Perpendicular magnetic recording (PMR) write head with multiple layer trailing shield

• US 9,697,855 B1
• Filed: 09/06/2016
• Issued: 07/04/2017
• Est. Priority Date: 09/06/2016
• Status: Active Grant

• Current Assignee: Headway Technologies Incorporated
• Original Assignee: Headway Technologies Incorporated
• Inventors: Liu, Ying, Tang, Yuhui, Liu, Yue, Wang, Yiming
• Primary Examiner(s): Klimowicz, Will J
• Application Number:
  US15/257,341
• Time in Patent Office: 301 Days
• Field of Search: None
• CPC Class Codes: G11B 5/115 Shielding devices arranged between heads or windings G11B5/265 , G11B5/29 take precedence
• CPC Class Codes: G11B 5/1278 specially adapted for magnetisations perpendicular to the surface of the record carrier
• CPC Class Codes: G11B 5/3116 Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks G11B5/3113, G11B5/245 take precedence
• CPC Class Codes: G11B 5/315 Shield layers on both sides of the main pole, e.g. in perpendicular magnetic heads

Abstract

Bits per inch (BPI) is increased, and faster risetime is achieved while adjacent track erasure (ATE) is maintained at an acceptable level by inserting a 10-12 kG magnetic (TS0) layer between a 19-24 kG hot seed layer and 16-19 kG magnetic layer in a trailing shield structure at the ABS. A back portion (TY0) of the 10-12 kG magnetic layer is formed in a back gap connection between a back portion of the 16-19 kG magnetic layer and a trailing side of the main pole layer. A front side of the TY0 layer is 1-2 microns from the ABS and thereby improves BPI and writer speed. Accordingly, throat height in the write head may be reduced to less than 500 nm and thereby enables better bit error rate (BER). The TS0 layer is responsible for maintaining clean ATE near a far side of the writer track.

Claims

1. A perpendicular magnetic recording (PMR) writer, comprising:

(a) a main pole with a leading side and a trailing side at an air bearing surface (ABS), and two sides that connect the leading side and trailing side and are formed equidistant from a center plane that is orthogonal to the ABS;

(b) a gap layer surrounding the main pole at the ABS and comprising a write gap having a bottom surface that contacts the trailing side at a first plane that is orthogonal to the center plane and ABS, and has a top surface, the write gap has a first cross-track width between a first side and a second side that each have an end at the first plane and are formed equidistant from the center plane;

(c) a trailing shield structure, comprising;

(1) a 19-24 kG (hot seed) magnetic layer adjoining the write gap top surface, and having the first cross-track width between two sides that are equidistant from the center plane, the hot seed magnetic layer extends to a back side that is a first height from the ABS;

(2) a 10-12 kG magnetic layer at the ABS and adjoining a top surface and the two sides of the hot seed magnetic layer, and extending to a back side that is the first height from the ABS;

(3) a 16-19 kG magnetic layer at the ABS that contacts a top surface of the 10-12 kG magnetic layer and extends a second height to a back side that is greater than the first height from the ABS; and

(4) a PP3 trailing shield layer that is recessed from the ABS and has a first end contacting a top surface of the 16-19 kG magnetic layer, and a back end contacting a top surface of an upper layer in a back gap connection to the main pole; and

(d) the back gap connection having the upper layer that is a 16-19 kG magnetic material with a front side facing the ABS and formed a first distance therefrom, and a lower layer made of a 10-12 kG magnetic material that contacts a trailing main pole side which is aligned orthogonal to the ABS, the lower layer has a front side facing the ABS and formed a second distance therefrom that is less than the first distance, the lower layer has a first down-track thickness between the upper layer and the trailing main pole side that is orthogonal to the ABS.

2. The PMR writer of claim 1 wherein the front side of the 10-12 kG lower magnetic layer in the back gap connection is about 1.0 to 2.0 microns from the ABS.

3. The PMR writer of claim 1 wherein the first down-track thickness is from about 100 nm to 700 nm.

4. The PMR writer of claim 1 wherein the first height is a throat height and is about 50 to 500 nm.

5. The PMR writer of claim 1 wherein the first cross-track width is greater than a track width of the main pole trailing side at the ABS.

6. The PMR writer of claim 1 wherein the top surface of the 10-12 kG trailing shield magnetic layer and the top surface of the 10-12 kG lower magnetic layer in the back gap connection are coplanar along a plane that is orthogonal to the ABS.

7. The PMR writer of claim 1 wherein each of the hot seed magnetic layer and 10-12 kG trailing shield magnetic layer have a first side that faces and is formed parallel to a main pole trailing side with an end at the ABS.

8. The PMR writer of claim 7 wherein the main pole trailing side with an end at the ABS is tapered with respect to a plane that is orthogonal to the ABS, and extends to a back end that is at the first height from the ABS.

9. The PMR writer of claim 1 wherein driving coils are formed in a dielectric layer that is between a back side of the 16-19 kG trailing shield magnetic layer and a front side of the 16-19 kG upper magnetic layer in the back gap connection.

10. A perpendicular magnetic recording (PMR) writer with an all wrap around (AWA) shield structure, comprising:

(a) a main pole with a leading side at an air bearing surface (ABS), and a trailing side at the ABS and formed at a first plane that is orthogonal to the ABS and to a center plane formed equidistant between two main pole sides that connect the leading side and the trailing side;

(b) a gap layer surrounding the main pole at the ABS and comprising a write gap that contacts the trailing side and has a first cross-track width between a first side and a second side at the first plane and formed equidistant from the center plane, a side gap layer adjoining each of the two main pole sides, and a lead gap contacting the leading side;

(c) the AWA shield structure, comprising;

(1) a trailing shield, comprising

a 19-24 kG (hot seed) magnetic layer contacting a top surface of the write gap, and having the first cross-track width between two sides that are formed equidistant from the center plane, the hot seed magnetic layer extends from the ABS to a backside at a first height from the ABS;

a 10-12 kG magnetic layer at the ABS that adjoins a top surface and the two sides of the hot seed magnetic layer, and contacts a top surface of each of two side shields at the first plane, and extends to a backside that is at the first height from the ABS; and

a 16-19 kG magnetic layer that contacts a top surface of the 10-12 kG magnetic layer at the ABS and extends a second height to a backside that is greater than the first height from the ABS;

(2) a side shield formed on each side of the center plane and contacting one of the side gaps, each side shield has a bottom surface at a second plane that is parallel to the first plane; and

(3) a leading shield having a top surface that adjoins each side shield bottom surface and a bottom surface of the lead gap at the second plane; and

(d) a back gap connection having an upper layer made of a 16-19 kG magnetic material and a lower layer made of a 10-12 kG magnetic material that adjoins a main pole trailing side that is orthogonal to the ABS, has a first down-track thickness between the upper layer and main pole trailing side that is orthogonal to the ABS, and has a front side at a second height from the ABS.

11. The PMR writer of claim 10 wherein the front side of the 10-12 kG lower magnetic layer in the back gap connection is about 1.0 to 2.0 microns from the ABS.

12. The PMR writer of claim 11 wherein the 16-19 kG upper magnetic layer in the back gap connection has a front side that is a greater distance from the ABS than the second height of the 10-12 kG lower magnetic layer.

13. The PMR writer of claim 10 wherein the first down-track thickness is from about 100 nm to 700 nm.

14. The PMR writer of claim 10 wherein the first height is a throat height and is about 50 to 500 nm.

15. The PMR writer of claim 10 wherein the leading shield and side shields are made of a 10-19 kG magnetic material.

16. The PMR writer of claim 10 wherein each of the hot seed magnetic layer and 10-12 kG trailing shield magnetic layer have a first side that faces and is formed parallel to a main pole trailing side with an end at the ABS.

17. The PMR writer of claim 16 wherein the main pole trailing side with an end at the ABS is tapered with respect to a plane that is orthogonal to the ABS, and extends to a back end that is at the first height from the ABS.

18. The PMR writer of claim 10 wherein the first cross-track width is about 50 to 80 nm and is greater than a track-width of the main pole trailing side at the ABS.

19. A method of forming a perpendicular magnetic recording (PMR) writer, comprising:

(a) providing a side shield layer on a leading shield, and forming an opening with sides in the side shield layer that exposes a top surface of the leading shield;

(b) depositing a gap layer on the leading shield top surface and on the sides of the opening to partially fill the opening, and then plating a main pole layer on the gap layer to fill the opening;

(c) performing a chemical mechanical polish (CMP) process to form a first plane that includes a top surface (trailing side) of the main pole layer, and top surfaces of the side shield layer on either side of a center plane that bisects the main pole layer and is orthogonal to the first plane;

(d) sequentially depositing a write gap and a 19-24 kG hot seed magnetic layer on the top surfaces of the main pole layer and the side shield layers;

(e) performing an etching process to form sides on each of the write gap and hot seed magnetic layer that are equidistant from the center plane, the write gap sides intersect the first plane;

(f) depositing a 10-12 kG magnetic layer with a front portion on a top surface and sides of the hot seed magnetic layer at a second plane that subsequently becomes an air bearing surface (ABS), and with a back portion on a portion of a trailing side of the main pole layer; and

(g) depositing a 16-19 kG magnetic layer with a front portion on a top surface of the front portion of the 10-12 kG magnetic layer, and with a back portion on the back portion of the 10-12 kG magnetic layer, the back portions of the 10-12 kG and 16-19 kG magnetic layers form a back gap connection to the main pole layer, and the front portions of the 10-12 kG magnetic layer and 16-19 kG magnetic layer together with the hot seed magnetic layer form a trailing shield structure at the ABS.

20. The method of claim 19 wherein the side shield layer and leading shield are made of a 10-19 kG material.

21. The method of claim 19 wherein the back portion of the 10-12 kG magnetic layer has a down-track thickness of about 100 to 700 nm.

22. The method of claim 19 wherein the back portion of the 10-12 kG magnetic layer has a front side that is recessed from the ABS by a distance of about 1 to 2 microns.

23. The method of claim 19 further comprised of forming a PP3 trailing shield that connects the front portion of the 16-19 kG magnetic layer to the back portion of the 16-19 kG magnetic layer.

24. The method of claim 19 wherein the front portion of the 10-12 kG magnetic layer extends from the ABS to a backside that is at a throat height of 50 to 500 nm from the ABS.

25. The method of claim 24 wherein the write gap extends from the ABS to a backside that is at the throat height.

26. The method of claim 24 further comprised of tapering the top surface of the main pole layer before depositing the write gap to form a first tapered trailing side that extends from a front end at the ABS to a back end at the throat height, and forms a second trailing side that extends orthogonally with respect to the ABS from the back end of the first tapered trailing side toward a back end of the main pole layer.

27. The method of claim 19 wherein the sides of each of the write gap and the hot seed magnetic layer are separated by a first cross-track width that is greater than a track width of a trailing side of the main pole layer at the ABS.