Wiring length measurement apparatus and recording media

• US 9,715,568 B2
• Filed: 06/06/2014
• Issued: 07/25/2017
• Est. Priority Date: 07/23/2013
• Status: Expired due to Fees

• Current Assignee: Liquid Design Systems Inc.
• Original Assignee: Liquid Design Systems Inc.
• Inventors: Maeda, Shinichi, Iwase, Katsuhiko
• Primary Examiner(s): Ngo, Brian
• Application Number:
  US14/411,807
• Publication Number:
  US 20160267213A1
• Time in Patent Office: 1,145 Days
• Field of Search: 716106, 716107, 716111, 716136, 716139
• CPC Class Codes: G06F 30/398 Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] optical proximity correction [OPC] design processes G03F1/36
• CPC Class Codes: H01L 27/0203 Particular design considerations for integrated circuits
• CPC Class Codes: H01L 27/0207 Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique

Abstract

The wiring length measurement apparatus includes a distance calculation unit, by using a plurality of coordinates of bending points and a wiring width of CAD data of a high-density wiring including a meander wiring, seeking each endpoint that exists on an edge in a wiring width direction and is a flexion point of each inner circuit side, and calculating distances between each adjacent endpoint and a measurement unit measuring a wiring length of the high-density wiring by calculating a sum of the distances between each endpoint calculated by the distance calculation unit.

Claims

1. A wiring length measurement apparatus comprising:

a distance calculation unit configured to determine, by using a plurality of coordinates of bending points and a wiring width of CAD data of a high-density wiring including a meander wiring, for each of the bending points a respective distance-calculation endpoint that is located on an edge in a wiring width direction and is a flexion point on an inner circuit side of the respective bending point of the high-density wiring, the distance calculation unit being configured to calculate a distance between each two adjacent endpoints; and

a measurement unit configured to measure a wiring length of the high-density wiring by calculating a sum of the distances between each two adjacent endpoints calculated by the distance calculation unit.

2. The wiring length measurement apparatus according to claim 1,

wherein the distance calculation unit provides a plurality of endpoints in locations in consideration of a wiring width in relation to each bending point, and calculates a shortest distance between the endpoints of adjacent bending points.

3. The wiring length measurement apparatus according to claim 1, further comprising:

a judgment unit judging whether an error of the sum of the distances between the a plurality of bending points of the meander wiring and a signal propagation distance of the meander wiring is greater than a threshold or not by using a semiconductor accumulation circuit'"'"'s signal frequency number, a wiring width, and a number of bending points,

wherein the distance calculation unit calculating a distance between the endpoints when the judgment unit judges the error as being equal to or greater than the threshold.

4. The wiring length measurement apparatus according to claim 3,

wherein the distance calculation unit calculating each distance between the a plurality of the bending points when the judgment unit judges the error as not being equal to or greater than the threshold.

5. The wiring length measurement apparatus according to claim 1,

wherein the judgment unit, in the event that the wiring has an arc portion, measuring the wiring length including an inner side arc length of the arc portion.

6. A computer readable storage device storing a program for operating a computer, the computer as modified by the program comprising:

a distance calculation unit configured to determine, by using a plurality of coordinates of bending points and a wiring width of CAD data of a high-density wiring including a meander wiring, for each of the bending points a respective distance-calculation endpoint that is located on an edge in a wiring width direction and is a flexion point on an inner circuit side of the respective bending point of the high-density wiring, the distance calculation unit being configured to calculate a distance between each two adjacent endpoints; and

a measurement unit configured to measure a wiring length of the high-density wiring by calculating a sum of the distances between each two adjacent endpoints calculated by the distance calculation unit.

7. A wiring length measurement apparatus comprising:

a measurement candidate point setting unit configured to set or define, for each respective bend or corner along a meander wiring of a high density wiring, a plurality of intersection points of boundary straight lines of the meander wiring in a neighborhood of each respective bend or corner as a plurality of measurement candidate points by using a wiring width and a plurality of corner coordinates of CAD data of a high-density wiring including the meander wiring;

a shortest-distance calculation unit configured to calculate, for every two adjacent bends or corners of the meander wiring, distances between each measurement candidate point corresponding to one of the adjacent bends or corners and each of the measurement candidate points corresponding to the other of the adjacent bends or corners, and further configured to select for each of the adjacent bends or corners a shortest distance from the respective calculated distances; and

a sum calculation unit calculating a sum of shortest distances between every two adjacent bends or corners for a wiring length of the high-density wiring.

8. The wiring length measurement apparatus according to claim 7,

wherein the measurement candidate point setting unit setting, with respect to a starting point and an ending point of the corner coordinates, a plurality of intersecting points of the boundary straight line passing through the neighborhood of the corner coordinate and the straight line that passes through the corner coordinate and runs orthogonal to the boundary straight line as a plurality of measurement candidate points.

9. The wiring length measurement apparatus according to claim 7, further comprising:

an arc length calculation unit calculating an arc length of an inner circuit side of a corner part in each corner part of the high-density wiring,

wherein the measurement candidate point setting unit setting, with respect to a corner coordinate of the corner part, each intersection point as a plurality of measurement candidate points of a plurality of border straight lines that pass through a neighborhood of the corner part and the corner part'"'"'s arcs of the inner circuit side and outer circuit side,

the sum calculation unit that calculates the sum of the shortest distances between every adjacent corner coordinates and the arc length in each corner part calculated by the arc length measurement unit.

10. The wiring length measurement apparatus according to claim 7,

wherein the sum calculation unit calculating a sum of the distances between the corner coordinates as the high-density wiring'"'"'s wiring length in the event that a multiplication value of a semiconductor accumulation circuit'"'"'s signal frequency number, a wiring width, and a number of bending points is below a threshold.

11. The wiring length measurement apparatus according to claim 7,

wherein the meander wiring'"'"'s wiring width is set by 3m<

s<

10m and 5m<

b in an event that a meander wiring'"'"'s wiring width is m, an interval with the adjacent wiring is s, and a length from the protruded unit'"'"'s inner circuit side border to indented unit'"'"'s inner circuit side border is b.

12. A computer readable storage device storing a program for operating a computer, the computer as modified by the comprising:

a measurement candidate point setting unit configured to set or define, for each respective bend or corner along a meander wiring of a high density wiring, a plurality of intersection points of boundary straight lines of the meander wiring in a neighborhood of each respective bend or corner as a plurality of measurement candidate points by using a wiring width and a plurality of corner coordinates of CAD data of a high-density wiring including the meander wiring;

a shortest-distance calculation unit configured to calculate, for every two adjacent bends or corners of the meander wiring, distances between each measurement candidate point corresponding to one of the adjacent bends or corners and each of the measurement candidate points corresponding to the other of the adjacent bends or corners, and further configured to select for each of the adjacent bends or corners a shortest distance from the respective calculated distances; and

a sum calculation unit calculating a sum of shortest distances between every two adjacent bends or corners for a wiring length of the high-density wiring.