Catadioptric imaging systems for digital scanner
First Claim
1. A projection optical system configured to form an image on an image plane, comprising:
- a first optical system that includes first and second negative lenses and a concave mirror to form an intermediate optical image;
a second optical system configured as a dioptric optical system disposed to form an image of said intermediate optical image at the image plane;
wherein the first negative lens has concave and convex surfaces, said concave surface of the first negative lens facing away from the concave mirror; and
wherein a concave surface of the second negative lens is immediately adjacent to the concave mirror.
1 Assignment
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Accused Products
Abstract
Projection optical system for forming an image on a substrate and including an illumination relay lens and a projection lens each of which is a catadioptric system. The projection lens may include two portions in optical communication with one another, the first of which is dioptric and the second of which is catadioptric. In a specific case, the projection optical system satisfies
where βI and βT are magnifications of the first portion and the overall projection lens. Optionally, the projection lens may be structured to additionally satisfy
where βII is a magnification of the second portion. A digital scanner including such projection optical system and operating with UV light having a spectral bandwidth on the order of 1 picometer. Method for forming an image with such projection optical system.
18 Citations
33 Claims
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1. A projection optical system configured to form an image on an image plane, comprising:
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a first optical system that includes first and second negative lenses and a concave mirror to form an intermediate optical image; a second optical system configured as a dioptric optical system disposed to form an image of said intermediate optical image at the image plane; wherein the first negative lens has concave and convex surfaces, said concave surface of the first negative lens facing away from the concave mirror; and wherein a concave surface of the second negative lens is immediately adjacent to the concave mirror. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A projection optical system configured to form an image on an image plane, comprising:
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a catadioptric projection lens including first and second portions in optical communication with one another; said second portion configured as a catadioptric optical system designed to form an intermediate optical image at a location between elements of the second portion; said first portion configured as a dioptric optical system disposed between the second portion and the image plane of the projection optical system to transfer light from said location to the image plane to form the image thereon, said catadioptric projection lens configured to satisfy a condition of - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. A projection optical system configured to form an image on an image plane, comprising:
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a catadioptric projection lens including first and second portions in optical communication with one another; said second portion configured as a catadioptric optical system that includes first and second negative lenses and a concave mirror to form an intermediate optical image at a location between elements of the second portion; said first portion configured as a dioptric optical system and disposed between the image plane and the second optical portion to form an image of said intermediate optical image at the image plane; wherein the first negative lens has concave and convex surfaces, said concave surface of the first negative lens facing away from the concave mirror; and wherein a concave surface of the second negative lens is immediately adjacent to the concave mirror. - View Dependent Claims (33)
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Specification