoropolymer-based material, and wherein the method further comprises:

removing the second filler material from the intermediate structure to create a second region;

filling the second region with a second fluid transparent to radiation having the target wavelength; and

sealing the second region from ambient after the filling.

7. The method of claim 6, wherein the second fluid is distinct from the first fluid.

8. The method of claim 7, wherein one of the first fluid or the second fluid comprises purified water and the other of the first fluid or the second fluid comprises a gas.

9. The method of claim 6, wherein at least one of the first or second filler material includes a set of openings extending there through, and wherein the fluoropolymer-based material penetrates the set of openings and forms a set of pillars in the corresponding at least one of the first or second regions.

10. The method of claim 1, further comprising integrating at least one optical element into the light guiding structure.

11. A method of fabricating a structure, the method comprising:

fabricating a light guiding structure formed of a fluoropolymer-based material, wherein the light guiding structure includes a first region filled with a first fluid transparent to radiation having a target wavelength, wherein the fabricating includes;

forming an intermediate structure including a first filler material at least substantially enclosed by a fluoropolymer-based material;

removing the first filler material from the intermediate structure to create the first region;

filling the first region with the first fluid; and

sealing the first region from ambient after the filling; and

integrating at least one optical element into the light guiding structure.

12. The method of claim 11, wherein the forming includes:

at least substantially enclosing the filler material with a fluoropolymer-based film; and

heating the fluoropolymer-based film after at least substantially enclosing the fluoropolymer-based material;

wherein the removing includes etching the first filler material from the intermediate structure to create the first region.

13. The method of claim 11, wherein the integrating includes coupling an optoelectronic device to the light guiding structure, wherein the coupling positions the optoelectronic device at an angle with respect to the light guiding structure selected to provide maximum wave guiding of radiation emitted by the optoelectronic device in the light guiding structure.

14. The method of claim 13, wherein the fabricating the light guiding structure further includes applying a reflective film to at least a portion of a surface of the light guiding structure in an area near the optoelectronic device.

15. The method of claim 11, wherein the at least one optical element includes a light extraction element.

16. The method of claim 15, wherein the light extraction element is one of:

surface roughening of a region of a surface of the light guiding structure or a lens adhered to the light guiding structure.

17. The method of claim 11, wherein the at least one optical element includes an active optical element including at least one of:

a set of bubbles or reflective powder.

18. A method of fabricating a light guiding structure, the method comprising:

forming an intermediate structure formed of a fluoropolymer-based material, wherein the intermediate structure includes a plurality of regions, each region defined by filler material at least substantially enclosed by the fluoropolymer-based material;

removing the filler material from each of the plurality of regions;

sealing a subset of the plurality of regions from ambient, wherein the plurality of regions includes at least one unsealed region;

filling each unsealed region of the plurality of regions with a liquid transparent to radiation having a target wavelength; and

sealing each unsealed region of the plurality of regions from ambient after the filling.

19. The method of claim 18, wherein the plurality of regions includes three regions aligned in a stack, and wherein the subset of the plurality of regions includes the outermost regions.

20. The method of claim 18, wherein the outermost regions include a plurality of pillars formed by the fluoropolymer-based material.