Apparatus and methods for time domain measurement of oscillation perturbations
First Claim
1. A method comprising the steps of:
- generating a triggering event when a first element of a switch passes a second element of the switch, wherein the first element is disposed on a proof mass assembly and the second element is disposed on a frame fixed in location with respect to the proof mass assembly, wherein the first element is an oscillator in harmonic oscillation, wherein when the oscillator is displaced from a reference position the oscillator experiences a restoring force proportional to the displacement, and the second element is located at a fixed trigger position of one or more fixed trigger positions within the amplitude range of the oscillation, wherein the fixed trigger positions are predefined physical locations with respect to a reference position of the first element;
determining at least one time period between successive triggering events; and
using the at least one time period and the fixed trigger position of the second element to determine one or more parameters of the oscillation.
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Abstract
An oscillatory apparatus and methods of utilizing the same. In one embodiment, the apparatus comprises a force sensor having a proof mass, with one or more sensing electron tunneling electrodes disposed thereon, and a frame comprising one or more reference electron tunneling electrodes. Conductive plates disposed on the sensor base and capping wafers induce oscillations of the proof mass. The sensing and the reference electrode pairs are disposed in a face-to-face configuration, thus forming a digital switch characterized by one or more closed states. In the closed state, the switch generates triggering events, thereby enabling the sensing apparatus to generate a digital output indicative of the mass position. The time period between consecutive trigger events is used to obtain mass deflection due to external forcing. Time separation between the triggering events is based on the physical dimensions established during fabrication, thus not requiring ongoing sensor calibration.
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Citations
19 Claims
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1. A method comprising the steps of:
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generating a triggering event when a first element of a switch passes a second element of the switch, wherein the first element is disposed on a proof mass assembly and the second element is disposed on a frame fixed in location with respect to the proof mass assembly, wherein the first element is an oscillator in harmonic oscillation, wherein when the oscillator is displaced from a reference position the oscillator experiences a restoring force proportional to the displacement, and the second element is located at a fixed trigger position of one or more fixed trigger positions within the amplitude range of the oscillation, wherein the fixed trigger positions are predefined physical locations with respect to a reference position of the first element; determining at least one time period between successive triggering events; and using the at least one time period and the fixed trigger position of the second element to determine one or more parameters of the oscillation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method comprising the steps of:
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generating a triggering event each time a first element of a switch passes a second element of the switch, wherein the first element is disposed on a proof mass assembly and the second element is disposed on a frame fixed in location with respect to the proof mass assembly, wherein the first element is an oscillator in harmonic oscillation and the second element is located at one of more than one fixed trigger positions within the amplitude range of the oscillation, wherein when the oscillator is displaced from a reference position the oscillator experiences a restoring force proportional to the displacement, wherein the fixed trigger positions are each at a fixed predefined physical location with respect to a reference position of the first element of the switch; determining at least one time period between successive triggering events; and using the at least one time period and the physical locations of the fixed trigger positions to determine one or more parameters of the oscillation including parameters caused by an external force acting upon the oscillator. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A method comprising the steps of:
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generating a triggering event when a first element of a switch passes a second element of the switch, wherein the first element is disposed on a proof mass assembly and the second element is disposed on a frame fixed in location with respect to the proof mass assembly, wherein the first element is a harmonic oscillator in oscillation, wherein oscillations of the harmonic oscillator are substantially harmonic, wherein when the oscillator is displaced from a reference position the oscillator experiences a restoring force proportional to the displacement, wherein the second element of the switch is located at a fixed trigger position of one or more fixed trigger positions within the amplitude range of the oscillation, wherein the fixed trigger positions are predefined physical locations with respect to a reference position of the first element; determining at least one time period between successive triggering events; and using the at least one time period and the fixed trigger position of the second element to determine one or more parameters of the oscillation.
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Specification