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Magnetic alignment for flip chip microelectronic devices

  • US 9,711,443 B2
  • Filed: 11/14/2015
  • Issued: 07/18/2017
  • Est. Priority Date: 11/14/2015
  • Status: Active Grant
First Claim
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1. A microelectronic structure, comprising:

  • a microelectronic device having an attachment surface, an opposing back surface, and at least one side extending between the attachment surface and the back surface, wherein the microelectronic device attachment surface has at least one magnetic alignment structure and at least one interconnect structure extending therefrom;

    a microelectronic substrate having a first surface and having an alignment coil formed therein, and having an unfilled opening extending into the microelectronic substrate from the microelectronic substrate first surface, wherein the unfilled opening is defined by at least one sidewall and a bottom and wherein a portion of the alignment coil is exposed to the unfilled opening at the least one unfilled opening sidewalk; and

    wherein the at least one microelectronic device interconnect structure is electrically attached to the microelectronic substrate.

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