Functional device, electronic apparatus, and moving object

• US 9,718,670 B2
• Filed: 07/11/2014
• Issued: 08/01/2017
• Est. Priority Date: 07/17/2013
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Tanaka, Satoru
• Primary Examiner(s): Lee, Eugene
• Application Number:
  US14/329,109
• Publication Number:
  US 20150021719A1
• Time in Patent Office: 1,117 Days
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 3/0013 Structures dimensioned for mechanical prevention of stiction, e.g. spring with increased stiffness
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60

Abstract

A functional device includes a movable body displaceable along a first axis, a fixed section configured to support the movable body in a coupling section, a movable electrode section extending from the movable body, a fixed electrode section arranged to be opposed to the movable electrode section, and an extending section extending from the fixed section and including an opposed section opposed to a side surface of the movable electrode section. The distance between the opposed section and the movable electrode section is smaller than the distance between the fixed electrode section and the movable electrode section.

Claims

1. A functional device comprising:

a movable body displaceable along a first axis;

a fixed section configured to support the movable body;

a coupling section located between the movable body and the fixed section that couples the movable body to the fixed section, the coupling section having a plurality of interconnected beams that meander back and forth betweeen the movable body and the fixed section;

a movable electrode section extending from the movable body;

a fixed electrode section arranged to be opposed to the movable electrode section; and

an extending section extending from the fixed section and including an opposed section opposed to a side surface of the movable electrode section, wherein

a distance between the opposed section and the movable electrode section is smaller than a distance between the fixed electrode section and the movable electrode section.

2. The functional device according to claim 1, wherein

a plurality of the movable electrode sections are provided along the first axis, and

a distance between the opposed section and the movable electrode section opposed to the opposed section is smaller than a distance between the fixed electrode section and the other movable electrode sections.

3. The functional device according to claim 1, wherein

a plurality of the movable electrode sections are provided along the first axis, and

a width of the movable electrode section opposed to the opposed section is larger than a width of the other movable electrode sections.

4. The functional device according to claim 1, wherein a protrusion section is provided in the opposed section of the extending section.

5. The functional device according to claim 1, wherein the extending section includes:

a first portion extending from the fixed section along a second axis that crosses the first axis; and

a second portion extending from the first portion in a direction of the first axis and including the opposed section at an end.

6. The functional device according to claim 1, wherein the fixed section, the extending section, the coupling section, the movable electrode section, and the movable body are integrally provided.

7. The functional device according to claim 1, wherein the extending section includes a portion opposed to a distal end face of the movable electrode section.

8. The functional device according to claim 1, wherein

the coupling section includes:

a first coupling section arranged on one side across the first axis; and

a second coupling section arranged on the other side, and

the movable body is provided to extend between the first coupling section and the second coupling section.

9. The functional device according to claim 8, wherein a distance between an end of an extending portion of the movable body and an end of the fixed section is set smaller than the distance between the fixed electrode section and the movable electrode section.

10. The functional device according to claim 1, wherein

the movable electrode section includes:

a first movable electrode section extending from one end of the movable body along a second axis that crosses the first axis; and

a second movable electrode extending from the other end on an opposite side of the one end, and

the functional device further comprises;

a first extending section extending from the fixed section and including a first opposed section opposed to a side surface of the first movable electrode section; and

a second extending section extending from the fixed section and including a second opposed section opposed to a side surface of the second movable electrode section.

11. The functional device according to claim 1, wherein

the fixed section includes a first fixed section and a second fixed section,

the movable body is supported by the first fixed section and the second fixed section,

a second coupling section located between the movable body and the second fixed section that couples the movable body to the second fixed section, and

the movable electrode section includes:

a first movable electrode section extending from one end of the movable body along a second axis that crosses the first axis; and

a second movable electrode section extending from the other end on an opposite side of the one end, and

the functional device further comprises;

a first extending section functioning as the extending section, the first extending section extending from the first fixed section and including a first opposed section opposed to a side surface of the first movable electrode; and

a third extending section functioning as the extending section, the third extending section extending from the second fixed section in an opposite direction of the first extending section and including a third opposed section opposed to a side surface of the second movable electrode section.

12. The functional device according to claim 2, wherein

a plurality of the movable electrode sections are provided along the first axis, and

width of the movable electrode section opposed to the opposed section is larger than width of the other movable electrode sections.

13. The functional device according to claim 2, wherein a protrusion section is provided in at least one of the opposed section of the extending section and a portion of the movable electrode section opposed to the opposed section.

14. The functional device according to claim 3, wherein a protrusion section is provided in at least one of the opposed section of the extending section and a portion of the movable electrode section opposed to the opposed section.

15. The functional device according to claim 2, wherein the extending section includes:

a first portion extending from the fixed section along a second axis that crosses the first axis; and

a second portion extending from the first portion in a direction of the first axis and including the opposed section at an end.

16. The functional device according to claim 3, wherein the extending section includes:

a first portion extending from the fixed section along a second axis that crosses the first axis; and

a second portion extending from the first portion in a direction of the first axis and including the opposed section at an end.

17. The functional device according to claim 4, wherein the extending section includes:

a first portion extending from the fixed section along a second axis that crosses the first axis; and

a second portion extending from the first portion in a direction of the first axis and including the opposed section at an end.

18. An electronic apparatus comprising the functional device according to claim 1.

19. A moving object comprising the functional device according to claim 1.