Leakage detection device and fluid controller including same
First Claim
1. A leakage detection target and a leakage detection device which detects leakage of fluid of the leakage detection target, the leakage detection device comprising:
- a sensor holding body;
an ultrasonic sensor which is held by the sensor holding body to face a leakage port that is provided in a leakage detection target member and causes a sealing part in the leakage detection target member and the outside to communicate with each other;
an ultrasonic passage configured for alignment with the leakage port in a straight line between a sensor surface of the ultrasonic sensor and the leakage port; and
a processing circuit which processes an ultrasonic wave obtained by the ultrasonic sensor, and the leakage port is provided for detecting a leakage and is not used as a fluid passage of the leakage detection target.
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Accused Products
Abstract
There is provided a leakage detection device which can be reduced in size and attached to a leakage detection target member, such as a fluid controller, all the time, and thus, can monitor leakage of fluid all the time, and a fluid controller having the same. A fluid controller is configured by a fluid controller main body and a leakage detection device which is attached to the fluid controller main body. In the fluid controller main body, a leakage port for detecting the leakage is provided. The leakage detection device includes a sensor holding body which is attached to the fluid controller main body; an ultrasonic sensor which is held by the sensor holding body to face the leakage port; an ultrasonic passage provided between a sensor surface of the ultrasonic sensor and the leakage port; and a processing circuit for processing an ultrasonic wave obtained by the ultrasonic sensor.
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Citations
2 Claims
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1. A leakage detection target and a leakage detection device which detects leakage of fluid of the leakage detection target, the leakage detection device comprising:
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a sensor holding body; an ultrasonic sensor which is held by the sensor holding body to face a leakage port that is provided in a leakage detection target member and causes a sealing part in the leakage detection target member and the outside to communicate with each other; an ultrasonic passage configured for alignment with the leakage port in a straight line between a sensor surface of the ultrasonic sensor and the leakage port; and a processing circuit which processes an ultrasonic wave obtained by the ultrasonic sensor, and the leakage port is provided for detecting a leakage and is not used as a fluid passage of the leakage detection target.
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2. A fluid controller, comprising:
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a fluid controller main body which controls the flow of fluid; and a leakage detection device which detects leakage of the fluid in the fluid controller main body, wherein, in the fluid controller main body, a leakage port which causes a sealing part in the fluid controller main body and the outside to communicate with each other, is provided, and the leakage port is provided for detecting a leakage and is not used as a fluid passage of the fluid controller, and wherein the leakage detection device comprises; a sensor holding body; an ultrasonic sensor which is held by the sensor holding body to face the leakage port; an ultrasonic passage configured for alignment with the leakage port between a sensor surface of the ultrasonic sensor and the leakage port; and a processing circuit which processes an ultrasonic wave obtained by the ultrasonic sensor.
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Specification