Monolithic z-axis torsional CMOS MEMS accelerometer

• US 9,702,894 B2
• Filed: 02/18/2015
• Issued: 07/11/2017
• Est. Priority Date: 12/29/2014
• Status: Active Grant

• Current Assignee: National Applied Research Laboratories (Government of The Republic of China)
• Original Assignee: National Applied Research Laboratories (Government of The Republic of China)
• Inventors: Tsai, Hann-Huei, Juang, Ying-Zong, Tseng, Sheng-Hsiang, Wang, Yi-Jen
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US14/625,106
• Publication Number:
  US 20160187369A1
• Time in Patent Office: 874 Days
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

The present invention discloses a monolithic z-axis torsional CMOS MEMS accelerometer, it includes a matching frame, two anchors, a first comb structure, a second comb structure and a proof mass. With the implementation of the present invention, the capacitance sensitivity of Z+ direction and Z− direction sensing signals by the accelerometer can be improved. On the other hand, due to the feasibility of applying micromachining etch processes from the top side, the ease and the yield of production are both promoted.

Claims

1. A monolithic z-axis torsional CMOS MEMS accelerometer, made of a complementary metal-oxide semiconductor (CMOS) with a micromachining process, and comprising:

a matching frame comprising a first side zone, a second side zone, a third side zone, and a fourth side zone which adjoin successively in an enclosing manner, wherein the first side zone and the third side zone are opposite each other, whereas the second side zone and the fourth side zone are opposite each other, wherein the fourth side zone and the first side zone adjoin each other;

two anchors disposed and located at a midpoint of the first side zone and the midpoint of the third side zone, respectively;

a first comb structure adjoining the second side zone, a second side zone-adjoining portion of the first side zone, and a second side zone-adjoining portion of the third side zone, and the first comb structure having a plurality of sensing units arranged side by side;

a second comb structure adjoining the fourth side zone, a fourth side zone-adjoining portion of the first side zone, and a fourth side zone-adjoining portion of the third side zone, and the second comb structure having a plurality of sensing units arranged side by side; and

a proof mass disposed between the first comb structure and the second comb structure inside the matching frame to adjoin the first comb structure and the second comb structure, wherein an axis of the proof mass is defined by a virtual line which connects the two anchors, and two disconnected regions which are symmetrical to each other but do not adjoin the proof mass are disposed between the axis and the first comb structure;

wherein the sensing units each include a first fixed single unit, a mobile single unit, and a second fixed single unit which are arranged successively but not connected;

each said first fixed single unit and each said second fixed single unit of the first comb structure adjoin the second side zone;

each said first fixed single unit and each said second fixed single unit of the second comb structure adjoin the fourth side zone;

each said mobile single unit adjoins the proof mass;

wherein the first fixed single units each have a first upper portion and a first lower portion which are separated by a silicon dioxide unit;

wherein the second fixed single units each have a second upper portion and a second lower portion which are separated by the silicon dioxide unit.

2. The monolithic z-axis torsional CMOS MEMS accelerometer of claim 1, wherein each said first upper portion and each said second upper portion of the first comb structure are electrically connected by a conductor, wherein each said first lower portion and each said second lower portion of the first comb structure are electrically connected by another conductor, wherein each said first upper portion and each said second upper portion of the second comb structure are electrically connected by yet another conductor, wherein each said first lower portion and each said second lower portion of the second comb structure are electrically connected by a further conductor, wherein the first upper portion of the first comb structure is electrically connected to the first lower portion of the second comb structure by a first conductor penetrating the proof mass, wherein the first lower portion of the first comb structure is electrically connected to the first upper portion of the second comb structure by a second conductor penetrating the proof mass.

3. The monolithic z-axis torsional CMOS MEMS accelerometer of claim 2, wherein an upper edge of the first fixed single unit and an upper edge of the second fixed single unit together define a XY plane, wherein the mobile single unit moves in a direction perpendicular to the XY plane.

4. The monolithic z-axis torsional CMOS MEMS accelerometer of claim 2, wherein the first comb structure and the second comb structure are equal in size and shape.

5. The monolithic z-axis torsional CMOS MEMS accelerometer of claim 2, wherein the first comb structure extends 80 μ

m with an error of <

10% from the second side zone to the axis, wherein the second comb structure extends 80 μ

m with an error of <

10% from the fourth side zone to the axis.

6. The monolithic z-axis torsional CMOS MEMS accelerometer of claim 2, wherein the axis is of a length of 276 μ

m with an error of <

10%, and is of a width of 6 μ

m with an error of <

10%.

7. The monolithic z-axis torsional CMOS MEMS accelerometer of claim 1, wherein an upper edge of the first fixed single unit and an upper edge of the second fixed single unit together define a XY plane, wherein the mobile single unit moves in a direction perpendicular to the XY plane.

8. The monolithic z-axis torsional CMOS MEMS accelerometer of claim 1, wherein the first comb structure and the second comb structure are equal in size and shape.

9. The monolithic z-axis torsional CMOS MEMS accelerometer of claim 1, wherein the first comb structure extends 80 μ

m with an error of <

10% from the second side zone to the axis, wherein the second comb structure extends 80 μ

m with an error of <

10% from the fourth side zone to the axis.

10. The monolithic z-axis torsional CMOS MEMS accelerometer of claim 1, wherein the axis is of a length of 276 μ

m with an error of <

10%, and is of a width of 6 μ

m with an error of <

10%.