Power combiner and microwave introduction mechanism
First Claim
1. A power combiner, comprising:
- a main body having a coaxial structure composed of an outer conductor and an inner conductor;
a plurality of power introduction ports installed in a lateral side of the outer conductor and configured to introduce electromagnetic wave powers supplied through power supply lines into the main body;
a power combining antenna configured to radiate electromagnetic waves which are supplied through the plurality of power introduction ports via the power supply lines, to a space between the outer conductor and the inner conductor of the main body such that the powers are combined; and
an output port through which the combined electromagnetic wave is outputted from the main body,wherein the power combining antenna includes;
a plurality of antenna members, each of which has a first pole to which the electromagnetic waves are supplied from the power supply line in each of the plurality of power introduction ports and a second pole that is in contact with the inner conductor; and
a reflection part installed in a ring shape along an outer side of the inner conductor from both sides of each of the plurality of antenna members and configured to reflect the electromagnetic waves,wherein a standing wave is formed by the electromagnetic waves incident onto the plurality of antenna members and the electromagnetic waves reflected at the reflection part, and the electromagnetic wave powers are combined by a linked behavior between an induced magnetic field and an induced electric field, which are generated inside the main body by the standing wave so that the combined power propagates through the interior of the main body, followed by being outputted through the output port.
1 Assignment
0 Petitions
Accused Products
Abstract
A power combiner includes a main body composed of outer and inner conductors, a plurality of power introduction ports configured to introduce electromagnetic wave powers supplied through power supply lines into the main body, a power combining antenna configured to radiate electromagnetic waves to a space between the outer and inner conductors such that the powers are combined, and an output port through which the combined electromagnetic wave is outputted from the main body. The power combining antenna includes a plurality of antenna members, each of which has a first pole and a second pole that is in contact with the inner conductor, and a reflection part configured to reflect the electromagnetic waves.
-
Citations
15 Claims
-
1. A power combiner, comprising:
-
a main body having a coaxial structure composed of an outer conductor and an inner conductor; a plurality of power introduction ports installed in a lateral side of the outer conductor and configured to introduce electromagnetic wave powers supplied through power supply lines into the main body; a power combining antenna configured to radiate electromagnetic waves which are supplied through the plurality of power introduction ports via the power supply lines, to a space between the outer conductor and the inner conductor of the main body such that the powers are combined; and an output port through which the combined electromagnetic wave is outputted from the main body, wherein the power combining antenna includes; a plurality of antenna members, each of which has a first pole to which the electromagnetic waves are supplied from the power supply line in each of the plurality of power introduction ports and a second pole that is in contact with the inner conductor; and a reflection part installed in a ring shape along an outer side of the inner conductor from both sides of each of the plurality of antenna members and configured to reflect the electromagnetic waves, wherein a standing wave is formed by the electromagnetic waves incident onto the plurality of antenna members and the electromagnetic waves reflected at the reflection part, and the electromagnetic wave powers are combined by a linked behavior between an induced magnetic field and an induced electric field, which are generated inside the main body by the standing wave so that the combined power propagates through the interior of the main body, followed by being outputted through the output port. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. A microwave introduction mechanism for introducing microwaves into a chamber in a microwave plasma source which forms a surface wave plasma inside the chamber by the microwaves, comprising:
-
a power combiner configured to combine microwave powers supplied from a plurality of power supply lines; an antenna part including a microwave radiating antenna configured to radiate the microwave power combined by the power combiner into the chamber; and a tuner configured to transmit the microwave power combined by the power combiner and configured to match an impedance of a load that includes plasma inside the chamber with a characteristic impedance of a microwave power supply, wherein the power combiner includes; a main body having a coaxial structure composed of an outer conductor and an inner conductor; a plurality of power introduction ports installed in a lateral side of the outer conductor and configured to introduce the microwave powers supplied through the plurality of power supply lines into the main body; a power combining antenna configured to radiate the microwave powers which are introduced through the plurality of power introduction ports via the plurality of power supply lines, to a space between the outer conductor and the inner conductor of the main body such that the microwave powers are combined; and an output port through which the combined microwave is outputted from the main body, wherein the power combining antenna includes; a plurality of antenna members, each of which has a first pole to which the microwaves are supplied from the power supply line in each of the plurality of power introduction ports and a second pole that is in contact with the inner conductor; and a reflection part installed in a ring shape along an outer side of the inner conductor from both sides of each of the plurality of antenna members and configured to reflect the microwaves, wherein a standing wave is formed by the microwaves incident onto the plurality of antenna members and the microwaves reflected at the reflection part, and the microwave powers are combined by a linked behavior between an induced magnetic field and an induced electric field, which are generated inside the main body by the standing wave so that the combined power propagates through the interior of the main body, followed by being outputted through the output port. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15)
-
Specification