At-speed integrated circuit testing using through silicon in-circuit logic analysis
First Claim
1. A method for testing an integrated circuit, the method comprising:
- selecting a plurality of areas of interest on the integrated circuit that correspond to a plurality of electronic devices of the integrated circuit;
illuminating each of the areas of interest over a plurality of cycles;
receiving a reflected signal from the illuminated areas of interest, wherein the reflected signal is modulated by at least one of voltage and current present within at least one of the electronic devices;
converting the received reflected signal into an electrical signal;
analyzing the electric signal to determine a bit pattern and timing information for one or more of the electronic devices; and
comparing the bit patterns and timing information to a pre-determined bit pattern for the one or more electronic devices to determine one or more errors in one or more of the electronic devices.
1 Assignment
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Accused Products
Abstract
A method, system, and computer program product for integrated circuit wafer and die testing. The method commences by selecting areas of interest accessible from a backside of an integrated circuit where the areas of interest correspond to electronic devices (e.g., gates or transistors or vias or pads). Then, using a small-beam light source such as a laser, illuminating the areas of interest and collecting the reflected signal returned from illuminated areas of interest. A processor analyses the reflected signal to determine logic states and timing information of the electronic devices and compares the determined logic states and timing information to a pre-determined logic pattern to identify one or more errors as observed from the actual electronic devices. Specific points within an area of interest are determined from CAD layout data, and the pre-determined logic patterns can be retrieved from CAD simulation data.
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Citations
28 Claims
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1. A method for testing an integrated circuit, the method comprising:
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selecting a plurality of areas of interest on the integrated circuit that correspond to a plurality of electronic devices of the integrated circuit; illuminating each of the areas of interest over a plurality of cycles; receiving a reflected signal from the illuminated areas of interest, wherein the reflected signal is modulated by at least one of voltage and current present within at least one of the electronic devices; converting the received reflected signal into an electrical signal; analyzing the electric signal to determine a bit pattern and timing information for one or more of the electronic devices; and comparing the bit patterns and timing information to a pre-determined bit pattern for the one or more electronic devices to determine one or more errors in one or more of the electronic devices. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A system for testing an integrated circuit, comprising:
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a laser for illuminating a plurality of areas of interest on the integrated circuit, wherein each of the areas of interest correspond to an electronic device of the integrated circuit; a photodetector for receiving a reflected signal from the illuminated areas of interest and converting the received reflected signal into an electrical signal; and a processor, the processor being adapted to execute a set of program code instructions, which when executed cause the processor to; analyze the electric signal to determine a bit pattern and timing information for one or more of the electronic devices; and compare the bit patterns and timing information to a pre-determined bit pattern for the one or more electronic devices to determine one or more errors in one or more of the electronic devices. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A computer program product embodied in a non-transitory computer readable medium, the computer readable medium having stored thereon a sequence of instructions which, when executed by a processor causes the processor to execute a process for testing an integrated circuit, the process comprising:
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selecting a plurality of areas of interest on the integrated circuit that correspond to a plurality of electronic devices of the integrated circuit; illuminating each of the areas of interest over a plurality of cycles; receiving a reflected signal from the illuminated areas of interest, wherein the reflected signal is modulated by at least one of voltage and current present within at least one of the electronic devices; converting the received reflected signal into an electrical signal; analyzing the electric signal to determine a bit pattern and timing information for one or more of the electronic devices; and comparing the bit patterns and timing information to a pre-determined bit pattern for the one or more electronic devices to determine one or more errors in one or more of the electronic devices. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A method for testing an integrated circuit, the method comprising:
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selecting a plurality of areas of interest on an integrated circuit, each of the areas of interest corresponding to an electronic devices of the integrated circuit; illuminating each of the areas of interest; receiving a reflected signal from illumination of the areas of interest;
reflected signal is modulated by voltage or current in internal device of the integrated circuit;detecting illumination with a photodetector and converting into an electrical signal digitizing the electrical signal with a high acquisition speed digitizer. - View Dependent Claims (27, 28)
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Specification