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Fluid recirculation system for use in vapor phase particle production system

  • US 9,719,727 B2
  • Filed: 11/14/2014
  • Issued: 08/01/2017
  • Est. Priority Date: 04/19/2005
  • Status: Active Grant
First Claim
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1. A method comprising:

  • plasma vaporizing a precursor material using a first gas, thereby producing a vaporized particle-gas mixture;

    quenching the vaporized particle-gas mixture using a conditioning fluid comprising a second gas, thereby producing a cooled particle-gas mixture comprising a plurality of particles comprising the precursor material;

    removing the plurality of particles from the cooled particle-gas mixture, thereby producing a filtered output comprising the first gas and the second gas;

    adjusting an amount of the filtered output, thereby producing a content-controlled, filtered output;

    supplying the content-controlled, filtered output as the conditioning fluid for quenching the vaporized particle-gas mixture.

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