Three-dimensional (3D) photonic chip-to-fiber interposer

• US 9,696,498 B2
• Filed: 05/04/2015
• Issued: 07/04/2017
• Est. Priority Date: 05/04/2015
• Status: Active Grant

• Current Assignee: Huawei Technologies Co., Ltd. (Huawei Investment & Holding Co., Ltd.)
• Original Assignee: Huawei Technologies Co., Ltd. (Huawei Investment & Holding Co., Ltd.)
• Inventors: Jiang, Jia
• Primary Examiner(s): Hollweg, Thomas A
• Assistant Examiner(s): ANDERSON, GUY G
• Application Number:
  US14/703,229
• Publication Number:
  US 20160327749A1
• Time in Patent Office: 792 Days
• Field of Search: 385 27- 31, 385 43, 385 49- 52
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: C23C 14/18 on other inorganic substrates
• CPC Class Codes: C23C 14/48 Ion implantation
• CPC Class Codes: C23C 14/541 Heating or cooling of the substrates
• CPC Class Codes: C23C 14/542 Controlling the film thickness or evaporation rate
• CPC Class Codes: C23C 14/584 Non-reactive treatment
• CPC Class Codes: C23C 14/5873 Removal of material
• CPC Class Codes: G02B 6/12004 Combinations of two or more optical elements
• CPC Class Codes: G02B 6/1228 Tapered waveguides, e.g. integrated spot-size transformers for coupling with fibres G02B6/305
• CPC Class Codes: G02B 6/1342 using diffusion diffusion in single crystals C30B31/00; diffusion in glass C03C23/00
• CPC Class Codes: G02B 6/26 Optical coupling means G02B6/36, G02B6/42 take precedence
• CPC Class Codes: G02B 6/305 and having an integrated mode-size expanding section, e.g. tapered waveguide
• CPC Class Codes: G02B 6/36 Mechanical coupling means G02B6/255, G02B6/42 take precedence
• CPC Class Codes: G02B 6/423 using guiding surfaces for the alignment

Abstract

A method of fabricating an optical coupling device, comprising forming a waveguide mask layer on a substrate platform, wherein the waveguide mask layer comprises an array of openings comprising a first end and a second end opposite to the first end, immersing the substrate platform into a salt melt comprising ions to form an array of waveguides in the substrate platform through an ion diffusion process, and controlling a rate of immersion such that a diffusion depth of the ions varies as a function of a distance in a direction from the first end to the second end, wherein the array of waveguides extends in the direction from the first end to the second end.

Claims

1. An optical coupling device comprising:

a substrate platform comprising a first surface, a second surface adjacent to the first surface, and a third surface adjacent to the first surface and opposite the second surface; and

an array of waveguides comprising a first waveguide, disposed in the substrate platform, and extending from the second surface to the third surface,

wherein the array of waveguides corresponds to an array of ion-exchanged channels in the substrate platform provided by a process,

wherein the array of waveguides comprises an array pitch with a large pitch end at the second surface and a small pitch end at the third surface, and

wherein the first waveguide comprises a cylindrically-shaped tapered structure that tapers down vertically and laterally with respect to the first surface from the large pitch end to the small pitch end.

2. The optical coupling device of claim 1, wherein the waveguides are spaced further apart near the second surface of the substrate platform than near the third surface of the substrate platform to provide an array pitch reduction.

3. The optical coupling device of claim 1, wherein each waveguide has a mode size comparable to a mode size of a single-mode fiber (SMF) near the second surface of the substrate platform, and wherein each waveguide has a mode size comparable to a mode size of a submicron silicon (Si) waveguide near the third surface of the substrate platform.

4. The optical coupling device of claim 1, wherein the substrate platform comprises a sodium-rich glass substrate comprising sodium (Na⁺)ions.

5. The optical coupling device of claim 1, wherein the array of ion-exchanged channels provided by the process comprise silver (Ag⁺) ions, cesium (Cs⁺) ions, rubidium (Rb⁺) ions, lithium (Li⁺)ions, potassium (K⁺) ions, or thallium (TI⁺) ions.

6. The optical coupling device of claim 1, wherein the substrate platform comprises a material selected from Group III-V materials.

7. The optical coupling device of claim 1, wherein the process is an ion-exchange process, an ion-implantation process, or an ultraviolet (UV) light writing process.

8. The optical coupling device of claim 1, wherein the optical coupling device is a planar lightwave circuit (PLC).

9. The optical coupling device of claim 1, wherein the array pitch is a center-to-center spacing between the waveguides.

10. The optical coupling device of claim 1, wherein the array pitch is about 125 micrometers (μ

m) at the large pitch end and about 20 μ

m at the small pitch end.

11. The optical coupling device of claim 1, wherein the array of waveguides comprises a fan-in configuration from the second surface to the third surface.

15. The optical coupling device of claim 1, wherein the array of ion-exchanged channels is formed on the substrate platform using a single mask layer at a controlled ion exchange rate.

16. The optical coupling device of claim 1, wherein the substrate platform further comprises a fourth surface adjacent to the second surface and the third surface, and wherein the array of waveguides is buried in the substrate platform away from the first surface and the fourth surface.

12. A planar lightwave circuit (PLC)-interposer comprising:

an array of input ports comprising a first input port and configured to;

couple to an array of in-plane fibers comprising a first fiber; and

receive an optical signal from the first fiber via the first input port;

an array of output ports comprising a first output port and configured to couple to a photonic integrated circuit (PIC) edge coupling array; and

an array of ion-exchanged waveguides comprising an array pitch and a first ion-exchange waveguide and formed in a substrate platform,

wherein the array pitch comprises a large pitch end at the array of input ports and a small pitch end at the array of output ports,

wherein each ion-exchanged waveguide comprises a first end coupling to one of the input ports and a second end coupling to one of the output ports,

wherein the first ion-exchanged waveguide is coupled to the first input port and the first output port and comprises a cylindrically-shaped tapered structure that gradually decreases laterally and vertically from the large pitch end to the small pitch end, and

wherein the first ion-exchanged waveguide is configured to gradually reduce a first optical signal mode size of the optical signal laterally and vertically as the optical signal propagates towards the first output port to match a mode size of the PIC edge coupling array.

13. The PLC-interposer of claim 12, wherein the array of ion-exchanged waveguides is positioned such that a first array pitch of the array of ion-exchanged waveguides reduces from the input ports to the output ports to match a second array pitch of the PIC edge coupling array.

14. The PLC-interposer of claim 12, wherein the substrate platform comprises a sodium-rich substrate, and wherein the array of ion-exchanged waveguides is provided by a sodium-to-silver ion-exchange process.

17. The PLC-interposer of claim 12, wherein a second optical signal mode size of the optical signal at the first end is comparable to a third optical signal mode size of a single-mode fiber (SMF), and wherein a fourth optical signal mode size of the optical signal at the second end is comparable to a fifth optical signal mode size of a submicron silicon (Si) waveguide.

18. The PLC-interposer of claim 12, wherein the array of ion-exchanged waveguides is formed on the substrate platform using a single mask layer at a controlled ion exchange rate.

19. A method implemented by a planar lightwave circuit (PLC)-interposer, comprising:

receiving a first optical signal from a first optical fiber of an in-plane optical fiber array via a first input port of an array of input ports of the PLC-interposer;

performing a first three-dimensional (3D) mode size conversion on the first optical signal by passing the first optical signal through a first ion-exchanged waveguide of an array of ion-exchanged waveguides of the PLC-interposer, wherein the first ion-exchanged waveguide comprises a cylindrically-shaped tapered structure that gradually decreases a first mode size of the first optical signal laterally and vertically, wherein the array of ion-exchanged waveguides is disposed in a substrate comprising a first surface, a second surface adjacent to the first surface, and a third surface adjacent to the first surface and opposite the second surface, wherein the array of ion-exchanged waveguides comprises an array pitch with a large pitch end at the second surface and a small pitch end at the third surface, and wherein the cylindrically-shaped tapered structure tapers down vertically and laterally with respect to the first surface from the large pitch end to the small pitch end; and

coupling the first optical signal from the first ion-exchanged waveguide to a photonic integrated circuit (PIC) edge coupling array via a first output port of an array of output ports of the PLC-interposer coupled to the first ion-exchanged waveguide.

20. The method of claim 19, wherein the array of ion-exchanged waveguides is formed on the PLC-interposer using a single mask layer at a controlled ion exchange rate.

21. The method of claim 20, wherein the ion-exchanged waveguides are spaced further apart near the input ports than near the output ports, and wherein the method further comprises:

receiving a second optical signal from a second optical fiber of the in-plane optical fiber array via a second input port of the input ports;

passing the second optical signal through a second ion-exchanged waveguide of the array of ion-exchanged waveguides to provide both a second 3D mode size conversion on the second optical signal and a pitch adaptation between the in-plane optical fiber array and the PIC edge coupling array; and

coupling the second optical signal from the second ion-exchanged waveguide to the PIC edge coupling array via a second output port of the output ports coupled to the second ion-exchanged waveguide.

22. The method of claim 21, wherein a first distance between the first ion-exchanged waveguide and the second ion-exchanged waveguide near the input ports is in an order of hundreds of micrometers (μ

m), and wherein a second distance between the first ion-exchanged waveguide and the second ion-exchanged waveguide near the output ports is in an order of tens of μ

m.

23. The method of claim 19, wherein the first ion-exchanged waveguide comprises silver (Ag⁺) ions, cesium (Cs⁺) ions, rubidium (Rb⁺) ions, lithium (Li⁺) ions, potassium (K⁺) ions, or thallium (TI⁺) ions, or combinations thereof.