Microfabricated structure having parallel and orthogonal flow channels controlled by row and column multiplexors

• US 9,714,443 B2
• Filed: 11/16/2012
• Issued: 07/25/2017
• Est. Priority Date: 09/25/2002
• Status: Active Grant

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Thorsen, Todd A., Maerkl, Sebastian J., Bao, Xiaoyan, Quake, Stephen R., Studer, Vincent
• Primary Examiner(s): Gakh, Yelena G
• Assistant Examiner(s): Adams, Michelle
• Application Number:
  US13/679,328
• Publication Number:
  US 20140065653A1
• Time in Patent Office: 1,712 Days
• Field of Search: None
• CPC Class Codes: B01L 2300/0861 Configuration of multiple channels and/or chambers in a single devices
• CPC Class Codes: B01L 2300/0887 Laminated structure
• CPC Class Codes: B01L 2400/0481 squeezing of channels or chambers
• CPC Class Codes: B01L 2400/0655 pinch valves
• CPC Class Codes: B01L 3/5025 for parallel transport of multiple samples
• CPC Class Codes: B01L 3/50273 characterised by the means or forces applied to move the fluids micropumps F04B19/006, of the membrane type F04B43/043
• CPC Class Codes: B01L 3/502738 characterised by integrated valves microvalves F16K99/0001
• CPC Class Codes: B81B 2201/0214 Biosensors; Chemical sensors
• CPC Class Codes: B81B 2201/054 Microvalves
• CPC Class Codes: B81B 2201/07 Data storage devices, static or dynamic memories
• CPC Class Codes: B81C 1/00119 Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
• CPC Class Codes: C12Q 1/28 involving peroxidase
• CPC Class Codes: F15C 5/00 Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: F16K 11/20 operated by separate actuating members with one plug turning in another F16K11/12
• CPC Class Codes: F16K 2099/0074 using photolithography, e.g. etching
• CPC Class Codes: F16K 2099/0076 using electrical discharge machining [EDM], milling or drilling
• CPC Class Codes: F16K 2099/0078 using moulding or stamping
• CPC Class Codes: F16K 2099/008 Multi-layer fabrications
• CPC Class Codes: F16K 2099/0084 Chemistry or biology, e.g. "lab-on-a-chip" technology
• CPC Class Codes: F16K 2099/0094 Micropumps
• CPC Class Codes: F16K 99/0001 : Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0015 : Diaphragm or membrane valves
• CPC Class Codes: F16K 99/0059 : actuated by a pilot fluid
• CPC Class Codes: Y10T 137/0318 : Processes
• CPC Class Codes: Y10T 137/0329 : Mixing of plural fluids of diverse characteristics or conditions
• CPC Class Codes: Y10T 137/2224 : Structure of body of device
• CPC Class Codes: Y10T 137/85938 : Non-valved flow dividers
• CPC Class Codes: Y10T 137/87249 : Multiple inlet with multiple outlet

Abstract

High-density microfluidic chips contain plumbing networks with thousands of micromechanical valves and hundreds of individually addressable chambers. These fluidic devices are analogous to electronic integrated circuits fabricated using large scale integration (LSI). A component of these networks is the fluidic multiplexor, which is a combinatorial array of binary valve patterns that exponentially increases the processing power of a network by allowing complex fluid manipulations with a minimal number of inputs. These integrated microfluidic networks can be used to construct a variety of highly complex microfluidic devices, for example the microfluidic analog of a comparator array, and a microfluidic memory storage device resembling electronic random access memories.

Claims

1. A microfabricated structure comprising:

(a) parallel horizontal flow channels;

(b) parallel vertical flow channels that are orthogonal to the horizontal flow channels;

(c) a plurality of individually addressable storage locations, each of which is located where one of the horizontal flow channels crosses one of the vertical flow channels;

(d) a network of compartmentalization control lines forming valves that surround the storage locations so that each storage location can be fluidically isolated;

(e) a row multiplexor containing a plurality of parallel vertical control lines that cross the horizontal flow channels, such that each of the vertical control lines forms valves that control several but not all of the horizontal flow channels, the vertical control lines being configured so that the row multiplexor can allow fluid to flow through any one of the horizontal flow channels while preventing flow through the other horizontal flow channels; and

(f) a column multiplexor containing a plurality of parallel horizontal control lines that cross the vertical flow channels, such that each of the horizontal control lines forms valves that control several but not all of the vertical flow channels, the horizontal control lines being configured so that the column multiplexor can allow fluid to flow through any one of the vertical flow channels while preventing flow through the other vertical flow channels;

wherein the control lines for the row multiplexor are formed in a separate layer of the microfluidic device from the control lines for the column multiplexor such that the row multiplexor and the column multiplexor operate independently.

2. The microfabricated structure of claim 1, wherein the horizontal flow channels are formed in a first elastomeric layer, the vertical flow channels are formed in a second elastomeric layer, and each storage location is a chamber located between the horizontal and the vertical flow channels.

3. The microfabricated structure of claim 2, wherein each storage location has one of the horizontal flow channel connected thereto through a one-way valve, and each storage location is connected to one of the vertical flow channels through a one-way valve.

4. The microfabricated structure of claim 3, wherein each one-way valve comprises an elastomeric membrane resting on a seat so as to deflect in one direction only.

5. The microfabricated structure of claim 1, comprising additional control lines crossing and controlling flow through the vertical control lines of the row multiplexor and the horizontal control lines of the column multiplexor.

6. The microfabricated structure of claim 5, wherein the additional control lines are formed in the same layer as the compartmentalization control lines.

7. The microfabricated structure of claim 1, wherein either or both of the row multiplexor and column multiplexor are configured as a binary multiplexor such that flow in a number “

n”

of the horizontal or the vertical flow channels can be controlled by 2·

log₂(n) control lines of the row or the column multiplexor, respectively.

8. The microfabricated structure of claim 1, wherein the horizontal flow channels have a common input channel.

9. The microfabricated structure of claim 8, wherein the vertical flow channels have a common input channel.

10. The microfabricated structure of claim 1, comprising at least 1,000 individually addressable storage locations.

11. The microfabricated structure of claim 1, wherein valves of the row multiplexor are formed where wider portions of vertical control lines pass over or under an adjacent horizontal flow channel.

12. The microfabricated structure of claim 11, wherein valves of the column multiplexor are formed where wider portions of horizontal control lines pass over or under an adjacent vertical flow channel.

13. The microfabricated structure of claim 12, wherein horizontal control lines of the column multiplexor are connected with a pressure source having an actuation pressure that is chosen so that membranes in only the wider portions of the horizontal control lines are fully deflected into the adjacent vertical flow channels, thereby closing valves of the column multiplexor.

14. The microfabricated structure of claim 11, wherein vertical control lines of the row multiplexor are connected with a pressure source having an actuation pressure that is chosen so that membranes in only the wider portions of the vertical control lines are fully deflected into the adjacent horizontal flow channels, thereby closing valves of the row multiplexor.

15. The microfabricated structure of claim 1, wherein

the row multiplexor controls a number of the horizontal flow channels that is larger than the number of vertical control lines, and

the column multiplexor controls a number of the vertical flow channels that is larger than the number of horizontal control lines.

16. A microfabricated structure made of an elastomeric material, comprising:

(a) parallel horizontal flow channels;

(b) parallel vertical flow channels that are orthogonal to the horizontal flow channels;

(c) multiple individually addressable storage locations, each of which is located where one of the horizontal flow channels crosses one of the vertical flow channels;

(d) a network of compartmentalization control lines forming valves that surround a plurality of the storage locations so that each storage location in the plurality can be fluidically isolated;

(e) a row multiplexor containing parallel vertical control lines that cross the horizontal flow channels,

wherein the number of horizontal flow channels is greater than the number of vertical control lines, and the vertical control lines are configured to control the horizontal flow channels so as to allow fluid to flow through any one of the horizontal flow channels while preventing flow through the other horizontal flow channels; and

(f) a column multiplexor containing parallel horizontal control lines that cross the vertical flow channels,

wherein the number of vertical flow channels is greater than the number of horizontal control lines, and the horizontal control lines are configured to control the vertical flow channels so as to allow fluid to flow through any one of the vertical flow channels while preventing flow through the other vertical flow channels; and

wherein the control lines for the row multiplexor are formed in a separate layer of the microfluidic device from the control lines for the column multiplexor such that the row multiplexor and the column multiplexor operate independently.

17. The microfabricated structure of claim 16, wherein each of the vertical control lines of the row multiplexor forms valves that control several but not all of the horizontal flow channels, and each of the horizontal control lines of the column multiplexor forms valves that control several but not all of the vertical flow channels.

18. The microfabricated structure of claim 16, wherein the vertical flow channels have a common input channel, and the horizontal flow channels have a common input channel.

19. The microfabricated structure of claim 16, wherein the horizontal flow channels are formed in a first elastomeric layer, the vertical flow channels are formed in a second elastomeric layer, and each storage location is a chamber located between the horizontal and the vertical flow channels.

20. A microfabricated structure comprising:

(a) parallel horizontal flow channels;

(b) parallel vertical flow channels that are orthogonal to the horizontal flow channels;

(c) a plurality of individually addressable storage locations, each of which is located where one of the horizontal flow channels intersects or crosses one of the vertical flow channels;

(d) a network of compartmentalization control lines forming valves that surround the storage locations so that each storage location can be fluidically isolated;

(e) a row multiplexor containing a plurality of parallel vertical control lines that cross the horizontal flow channels, such that each of the vertical control lines forms valves that control several but not all of the horizontal flow channels, the vertical control lines being configured so that the row multiplexor can allow fluid to flow through any one of the horizontal flow channels while preventing flow through the other horizontal flow channels; and

(f) a column multiplexor containing a plurality of parallel horizontal control lines that cross the vertical flow channels, such that each of the horizontal control lines forms valves that control several but not all of the vertical flow channels, the horizontal control lines being configured so that the column multiplexor can allow fluid to flow through any one of the vertical flow channels while preventing flow through the other vertical flow channels,

wherein either or both of the row multiplexor and column multiplexor are configured as a ternary multiplexor such that flow in a number “

n”

of the horizontal or the vertical flow channels can be controlled by 3·

log₃(n) control lines of the row or the column multiplexor, respectively.