Semiconductor device
First Claim
1. A semiconductor device comprising:
- a gate electrode over a substrate;
a gate insulating layer over the gate electrode;
a semiconductor layer over the gate insulating layer;
a first conductive layer comprising titanium, the first conductive layer being in contact with the semiconductor layer;
a second conductive layer on the first conductive layer;
a third conductive layer comprising an ITO over the second conductive layer, the third conductive layer being in contact with an end portion and part of a top surface of the second conductive layer; and
an insulating layer over the second conductive layer,wherein the third conductive layer is in contact with the first conductive layer,wherein a first width of the first conductive layer is larger than a second width of a top portion of the second conductive layer,wherein the second conductive layer comprises a low-resistant metal,wherein the semiconductor layer comprises an amorphous silicon,wherein an extending portion of the third conductive layer is a pixel electrode, andwherein the pixel electrode is provided over the insulating layer.
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Abstract
It is an object of the present invention to connect a wiring, an electrode, or the like formed with two incompatible films (an ITO film and an aluminum film) without increasing the cross-sectional area of the wiring and to achieve lower power consumption even when the screen size becomes larger. The present invention provides a two-layer structure including an upper layer and a lower layer having a larger width than the upper layer. A first conductive layer is formed with Ti or Mo, and a second conductive layer is formed with aluminum (pure aluminum) having low electric resistance over the first conductive layer. A part of the lower layer projected from the end section of the upper layer is bonded with ITO.
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Citations
8 Claims
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1. A semiconductor device comprising:
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a gate electrode over a substrate; a gate insulating layer over the gate electrode; a semiconductor layer over the gate insulating layer; a first conductive layer comprising titanium, the first conductive layer being in contact with the semiconductor layer; a second conductive layer on the first conductive layer; a third conductive layer comprising an ITO over the second conductive layer, the third conductive layer being in contact with an end portion and part of a top surface of the second conductive layer; and an insulating layer over the second conductive layer, wherein the third conductive layer is in contact with the first conductive layer, wherein a first width of the first conductive layer is larger than a second width of a top portion of the second conductive layer, wherein the second conductive layer comprises a low-resistant metal, wherein the semiconductor layer comprises an amorphous silicon, wherein an extending portion of the third conductive layer is a pixel electrode, and wherein the pixel electrode is provided over the insulating layer. - View Dependent Claims (2, 3, 7)
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4. A semiconductor device comprising:
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a gate electrode over a substrate; a gate insulating layer over the gate electrode; a semiconductor layer over the gate insulating layer; a source electrode and a drain electrode, over the semiconductor layer; wherein one of the source electrode and the drain electrode is electrically connected to the semiconductor layer, and has a first conductive layer and a second conductive layer; a third conductive layer comprising an ITO over the second conductive layer, the third conductive layer being in contact with an end portion and part of a top surface of the second conductive layer, an insulating layer over the source electrode and the drain electrode; wherein the second conductive layer is provided on the first conductive layer, wherein the third conductive layer is in contact with the first conductive layer, wherein a first width of the first conductive layer is larger than a second width of a top portion of the second conductive layer, wherein the first conductive layer comprises titanium, wherein the second conductive layer comprises a low-resistant metal, wherein the semiconductor layer comprises an amorphous silicon, wherein an extending portion of the third conductive layer is a pixel electrode, wherein the pixel electrode is provided over the insulating layer, wherein an orientation film is provided over the pixel electrode, and wherein a liquid crystal layer is provided over the orientation film. - View Dependent Claims (5, 6, 8)
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Specification