Fluid recirculation system for use in vapor phase particle production system
First Claim
1. A method comprising:
- plasma vaporizing a precursor material using a first gas, thereby producing a vaporized particle-gas mixture;
quenching the vaporized particle-gas mixture using a conditioning fluid comprising a second gas, thereby producing a cooled particle-gas mixture comprising a plurality of particles comprising the precursor material;
removing the plurality of particles from the cooled particle-gas mixture, thereby producing a filtered output comprising the first gas and the second gas;
adjusting an amount of the filtered output, thereby producing a content-controlled, filtered output;
supplying the content-controlled, filtered output as the conditioning fluid for quenching the vaporized particle-gas mixture.
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Abstract
A method of and system for recirculating a fluid in a particle production system. A reactor produces a reactive particle-gas mixture. A quench chamber mixes a conditioning fluid with the reactive particle-gas mixture, producing a cooled particle-gas mixture that comprises a plurality of precursor material particles and an output fluid. A filter element filters the output fluid, producing a filtered output. A temperature control module controls the temperature of the filtered output, producing a temperature-controlled, filtered output. A content ratio control module modulates the content of the temperature-controlled, filtered output, thereby producing a content-controlled, temperature-controlled, filtered output. A channeling element supplies the content-controlled, temperature-controlled, filtered output to the quench chamber, wherein the content-controlled, filtered output is provided to the quench chamber as the conditioning fluid to be used in cooling the reactive particle-gas mixture.
719 Citations
9 Claims
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1. A method comprising:
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plasma vaporizing a precursor material using a first gas, thereby producing a vaporized particle-gas mixture; quenching the vaporized particle-gas mixture using a conditioning fluid comprising a second gas, thereby producing a cooled particle-gas mixture comprising a plurality of particles comprising the precursor material; removing the plurality of particles from the cooled particle-gas mixture, thereby producing a filtered output comprising the first gas and the second gas; adjusting an amount of the filtered output, thereby producing a content-controlled, filtered output; supplying the content-controlled, filtered output as the conditioning fluid for quenching the vaporized particle-gas mixture. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification