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Method of manufacturing a switch

  • US 9,718,681 B2
  • Filed: 02/01/2016
  • Issued: 08/01/2017
  • Est. Priority Date: 04/22/2008
  • Status: Active Grant
First Claim
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1. A method of forming a switch, comprising:

  • depositing layers of resist on a structure;

    patterning the resist to form sequential openings;

    sequentially depositing metal or metal alloy within the sequential openings until at least two cantilever electrodes and at least one voltage applying electrode are formed within the layers of resist;

    depositing a liner over an uppermost layer of the layers of resist;

    forming openings in the liner;

    etching the layers of the resist through the opening until the cantilever electrodes and the at least one voltage applying electrode are in a void; and

    sealing the void with additional liner material to form a hermetically sealed dome.

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