Leakage detection device and fluid controller including same

• US 9,702,781 B2
• Filed: 07/11/2013
• Issued: 07/11/2017
• Est. Priority Date: 07/23/2012
• Status: Expired due to Fees

• Current Assignee: Fujikin Incorporated
• Original Assignee: Fujikin Incorporated
• Inventors: Nishino, Kouji, Ikeda, Nobukazu, Yamaji, Michio, Doh, Toshio, Shinohara, Tsutomu, Dohi, Ryousuke
• Primary Examiner(s): WEST, PAUL M
• Application Number:
  US14/409,121
• Publication Number:
  US 20150143876A1
• Time in Patent Office: 1,461 Days
• CPC Class Codes: G01M 3/24 using infrasonic, sonic, or ultrasonic vibrations
• CPC Class Codes: G01M 3/243 for pipes

Abstract

There is provided a leakage detection device which can be reduced in size and attached to a leakage detection target member, such as a fluid controller, all the time, and thus, can monitor leakage of fluid all the time, and a fluid controller having the same. A fluid controller is configured by a fluid controller main body and a leakage detection device which is attached to the fluid controller main body. In the fluid controller main body, a leakage port for detecting the leakage is provided. The leakage detection device includes a sensor holding body which is attached to the fluid controller main body; an ultrasonic sensor which is held by the sensor holding body to face the leakage port; an ultrasonic passage provided between a sensor surface of the ultrasonic sensor and the leakage port; and a processing circuit for processing an ultrasonic wave obtained by the ultrasonic sensor.

Claims

1. A leakage detection target and a leakage detection device which detects leakage of fluid of the leakage detection target, the leakage detection device comprising:

a sensor holding body;

an ultrasonic sensor which is held by the sensor holding body to face a leakage port that is provided in a leakage detection target member and causes a sealing part in the leakage detection target member and the outside to communicate with each other;

an ultrasonic passage configured for alignment with the leakage port in a straight line between a sensor surface of the ultrasonic sensor and the leakage port; and

a processing circuit which processes an ultrasonic wave obtained by the ultrasonic sensor, and the leakage port is provided for detecting a leakage and is not used as a fluid passage of the leakage detection target.

2. A fluid controller, comprising:

a fluid controller main body which controls the flow of fluid; and

a leakage detection device which detects leakage of the fluid in the fluid controller main body,

wherein, in the fluid controller main body, a leakage port which causes a sealing part in the fluid controller main body and the outside to communicate with each other, is provided, and the leakage port is provided for detecting a leakage and is not used as a fluid passage of the fluid controller, and

wherein the leakage detection device comprises;

a sensor holding body;

an ultrasonic sensor which is held by the sensor holding body to face the leakage port;

an ultrasonic passage configured for alignment with the leakage port between a sensor surface of the ultrasonic sensor and the leakage port; and

a processing circuit which processes an ultrasonic wave obtained by the ultrasonic sensor.