Detection method for substance and system thereof

• US 9,714,887 B2
• Filed: 09/04/2012
• Issued: 07/25/2017
• Est. Priority Date: 09/04/2012
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Kuo, Chi-Wen, Hung, Yu-Kun, Chuang, Tzu-Sou
• Primary Examiner(s): Menon, Krishnan S
• Assistant Examiner(s): Gerido, Dwan A
• Application Number:
  US13/602,528
• Publication Number:
  US 20140065719A1
• Time in Patent Office: 1,785 Days
• Field of Search: 436149, 436163, 436164, 422 83
• CPC Class Codes: G01N 1/2202 involving separation of sample components during sampling
• CPC Class Codes: G01N 21/82 producing a precipitate or turbidity
• CPC Class Codes: G01N 31/22 using chemical indicators G01N31/02 takes precedence

Abstract

A detection method for a substance and a system thereof are provided. The detection method for a substance contained in a sample includes providing a reagent in reaction with the substance to form a chelate; and pressurizing the substance to accumulate the chelate.

Claims

1. A detection method for airborne molecular substance contained in a sample under a clean room setting, comprising steps of:

providing a chromotropic acid in reaction with the airborne molecular substance from the clean room to form a chelate in a chamber;

raising a concentration of the airborne molecular substance to increase a reacting rate of the airborne molecular substance and the chromotropic acid and accumulate the chelate through performing cyclic pressurization by a pump, the cyclic pressurization raising a pressure of the chamber to at least 3600 psi per cycle; and

determining the concentration of airborne molecular substance by taking image pixels of the chromotropic acid and the chelate to generate a pixel data and analyzing the pixel data,

wherein the airborne molecular substance comprises molecular acids, molecular bases, molecular condensables, or molecular dopants in the clean room,

wherein the raising the concentration of the airborne molecular substance by raising a pressure of the chamber to at least 3600 psi per cycle renders obtaining a detection result from providing the chromotropic acid in reaction with the airborne molecular substance to analyzing the pixel data in less than 10 minutes.

2. The detection method as claimed in claim 1, wherein the providing the chromotropic acid further comprises providing a testing piece with the chromotropic acid into the chamber.

3. The detection method as claimed in claim 1, further comprising performing a decompression for the chamber, wherein the chelate is free from a reverse reaction after the decompression.

4. The detection method as claimed in claim 1, further comprising analyzing the chelate, wherein the analyzing the chelate is performed by an analyzing method selected from a group consisting of a titrimetric analysis, a pH value analysis, a conductivity analysis, a spectrum analysis and a combination thereof.

5. The detection method as claimed in claim 1, further comprising a step of analyzing the chelate to determine an original concentration of the airborne molecular substance.

6. The detection method as claimed in claim 1, wherein the performing the cyclic comprises inputting more sample into the chamber.

7. The detection method as claimed in claim 1 further comprising a step of analyzing the chelate, wherein the chromotropic acid is one of a solution and a testing piece and the raising the concentration of the airborne molecular substance and the concentration of the chromotropic acid is performed by a pump.

8. The detection method as claimed in claim 7, wherein the testing piece is a solid chelating agent.

9. The detection method as claimed in claim 1, wherein the providing the chromotropic acid further comprises providing a solution having the chromotropic acid into the chamber.

10. The detection method as claimed in claim 9, wherein the providing the chromotropic acid further comprises adding a buffer solution into the solution having the chromotropic.

11. A detection method for a sample with airborne molecular substance under a clean room setting, comprising steps of:

providing a chromotropic acid into a chamber in reaction with the sample containing the airborne molecular substance from the clean room to form a chelate;

accelerating a reaction of the sample and the chromotropic acid through cyclic pressurization by raising a concentration of the airborne molecular substance to more than 240 times in each cycle of the cyclic pressurization; and

determining the concentration of the airborne molecular substance by taking image pixels of the chromotropic acid and the chelate to generate a pixel data and analyzing the pixel data,

wherein the airborne molecular substance comprises boron or phosphorous, and

wherein the raising the concentration of the airborne molecular substance to more than 240 times in each cycle renders obtaining a detection result from providing the chromotropic acid into the chamber to analyzing the pixel data in less than 10 minutes.

12. The detection method as claimed in claim 11, wherein the cyclic pressurization raises a concentration of the airborne molecular substance to more than 240 times in each cyclic.

13. An instant detection method for airborne molecular substance in a clean room, comprising:

providing a chamber;

providing a chromotropic acid in the chamber, the chromotropic acid being configured to react with the airborne molecular substance from the clean room to form a chelate; and

performing cyclic pressurization through a pumping device coupled to the chamber,

raising a concentration of the airborne molecular to increase a reacting rate of the airborne molecular substance and the chromotropic acid and accumulate the chelate through performing cyclic pressurization by a pump; and

determining the concentration of the airborne molecular substance by taking image pixels of the chromotropic acid and the chelate to generate a pixel data and analyzing the pixel data, wherein the raising the concentration of the airborne molecular substance by performing the cyclic pressurization renders obtaining a detection result from providing the chromotropic acid in the chamber to analyzing the pixel data in less than 10 minutes.

14. The detection method as claimed in claim 13 further comprising providing an automatic motor to drive the pumping device.

15. The detection method as claimed in claim 13 further comprising providing a computer to analyze the chelate.

16. The detection method as claimed in claim 13 further comprising providing a camera to take image pixels for the reagent and the chelate to generate a pixel data.