Reducing diffraction effects on an ablated surface
First Claim
Patent Images
1. A method of removing a material from a surface, comprising:
- passing a laser through a lens such that the laser impinges on the material, andwherein a working distance between the lens and the material is different than a focal length of the lens such that a focal plane of the laser is located beyond the surface in a direction of propagation of the laser.
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Abstract
A method is provided for laser ablation that reduces or eliminates a diffraction effect produced by damage to a surface from which an ablated material is removed. The method includes at least one of reducing the amount of surface damage produced and altering the damage structure produced such that it is irregular.
6 Citations
20 Claims
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1. A method of removing a material from a surface, comprising:
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passing a laser through a lens such that the laser impinges on the material, and wherein a working distance between the lens and the material is different than a focal length of the lens such that a focal plane of the laser is located beyond the surface in a direction of propagation of the laser. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of removing a material from a surface, comprising:
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passing a laser through a lens such that the laser impinges on the material, and wherein the surface from which the material is removed has an array of artifacts thereon with a spacing between artifacts and a pitch between lines of artifacts, and wherein at least the pitch is varied. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification