Functional element with a mass body displaced in a direction which intersects its main surface, electronic apparatus and mobile object

• US 9,702,699 B2
• Filed: 06/08/2015
• Issued: 07/11/2017
• Est. Priority Date: 06/12/2014
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Furuhata, Makoto
• Primary Examiner(s): Patel, Harshad R
• Assistant Examiner(s): Shah, Samir M
• Application Number:
  US14/733,321
• Publication Number:
  US 20150362317A1
• Time in Patent Office: 764 Days
• CPC Class Codes: G01C 19/5733 Structural details or topology
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01C 19/5769 Manufacturing; Mounting; Housings
• CPC Class Codes: Y10T 29/49119 Brush

Abstract

A functional element includes a first base body; a coupling section which is coupled to the first base body; a support body which extends from the coupling section; a mass body which is coupled to the support body; a drive electrode which is provided on a surface side that faces the mass body; a detection working electrode which extends from the support body; and a detection fixed electrode which is coupled to the first base body and faces at least a portion of the detection working electrode. The mass body can be displaced in a direction which intersects a main surface of the mass body. When a distance between the first base body and the mass body is referred to as d1 and a distance between the first base body and the detection fixed electrode is referred to as d2, a relation of d1>d2 is satisfied.

Claims

1. A functional element comprising:

a first base body;

a coupling section which is coupled to the first base body;

a support body which extends from the coupling section;

a mass body which is coupled to the support body;

a drive electrode which is provided on a surface side that faces the mass body of the first base body;

a detection working electrode which extends from the support body; and

a detection fixed electrode which is coupled to the first base body and faces at least a portion of the detection working electrode,

wherein the mass body can be displaced in a direction which intersects a main surface of the mass body, and

wherein, when a distance between the first base body and the mass body is referred to as d1 and a distance between the first base body and the detection fixed electrode is referred to as d2, a relation of d1>

d2 is satisfied.

2. The functional element according to claim 1, wherein a thick body section is provided in the first base body, the coupling section is provided in the thick body section, and in a planar view, the mass body and the thick body section are separated from each other.

3. The functional element according to claim 2, wherein at least a portion of the detection fixed electrode is provided in the thick body section.

4. The functional element according to claim 3, wherein a thickness of the detection working electrode is thicker than that of the mass body.

5. The functional element according to claim 3, wherein, when the mass body is vibrated by an AC voltage which is applied between the mass body and the drive electrode, and an angular velocity of axis rotation in a direction along the main surface of the mass body and the direction in which the detection working electrode extends is applied to the mass body, the detection working electrode vibrates in a direction which intersects the direction of the angular velocity.

6. The functional element according to claim 5,

wherein the support body includes a first elasticity section which is coupled to the coupling section, and a second elasticity section which is coupled to the mass body, and

wherein a thickness of the first elasticity section is thicker than a thickness of the second elasticity section, in a sectional view.

7. The functional element according to claim 3,

wherein the support body includes a first elasticity section which is coupled to the coupling section, and a second elasticity section which is coupled to the mass body, and

wherein a thickness of the first elasticity section is thicker than a thickness of the second elasticity section, in a sectional view.

8. The functional element according to claim 2, wherein a thickness of the detection working electrode is thicker than that of the mass body.

9. The functional element according to claim 2, wherein, when the mass body is vibrated by an AC voltage which is applied between the mass body and the drive electrode, and an angular velocity of axis rotation in a direction along the main surface of the mass body and the direction in which the detection working electrode extends is applied to the mass body, the detection working electrode vibrates in a direction which intersects the direction of the angular velocity.

10. The functional element according to claim 2,

wherein the support body includes a first elasticity section which is coupled to the coupling section, and a second elasticity section which is coupled to the mass body, and

wherein a thickness of the first elasticity section is thicker than a thickness of the second elasticity section, in a sectional view.

11. The functional element according to claim 1, wherein a thickness of the detection working electrode is thicker than that of the mass body.

12. The functional element according to claim 11, wherein, when the mass body is vibrated by an AC voltage which is applied between the mass body and the drive electrode, and an angular velocity of axis rotation in a direction along the main surface of the mass body and the direction in which the detection working electrode extends is applied to the mass body, the detection working electrode vibrates in a direction which intersects the direction of the angular velocity.

13. The functional element according to claim 11,

wherein the support body includes a first elasticity section which is coupled to the coupling section, and a second elasticity section which is coupled to the mass body, and

wherein a thickness of the first elasticity section is thicker than a thickness of the second elasticity section, in a sectional view.

14. The functional element according to claim 1, wherein, when the mass body is vibrated by an AC voltage which is applied between the mass body and the drive electrode, and an angular velocity of axis rotation in a direction along the main surface of the mass body and the direction in which the detection working electrode extends is applied to the mass body, the detection working electrode vibrates in a direction which intersects the direction of the angular velocity.

15. The functional element according to claim 14,

wherein the support body includes a first elasticity section which is coupled to the coupling section, and a second elasticity section which is coupled to the mass body, and

wherein a thickness of the first elasticity section is thicker than a thickness of the second elasticity section, in a sectional view.

16. The functional element according to claim 1,

wherein the support body includes a first elasticity section which is coupled to the coupling section, and a second elasticity section which is coupled to the mass body, and

wherein a thickness of the first elasticity section is thicker than a thickness of the second elasticity section, in a sectional view.

17. An electronic apparatus comprising:

the functional element according to claim 1.

18. A mobile object comprising:

the functional element according to claim 1.