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In-plane piezoresistive detection sensor

  • US 9,702,893 B2
  • Filed: 08/20/2015
  • Issued: 07/11/2017
  • Est. Priority Date: 10/23/2009
  • Status: Active Grant
First Claim
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1. An in-plane MEMS or NEMS detection device for measuring displacements directed along a direction, comprising:

  • a seismic mass suspended with respect to a substrate, the seismic mass being pivotable about an axis perpendicular to the plane of the substrate;

    at least one piezoresistive strain gauge suspended between the seismic mass and the substrate, and mechanically and electrically directly connected to the seismic mass and mechanically and electrically connected to an embedding pad anchored to the substrate,the seismic mass being in turn suspended with respect to the substrate by at least one beam, the at least one beam being connected to the substrate at an area distinct from that by which the gauge is connected to the substrate,wherein the piezoresistive gauge is thinner than the seismic mass, and wherein the axis of the piezoresistive strain gauge is orthogonal to the plane containing the pivot axis and the center of gravity of the seismic mass and the plane being orthogonal to the direction of the displacements to be measured, andwherein the at least one beam has a thickness higher than a thickness of the piezoresistive gauge.

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